公开(公告)号：WO2005048275A3

公开(公告)日：2006-02-09

申请号：PCT/US2004034832

申请日：2004-10-20

Applicant: FREESCALE SEMICONDUCTOR INC ,  D URSO JOHN J ,  MOLLA JAYNAL A ,  KYLER KELLY W

Inventor： D URSO JOHN J ,  MOLLA JAYNAL A ,  KYLER KELLY W

IPC: C23C18/16 ,  C23C18/50 ,  H01L21/288 ,  H01L21/768 ,  H01L27/22 ,  B05D7/24 ,  B05D1/18 ,  B05D5/12

CPC classification number: H01L43/12 ,  C23C18/1605 ,  C23C18/1676 ,  C23C18/50 ,  H01L21/288 ,  H01L21/76877

Abstract: Methods and compositions are provided for the electroless deposition of NiFe on a work piece (30). A deposition solution for use in electroless deposition of NiFe on a work piece (30) is formed from a nickel ion source, a ferrous iron source, a complexing agent, a reducing agent, and a pH reducing agent. The deposition solution is substantially free from alkali metal ions. A method for fabricating a flux concentrating system for use in a magnetoelectronics device begins by providing a work piece (30) and forming an insulating material layer (34) overlying the work piece (30). A trench (36) is formed in an insulating layer (34) and a barrier layer (40) is deposited within the trench (36). A NiFe cladding (46) layer is deposited overlying the barrier layer (40). After depositing the NiFe cladding layer (46), the insulating material layer (34) proximate to the trench has a concentration of alkali metal ions less than about 1 x 10

Abstract translation: 提供了用于将NiFe无电沉积在工件（30）上的方法和组合物。 用于将NiFe无电沉积在工件（30）上的沉积溶液由镍离子源，亚铁离子源，络合剂，还原剂和pH还原剂形成。 沉积溶液基本上不含碱金属离子。 一种用于制造用于磁电装置的助焊剂浓缩系统的方法，是通过提供工件（30）并形成覆盖在工件（30）上的绝缘材料层（34）来开始的。 沟槽（36）形成在绝缘层（34）中，并且势垒层（40）沉积在沟槽（36）内。 沉积在阻挡层（40）上的NiFe包层（46）层。 在沉积NiFe覆层（46）之后，接近沟槽的绝缘材料层（34）的碱金属离子浓度小于约1×10

公开(公告)号：WO2007100947A3

公开(公告)日：2009-09-11

申请号：PCT/US2007061215

申请日：2007-01-29

Applicant: MOTOROLA INC ,  D URSO JOHN J ,  BAKER JEFFREY H ,  KORIPELLA CHOWDARY R

Inventor： D URSO JOHN J ,  BAKER JEFFREY H ,  KORIPELLA CHOWDARY R

IPC: H01M8/02 ,  H01M4/88

CPC classification number: H01M8/1097 ,  H01M8/1004 ,  H01M2008/1095

Abstract: A micro fuel cell and method of forming such includes depositing multiple layers (22) of alternating metals over a substrate (12); etching at least one metal from the multiple layers (22) creating a void between the remaining layers; forming a plurality of pedestals (28) in the multiple layers (22), each pedestal (28) having a center anode (29) portion and a concentric cathode (31) portion separated by a concentric cavity (31); filling the concentric cavity (31) with an electrolyte; and capping the center anode (29) portion and the concentric cavity (31).

Abstract translation: 微型燃料电池及其形成方法包括在衬底（12）上沉积交替金属的多层（22）; 从多层（22）蚀刻至少一种金属，在剩余层之间产生空隙; 在所述多层（22）中形成多个基座（28），每个基座（28）具有中心阳极（29）部分和由同心腔（31）隔开的同心阴极（31）部分; 用电解质填充同心腔（31）; 并且封盖中心阳极（29）部分和同心腔（31）。