公开(公告)号：WO2009105724A2

公开(公告)日：2009-08-27

申请号：PCT/US2009/034791

申请日：2009-02-20

Applicant: ASYST TECHNOLOGIES INC . ,  SHIEH, Karl ,  COOKSON, Michael, A . ,  RILEY, Norma, B . ,  WRIGHT, Donald, Rex ,  FATULA, Joseph, John

Inventor： SHIEH, Karl ,  COOKSON, Michael, A . ,  RILEY, Norma, B . ,  WRIGHT, Donald, Rex ,  FATULA, Joseph, John

IPC: G06Q50/00 ,  G06F17/50 ,  G06F19/00 ,  G06F17/00

CPC classification number: G05B19/41885 ,  G05B2219/31334 ,  G05B2219/31466 ,  G05B2219/45031 ,  H01L21/67276 ,  Y02P90/16 ,  Y02P90/185 ,  Y02P90/26 ,  Y02P90/86

Abstract: A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.

Abstract translation: 半导体制造设备（fab）配置模块被定义为虚拟模拟晶圆厂的物理系统和属性。 数据采集​​模块被定义为与物理系统的物理系统进行接口，并从物理系统收集操作数据。 定义了可视化模块，用于收集和汇总从物理系统收集的操作数据。 视觉化模块被进一步定义为将操作数据处理成适合于视觉呈现的格式。 经处理的操作数据显示在由可视化模块控制的图形用户界面中的晶圆厂的视觉上下文中。 分析器模块被定义为分析可视化模块收集的数据，并解析有关工厂性能的查询。 定义优化器模块以响应由可视化器模块收集的数据，由分析器模块生成的数据或其组合来控制晶圆厂内的系统。

公开(公告)号：WO2009105724A3

公开(公告)日：2010-01-07

申请号：PCT/US2009034791

申请日：2009-02-20

Applicant: ASYST TECHNOLOGIES ,  SHIEH KARL ,  COOKSON MICHAEL A ,  RILEY NORMA B ,  WRIGHT DONALD REX ,  FATULA JOSEPH JOHN

Inventor： SHIEH KARL ,  COOKSON MICHAEL A ,  RILEY NORMA B ,  WRIGHT DONALD REX ,  FATULA JOSEPH JOHN

IPC: G06Q50/00 ,  G06F17/00 ,  G06F17/50 ,  G06F19/00

CPC classification number: G05B19/41885 ,  G05B2219/31334 ,  G05B2219/31466 ,  G05B2219/45031 ,  H01L21/67276 ,  Y02P90/16 ,  Y02P90/185 ,  Y02P90/26 ,  Y02P90/86

Abstract: A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.

Abstract translation: 定义了半导体制造设施（fab）配置模块以虚拟建模工厂的物理系统和属性。 数据采集​​模块被定义为与晶圆厂的物理系统连接并从物理系统收集操作数据。 可视化模块定义为收集和汇总从物理系统收集的操作数据。 可视化器模块被进一步定义为将操作数据处理成适合于视觉呈现的格式。 经处理的操作数据在由可视化器模块控制的图形用户界面中的制造设施的可视上下文内显示。 分析器模块被定义为分析由可视化器模块收集的数据并解析关于工厂性能的查询。 优化器模块被定义为响应于由可视化器模块收集的数据，由分析器模块生成的数据或其组合来控制晶圆厂内的系统。

公开(公告)号：WO2005059748A3

公开(公告)日：2006-02-09

申请号：PCT/EP2004052850

申请日：2004-11-08

Applicant: IBM ,  IBM UK ,  FATULA JOSEPH JOHN

Inventor： FATULA JOSEPH JOHN

IPC: G06F7/00 ,  G06F9/46 ,  G06F9/50

CPC classification number: G06F9/5072 ,  G06F2209/5014

Abstract: An apparatus, system, and method are disclosed for on-demand control of a grid system resource on a grid computing system. An on-demand management apparatus includes a user input module, a parameter module, and a reservation module. The user input module is configured to allow a user to input a parameter control request. The parameter control request corresponds to a performance parameter of the grid computing system. The global parameter module is configured to dynamically change the performance parameter, which corresponds to a performance resource, according to the parameter control request. The global reservation module is configured to reserve the performance resource for a grid computing operation. The on-demand management apparatus is also configured to terminate a performance resource reservation when a client reclaims the performance resources from the grid computing system.

Abstract translation: 公开了一种用于网格计算系统上的网格系统资源的按需控制的装置，系统和方法。 按需管理装置包括用户输入模块，参数模块和预约模块。 用户输入模块被配置为允许用户输入参数控制请求。 参数控制请求对应于网格计算系统的性能参数。 全局参数模块被配置为根据参数控制请求动态地改变对应于性能资源的性能参数。 全局预留模块被配置为保留网格计算操作的性能资源。 按需管理装置还被配置为当客户端从网格计算系统回收性能资源时终止性能资源预留。

公开(公告)号：WO2005059748A2

公开(公告)日：2005-06-30

申请号：PCT/EP2004/052850

申请日：2004-11-08

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION ,  IBM UNITED KINGDOM LIMITED ,  FATULA, Joseph, John

Inventor： FATULA, Joseph, John

IPC: G06F9/46

CPC classification number: G06F9/5072 ,  G06F2209/5014

Abstract: An apparatus, system, and method are disclosed for on-demand control of a grid system resource on a grid computing system. An on-demand management apparatus includes a user input module, a parameter module, and a reservation module. The user input module is configured to allow a user to input a parameter control request. The parameter control request corresponds to a performance parameter of the grid computing system. The global parameter module is configured to dynamically change the performance parameter, which corresponds to a performance resource, according to the parameter control request. The global reservation module is configured to reserve the performance resource for a grid computing operation. The on-demand management apparatus is also configured to terminate a performance resource reservation when a client reclaims the performance resources from the grid computing system.

Abstract translation: 公开了一种用于网格计算系统上的网格系统资源的按需控制的装置，系统和方法。 按需管理装置包括用户输入模块，参数模块和预约模块。 用户输入模块被配置为允许用户输入参数控制请求。 参数控制请求对应于网格计算系统的性能参数。 全局参数模块被配置为根据参数控制请求动态地改变对应于性能资源的性能参数。 全局预留模块被配置为保留网格计算操作的性能资源。 按需管理装置还被配置为当客户端从网格计算系统回收性能资源时终止性能资源预留。

公开(公告)号：WO2009154789A1

公开(公告)日：2009-12-23

申请号：PCT/US2009/003686

申请日：2009-06-19

Applicant: ASYST TECHNOLOGIES, INC. ,  BONORA, Anthony, C. ,  FATULA, Joseph, John, III ,  DEYANOV, Roumen, I. ,  ITO, Hiroshi ,  HINE, Roger, G.

Inventor： BONORA, Anthony, C. ,  FATULA, Joseph, John, III ,  DEYANOV, Roumen, I. ,  ITO, Hiroshi ,  HINE, Roger, G.

IPC: H01L21/677

CPC classification number: H01L21/67706 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67775

Abstract: A direct load system includes a load port for moving containers in a vertical orientation between a lower position near a conveyor and up to an upper position proximate to a load port door. The load port includes a single arm that moves a support in a vertical configuration, such that moving the single arm allows for the support to be lowered to the conveyor in a nested location between beams of the conveyor. The conveyor includes a single slot in a beam that allows the single arm to pass. The single arm raises up from the nested location, off of the conveyor, and to the load port door. The single arm and interface with the conveyor slot can be used by other tools, such as stockers or tools that need to directly access a conveyor used to transport containers (e g, wafers, etc ) to locations/tools of a fabrication facility.

Abstract translation: 直接负载系统包括用于在垂直方向上移动容器的装载端口，其位于靠近输送机的下部位置和靠近装载端口门的上部位置之间。 负载端口包括单个臂，其以垂直构造移动支撑件，使得移动单臂允许支撑件在输送机的梁之间的嵌套位置中降低到输送机。 输送机包括允许单臂通过的梁中的单个槽。 单臂从嵌套位置抬起，离开传送带，并到达装载端口门。 单臂和输送槽的接口可以被其他工具使用，例如储存器或工具，其需要直接接近用于将容器（例如，晶片等）运送到制造设施的位置/工具的输送机。

公开(公告)号：WO2005060201A1

公开(公告)日：2005-06-30

申请号：PCT/EP2004/052849

申请日：2004-11-08

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION ,  IBM UNITED KINGDOM LIMITED ,  FATULA, Joseph, John

Inventor： FATULA, Joseph, John

IPC: H04L29/06

CPC classification number: G06F11/1464 ,  H04L29/06 ,  H04L67/1095 ,  H04L69/329

Abstract: An apparatus, system, and method are disclosed for backing up data across a plurality of clients on a grid computing system. A sequence management apparatus includes a client request module, a sequence module, and packet storage module. The sequence module is configured to receive data to be backed up from a source client. The sequence module is configured to generate a non-transparent sequence key that identifies one or more target clients on the grid computing system. The packet storage module is configured to store a backup copy of the data from the source client on the plurality of target clients according to the non-transparent sequence key. The non-transparent sequence key may be generated by and known only to the sequence management apparatus in order to maintain a minimum security level for the data backed up on the plurality of target clients.

Abstract translation: 公开了一种用于在网格计算系统上跨多个客户机备份数据的装置，系统和方法。 序列管理装置包括客户端请求模块，序列模块和分组存储模块。 序列模块被配置为从源客户端接收要备份的数据。 序列模块被配置为生成识别网格计算系统上的一个或多个目标客户端的不透明序列密钥。 分组存储模块被配置为根据不透明的序列密钥将来自源客户端的数据的备份副本存储在多个目标客户端上。 非透明序列密钥可以由序列管理装置生成并且仅为序列管理装置而知道，以便为在多个目标客户端上备份的数据保持最小的安全级别。

公开(公告)号：WO2009105724A9

公开(公告)日：2010-02-25

申请号：PCT/US2009034791

申请日：2009-02-20

Applicant: MURATEC AUTOMATION CO LTD ,  SHIEH KARL ,  COOKSON MICHAEL A ,  RILEY NORMA B ,  WRIGHT DONALD REX ,  FATULA JOSEPH JOHN

Inventor： SHIEH KARL ,  COOKSON MICHAEL A ,  RILEY NORMA B ,  WRIGHT DONALD REX ,  FATULA JOSEPH JOHN

IPC: G06Q50/00 ,  G06F17/00 ,  G06F17/50 ,  G06F19/00

CPC classification number: G05B19/41885 ,  G05B2219/31334 ,  G05B2219/31466 ,  G05B2219/45031 ,  H01L21/67276 ,  Y02P90/16 ,  Y02P90/185 ,  Y02P90/26 ,  Y02P90/86

Abstract: A semiconductor fabrication facility (fab) configuration module is defined to virtually model physical systems and attributes of a fab. A data acquisition module is defined to interface with the physical systems of the fab and gather operational data from the physical systems. A visualizer module is defined to collect and aggregate the operational data gathered from the physical systems. The visualizer module is further defined to process the operational data into a format suitable for visual rendering. The processed operational data is displayed within a visual context of the fab in a graphical user interface controlled by the visualizer module. An analyzer module is defined to analyze data collected by the visualizer module and to resolve queries regarding fab performance. An optimizer module is defined to control systems within the fab in response to data collected by the visualizer module, data generated by the analyzer module, or a combination thereof.

Abstract translation: 半导体制造设备（fab）配置模块被定义为虚拟模拟晶圆厂的物理系统和属性。 数据采集​​模块被定义为与物理系统的物理系统进行接口，并从物理系统收集操作数据。 定义了可视化模块，用于收集和汇总从物理系统收集的操作数据。 视觉化模块被进一步定义为将操作数据处理成适合于视觉呈现的格式。 经处理的操作数据显示在由可视化模块控制的图形用户界面中的晶圆厂的视觉上下文中。 分析器模块被定义为分析可视化模块收集的数据，并解析有关工厂性能的查询。 定义优化器模块以响应由可视化器模块收集的数据，由分析器模块生成的数据或其组合来控制晶圆厂内的系统。