公开(公告)号：IL317107A

公开(公告)日：2025-01-01

申请号：IL31710724

申请日：2024-11-18

Applicant: ASML NETHERLANDS BV ,  PISARENCO MAXIM ,  BATISTAKIS CHRYSOSTOMOS

Inventor： PISARENCO MAXIM ,  BATISTAKIS CHRYSOSTOMOS

Abstract: A method of training a generator model comprising: using the generator model to generate the predictive data based on the first measured data, wherein the first measured data and the predictive data can be used to form images of the sample; pairing subsets of the first measured data with subsets of the predictive data, the subsets corresponding to locations within the images of the sample that can be formed from the first measured data and the predictive data; using a discriminator to evaluate a likelihood that the predictive data comes from a same data distribution as second measured data measured from a sample after an etching process; and training the generator model based on: correlation for the pairs corresponding to a same location relative to correlation for pairs corresponding to different locations, the correlation being the correlation between the paired subsets of data, and the likelihood evaluated by the discriminator.