公开(公告)号：US5981304A

公开(公告)日：1999-11-09

申请号：US992697

申请日：1997-12-17

Applicant: Aime Perrin ,  Brigitte Montmayeul

Inventor： Aime Perrin ,  Brigitte Montmayeul

IPC: G03F9/00 ,  H01J9/02 ,  H01L21/00 ,  C23F1/00 ,  H01L21/302 ,  H01L21/4763

CPC classification number: H01J9/025

Abstract: Self-alignment process usable in microelectronics to obtain alignment of at least one group of holes, one of said holes (or large diameter hole) being formed in an upper level and the other hole (or small diameter hole) being formed in a lower level of a stacked structure. The process consists of:providing a conducting layer in the structure, said conducting layer possibly being connected to an external electrical circuit,disposing an insulating layer on said conducting layer,piercing the insulating layer with a hole of said small diameter that penetrates as far as the conducting layer,carrying out an electrolytic deposit of a conducting material in the small diameter hole using the conducting layer as the electrode during the electrolysis procedure, said electrolytic deposit filling the small diameter hole from the conducting layer and causing the deposit to overflow onto said insulating layer to give the electrolytically deposited conducting material the shape of a mushroom whose head rests on said insulating layer, the electrolytic deposition being continued until the diameter of the mushroom head attains the size of the large diameter,depositing on the structure thereby obtained a layer of a different type of material from the electrolytically deposited conducting material,removing the mushroom, thereby leaving a large diameter hole aligned with a small diameter hole in the last layer deposited.

Abstract translation: 可用于微电子学中的自对准过程以获得至少一组孔的对准，所述孔中的一个（或大直径孔）形成在上层中，另一个孔（或小直径孔）形成在较低层 的堆叠结构。 该方法包括：在结构中提供导电层，所述导电层可能连接到外部电路，在所述导电层上设置绝缘层，用绝缘层刺穿所述小直径的孔，该孔穿透至 导电层，在电解过程中使用导电层作为电极在小直径孔中进行导电材料的电解沉积，所述电解沉积物从导电层填充小直径孔，并使沉积物溢流到所述导电层上 绝缘层，使电解沉积的导电材料的头部位于所述绝缘层上的蘑菇的形状，电解沉积继续进行直到蘑菇头的直径达到大直径的尺寸，沉积在结构上由此获得层 的不同类型的材料从电解d 去除蘑菇，从而留下与沉积的最后一层中的小直径孔对准的大直径孔。

公开(公告)号：US5786663A

公开(公告)日：1998-07-28

申请号：US716570

申请日：1996-09-18

Applicant: Robert Meyer ,  Brigitte Montmayeul ,  Jean-Fran.cedilla.ois Boronat ,  Jean-Frederic Clerc

Inventor： Robert Meyer ,  Brigitte Montmayeul ,  Jean-Fran.cedilla.ois Boronat ,  Jean-Frederic Clerc

IPC: H01J29/08 ,  H01J31/12

CPC classification number: H01J29/085 ,  H01J2329/00

Abstract: An electron collector having an anode constituted by a substrate (21, 40, 41) on which are deposited conductive strips or tracks (23, 43). A dielectric material layer is deposited on at least one of the edges of each conductive strip.

Abstract translation: 一种具有阳极的电子收集器，该阳极由其上沉积有导电条或轨道（23,43）的基底（21,40,41）构成。 介电材料层沉积在每个导电条的至少一个边缘上。

公开(公告)号：US07759851B2

公开(公告)日：2010-07-20

申请号：US10485669

申请日：2003-02-18

Applicant: Jean Dijon ,  Adeline Fournier ,  Brigitte Montmayeul

Inventor： Jean Dijon ,  Adeline Fournier ,  Brigitte Montmayeul

IPC: H01J17/49 ,  H01J1/62 ,  H01J9/02

CPC classification number: H01J3/022

Abstract: This invention relates to a triode type cathode structure comprising, in superposition, an electrode forming a cathode (13) and supporting means made of an electron emitting material in the form of a layer (14), an electrical insulation layer (11) and a grid electrode (15), an opening (12) formed in the grid electrode and in the electrical insulation layer exposing the means made of an electron emitting material. The means made of an electron emitting material (14) are located in the central part of the opening of the grid electrode (15), this opening being in the form of a slit and the means made of an electron emitting material exposed by the slit being composed of elements aligned along the longitudinal axis of the slit.

Abstract translation: 本发明涉及一种三极管型阴极结构，其包括叠加形成阴极（13）的电极和由层（14）形式的电子发射材料制成的支撑装置，电绝缘层（11）和 栅电极（15），形成在栅电极中的电绝缘层中的开口（12），暴露由电子发射材料制成的装置。 由电子发射材料（14）制成的装置位于栅电极（15）的开口的中心部分，该开口呈狭缝的形式，由电子发射材料制成的装置由狭缝暴露 由沿着狭缝的纵向轴线排列的元件构成。

公开(公告)号：US06917147B2

公开(公告)日：2005-07-12

申请号：US10367885

申请日：2003-02-19

Applicant: Jean Dijon ,  Adeline Fournier ,  Brigitte Montmayeul ,  Aimé Perrin

Inventor： Jean Dijon ,  Adeline Fournier ,  Brigitte Montmayeul ,  Aimé Perrin

IPC: H01J29/04 ,  H01J1/304 ,  H01J3/02 ,  H01J31/12 ,  H01J1/30

CPC classification number: H01J3/022

Abstract: A triode type cathode structure including a cathode assembly composed of a cathode electrode at least one electron emitter and a resistive layer inserted between the cathode electrode and the at least one electron emitter to connect them together electrically. The triode cathode structure also includes a grid electrode separated from the cathode assembly by a layer of electrical insulation. The cathode electrode is arranged in a first plane and the at least one electron emitter is arranged in a second plane parallel to the first plane and the cathode electrode and each electron emitter are separated by a same distance measured in a third plane parallel to the first and second planes.

Abstract translation: 一种三极管型阴极结构，包括由阴极至少一个电子发射体和插入阴极和至少一个电子发射体之间的电阻层构成的阴极组件，以将它们电连接在一起。 三极管阴极结构还包括通过电绝缘层与阴极组件分离的栅电极。 阴极电极布置在第一平面中，并且至少一个电子发射器布置在平行于第一平面的第二平面中，并且阴极电极和每个电子发射器在与第一平面平行的第三平面中测量的相同距离分开 和第二架飞机。

公开(公告)号：US06815902B1

公开(公告)日：2004-11-09

申请号：US10049777

申请日：2002-07-22

Applicant: Aimé Perrin ,  Adeline Fournier ,  Brigitte Montmayeul

Inventor： Aimé Perrin ,  Adeline Fournier ,  Brigitte Montmayeul

IPC: G09G310

CPC classification number: H01J29/467 ,  H01J3/022 ,  H01J31/127

Abstract: A device produces an electric field between two electrodes, the electric field having a specified value in the vicinity of a first of the two electrodes. The device includes a means for applying a potential difference between the two electrodes, means forming modulation electrode located near to the first electrode in the vicinity of which the electric field must have specified value. The device also includes control means for applying a potential difference between the means forming modulation electrode and the first electrode located nearby in order to obtain, through the contribution of the potential differences, the specified value of electric field.

公开(公告)号：US20080194168A1

公开(公告)日：2008-08-14

申请号：US11915222

申请日：2006-05-29

Applicant: Robert Meyer ,  Brigitte Montmayeul

Inventor： Robert Meyer ,  Brigitte Montmayeul

IPC: H01J9/02

CPC classification number: H01J9/025 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  D01F9/127 ,  H01J1/3048 ,  H01J31/127 ,  H01J2201/30469 ,  H01J2201/319 ,  H01L51/0048 ,  H01L51/0541 ,  H01L51/055

Abstract: A method for manufacturing a triode type cathode structure including depositing and etching: a cathode layer as cathode conductors; a grid layer as grid conductors; an electrical insulation layer and the grid conductors until reaching a resistive layer to provide cavities; and the cathode conductors to have a perforated structure at the intersection of the cathode conductors and grid conductors. Etching the grid conductors and the electrical insulation layer includes: a) depositing a resin layer on the grid layer, b) lithography and development of the resin layer according to a pattern that will form emissive pads, c) etching the grid layer according to the pattern, d) etching the insulation layer subjacent to the grid layer by extending the etching beyond emissive pad patterns, e) etching the grid layer at zones exposed by etching the insulation layer until reaching the resin layer, f) depositing a catalyst layer in openings of the resin layer to form emissive pads at the bottom of the cavities, and g) eliminating the resin layer.

Abstract translation: 一种制造三极管型阴极结构的方法，包括沉积和蚀刻：阴极层作为阴极导体; 栅格层作为栅格导体; 电绝缘层和栅格导体，直到到达电阻层以提供空腔; 并且阴极导体在阴极导体和栅格导体的交叉处具有穿孔结构。 栅格导体和电绝缘层的蚀刻包括：a）在栅格层上沉积树脂层，b）根据将形成发射焊盘的图案对树脂层进行光刻和显影，c）根据 图案，d）通过将蚀刻延伸超过发光垫图案来蚀刻栅格层以下的绝缘层，e）在通过蚀刻绝缘层暴露的区域蚀刻栅格层直到到达树脂层，f）在开口中沉积催化剂层 的树脂层，以在空腔的底部形成发光垫，并且g）消除树脂层。

公开(公告)号：US5882845A

公开(公告)日：1999-03-16

申请号：US696717

申请日：1996-08-14

Applicant: Michel Ida ,  Brigitte Montmayeul

Inventor： Michel Ida ,  Brigitte Montmayeul

IPC: G03F1/20 ,  H01J9/02 ,  H01L21/027 ,  G03F7/00

CPC classification number: G03F1/20 ,  H01J9/025

Abstract: A method and a device for the formation of holes in a layer of photosensitive material, in particular for the manufacture of electron sources.This method is characterized in that a membrane (121) with micro-perforations (122) is laid onto the layer of photosensitive material (120); the layer of photosensitive material is insolated through the membrane (121) in order to print areas (125) corresponding to the micro-perforations (122); the membrane (121) is separated from the layer of photosensitive material (120) thus insolated and the photosensitive layer (120) is then developed in order to form holes in it corresponding to the insolated areas (125).

Abstract translation: 用于在感光材料层中形成空穴的方法和装置，特别是用于制造电子源。 该方法的特征在于，将具有微穿孔（122）的膜（121）放置在感光材料层（120）上; 为了打印对应于微穿孔（122）的区域（125），感光材料层通过膜（121）进行绝缘。 膜（121）与所蚀刻的感光材料层（120）分离，然后显影感光层（120），以在其中形成与绝缘区域（125）相对应的孔。

公开(公告)号：US07785164B2

公开(公告)日：2010-08-31

申请号：US11915222

申请日：2006-05-29

Applicant: Robert Meyer ,  Brigitte Montmayeul

Inventor： Robert Meyer ,  Brigitte Montmayeul

IPC: H01J17/49 ,  H01J9/00

CPC classification number: H01J9/025 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/162 ,  D01F9/127 ,  H01J1/3048 ,  H01J31/127 ,  H01J2201/30469 ,  H01J2201/319 ,  H01L51/0048 ,  H01L51/0541 ,  H01L51/055

Abstract: A method for manufacturing a triode type cathode structure including depositing and etching: a cathode layer as cathode conductors; a grid layer as grid conductors; an electrical insulation layer and the grid conductors until reaching a resistive layer to provide cavities; and the cathode conductors to have a perforated structure at the intersection of the cathode conductors and grid conductors. Etching the grid conductors and the electrical insulation layer includes: a) depositing a resin layer on the grid layer, b) lithography and development of the resin layer according to a pattern that will form emissive pads, c) etching the grid layer according to the pattern, d) etching the insulation layer subjacent to the grid layer by extending the etching beyond emissive pad patterns, e) etching the grid layer at zones exposed by etching the insulation layer until reaching the resin layer, f) depositing a catalyst layer in openings of the resin layer to form emissive pads at the bottom of the cavities, and g) eliminating the resin layer.

Abstract translation: 一种制造三极管型阴极结构的方法，包括沉积和蚀刻：阴极层作为阴极导体; 栅格层作为栅格导体; 电绝缘层和栅格导体，直到到达电阻层以提供空腔; 并且阴极导体在阴极导体和栅格导体的交叉处具有穿孔结构。 栅格导体和电绝缘层的蚀刻包括：a）在栅格层上沉积树脂层，b）根据将形成发射焊盘的图案对树脂层进行光刻和显影，c）根据 图案，d）通过将蚀刻延伸超过发光垫图案来蚀刻栅格层以下的绝缘层，e）在通过蚀刻绝缘层暴露的区域蚀刻栅格层直到到达树脂层，f）在开口中沉积催化剂层 的树脂层，以在空腔的底部形成发光垫，并且g）消除树脂层。

公开(公告)号：US06534913B1

公开(公告)日：2003-03-18

申请号：US09509542

申请日：2000-05-08

Applicant: Aimé Perrin ,  Brigitte Montmayeul ,  Robert Meyer

Inventor： Aimé Perrin ,  Brigitte Montmayeul ,  Robert Meyer

IPC: H01J302

CPC classification number: H01J3/022

Abstract: A microtip electron source including at least one electron emission zone composed of a plurality of microtips connected electrically to a cathode conductor. At least one gate electrode is positioned opposite the electron emission zone and pierced with apertures located opposite the microtips, to extract the electrons from the microtips. An emitted electron focusing gate is positioned opposite the gate electrode, and includes an aperture unit including at least one slit located opposite at least two successive microtips. A flat display screen can include such a microtip electron source. Further, a manufacturing process of such an electron source is disclosed.

Abstract translation: 包括至少一个由与阴极导体电连接的多个微尖头组成的电子发射区的微尖端电子源。 至少一个栅极位于与电子发射区相对的位置，并穿过与微尖相对的孔，以从微尖端提取电子。 发射的电子聚焦栅极位于与栅电极相对的位置，并且包括孔单元，该孔单元包括至少一个与至少两个连续微尖相对的狭缝。 平面显示屏可以包括这样的微尖端电子源。 此外，公开了这种电子源的制造方法。

公开(公告)号：US6133690A

公开(公告)日：2000-10-17

申请号：US319240

申请日：1999-06-07

Applicant: Robert Meyer ,  Marie-Noelle Semeria ,  Brigitte Montmayeul

Inventor： Robert Meyer ,  Marie-Noelle Semeria ,  Brigitte Montmayeul

IPC: H01J9/02 ,  H01J29/04 ,  H01J31/12

CPC classification number: H01J9/025 ,  H01J31/127

Abstract: A display screen which includes a microtip electron source which is observerable through the microtip support. The screen includes a cathodoluminescent anode, transparent support and cathode conductors formed on the support. The conductors are meshed according to a first pattern which includes openings. A resistive layer formed on the support is meshed according to a second pattern and includes solid areas located in the openings of the first pattern. Microtips are formed on the solid areas. Grids are meshed according to the second pattern in an unmeshed insulating layer which is transparent and extends above the cathode conductors and the resistive layer in between them and the grids.

Abstract translation: PCT No.PCT / FR97 / 02216 Sec。 371日期1999年6月7日 102（e）1999年6月7日PCT 1997年12月5日PCT公布。 第WO98 / 25291号公报 日期1998年6月11日显示屏幕，其包括通过微尖支撑可观察的微尖电子源。 屏幕包括阴极发光阳极，形成在支撑体上的透明支撑体和阴极导体。 导体根据包括开口的第一图案而啮合。 形成在支撑体上的电阻层根据第二图案啮合，并且包括位于第一图案的开口中的实心区域。 在固体区域形成微尖。 网格根据第二图案在非绝缘绝缘层中网格化，该非绝缘绝缘层是透明的并且在阴极导体之上延伸，并且在它们之间的电阻层和网格之间。