公开(公告)号：WO2005072089A2

公开(公告)日：2005-08-11

申请号：PCT/US2004/041467

申请日：2004-12-13

Applicant: THE PENN STATE RESEARCH FOUNDATION ,  PENG, Chih-Yi ,  KALKAN, Ali, Kaan ,  CUIFFI, Joseph, D. ,  SHAN, Yinghui ,  FONASH, Stephen ,  HAYES, Daniel ,  BUTTERFOSS, Paul ,  NAM, Wook, Jun

Inventor： PENG, Chih-Yi ,  KALKAN, Ali, Kaan ,  CUIFFI, Joseph, D. ,  SHAN, Yinghui ,  FONASH, Stephen ,  HAYES, Daniel ,  BUTTERFOSS, Paul ,  NAM, Wook, Jun

IPC: B81C1/00 ,  H01L21/20 ,  H01L21/44 ,  H01L29/06 ,  H01L51/00

CPC classification number: B81C1/0019 ,  B81B2203/0109 ,  B81B2203/0118 ,  B82Y10/00 ,  H01L21/0237 ,  H01L21/02532 ,  H01L21/0259 ,  H01L21/02603 ,  H01L21/02639 ,  H01L21/02645 ,  H01L21/02653 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/068 ,  H01L51/0002 ,  Y02E10/549 ,  Y10S977/762

Abstract: This invention presents a novel method to form uniform or heterogeneous, straight or curved and size-controllable nanostructures, nanowires, and nanotapes, including SiNW, in a nanochannel template. In the case of semiconductor nanowires, doping can be included during growth. Electrode contacts are present as needed and built in to the template structure. Thus completed devices such as diodes, transistors, solar cells, sensors, and transducers are fabricated, contacted, and arrayed as nanowire or nanotape fabrication is completed. Optionally, the template is not removed may become part of the structure. Nanostructures such as nanotweezers, nanocantiliver, and nanobridges are formed utilizing the processes of the invention.

Abstract translation: 本发明提出了一种在纳米通道模板中形成均匀或不均匀的直线或弯曲和尺寸可控的纳米结构，纳米线和纳米线（包括SiNW）的新方法。 在半导体纳米线的情况下，可以在生长期间包括掺杂。 根据需要存在电极触点，并内置于模板结构中。 如纳米线或纳米管制造完成时，制造，接触和排列诸如二极管，晶体管，太阳能电池，传感器和换能器的完成器件。 可选地，模板不被移除可能成为结构的一部分。 使用本发明的方法形成纳米结构，如纳米滴定剂，纳坦溶剂和纳米桥。

公开(公告)号：WO2005072089A3

公开(公告)日：2006-07-13

申请号：PCT/US2004041467

申请日：2004-12-13

Applicant: PENN STATE RES FOUND ,  PENG CHIH-YI ,  KALKAN ALI KAAN ,  CUIFFI JOSEPH D ,  SHAN YINGHUI ,  FONASH STEPHEN ,  HAYES DANIEL ,  BUTTERFOSS PAUL ,  NAM WOOK JUN

Inventor： PENG CHIH-YI ,  KALKAN ALI KAAN ,  CUIFFI JOSEPH D ,  SHAN YINGHUI ,  FONASH STEPHEN ,  HAYES DANIEL ,  BUTTERFOSS PAUL ,  NAM WOOK JUN

IPC: H01L21/36 ,  B81C1/00 ,  H01L21/20 ,  H01L21/44 ,  H01L29/06 ,  H01L51/00

CPC classification number: B81C1/0019 ,  B81B2203/0109 ,  B81B2203/0118 ,  B82Y10/00 ,  H01L21/0237 ,  H01L21/02532 ,  H01L21/0259 ,  H01L21/02603 ,  H01L21/02639 ,  H01L21/02645 ,  H01L21/02653 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/068 ,  H01L51/0002 ,  Y02E10/549 ,  Y10S977/762

Abstract: This invention presents a novel method to form uniform or heterogeneous, straight or curved and size-controllable nanostructures, nanowires, and nanotapes, including SiNW, in a nanochannel template. In the case of semiconductor nanowires, doping can be included during growth. Electrode contacts are present as needed and built in to the template structure. Thus completed devices such as diodes, transistors, solar cells, sensors, and transducers are fabricated, contacted, and arrayed as nanowire or nanotape fabrication is completed. Optionally, the template is not removed may become part of the structure. Nanostructures such as nanotweezers, nanocantiliver, and nanobridges are formed utilizing the processes of the invention.

Abstract translation: 本发明提出了一种在纳米通道模板中形成均匀或不均匀的直线或弯曲和尺寸可控的纳米结构，纳米线和纳米线（包括SiNW）的新方法。 在半导体纳米线的情况下，在生长期间可以包括掺杂。 根据需要存在电极触点，并内置于模板结构中。 如纳米线或纳米线制造完成时，制造，接触和排列诸如二极管，晶体管，太阳能电池，传感器和换能器的完成器件。 可选地，模板不被移除可能成为结构的一部分。 使用本发明的方法形成纳米结构，纳米滴定剂，纳米栓剂和纳米桥接纳米结构。