SYSTEM AND METHOD FOR INSPECTING ELECTRICAL CIRCUITS UTILIZING REFLECTIVE AND FLUORESCENT IMAGERY
    2.
    发明申请
    SYSTEM AND METHOD FOR INSPECTING ELECTRICAL CIRCUITS UTILIZING REFLECTIVE AND FLUORESCENT IMAGERY 审中-公开
    检测采用反射和荧光成像的电路的系统和方法

    公开(公告)号:WO2005084121A2

    公开(公告)日:2005-09-15

    申请号:PCT/IL2005000103

    申请日:2005-01-27

    CPC classification number: G01N21/956

    Abstract: A method for inspecting an electrical circuit including optically inspecting at least a portion of an electrical circuit by detecting light reflected therefrom in a first image during a first time interval, optically inspecting light emitted from at least a portion of the electrical circuit by fluorescence in a second image acquired during a second time interval and indicating defects in the electrical circuit based on geometrically coincident indications from both the optically inspecting at least a portion of an electrical circuit by detecting light reflected therefrom and the optically inspecting light emitted from at least a portion of the electrical circuit by fluorescence.

    Abstract translation: 一种用于检查电路的方法,包括通过在第一时间间隔内检测在第一图像中从其反射的光来光学检查电路的至少一部分,通过荧光检查从电路的至少一部分发射的光 在第二时间间隔期间获取的第二图像,并且基于通过检测从其反射的光的光学检查电路的至少一部分和从至少一部分发射的光学检查光,基于几何一致的指示来指示电路中的缺陷 电路通过荧光。

    SYSTEM AND METHOD FOR INSPECTING ELECTRICAL CIRCUITS UTILIZING REFLECTIVE AND FLUORESCENT IMAGERY

    公开(公告)号:WO2005084121A3

    公开(公告)日:2005-09-15

    申请号:PCT/IL2005/000103

    申请日:2005-01-27

    Abstract: A method for inspecting an electrical circuit including optically inspecting at least a portion of an electrical circuit by detecting light reflected therefrom in a first image during a first time interval, optically inspecting light emitted from at least a portion of the electrical circuit by fluorescence in a second image acquired during a second time interval and indicating defects in the electrical circuit based on geometrically coincident indications from both the optically inspecting at least a portion of an electrical circuit by detecting light reflected therefrom and the optically inspecting light emitted from at least a portion of the electrical circuit by fluorescence.

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