公开(公告)号：WO2005008708A2

公开(公告)日：2005-01-27

申请号：PCT/US2004/022922

申请日：2004-07-16

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA ,  ZETTL, Alexander, K. ,  FENNIMORE, Adam, M. ,  YUZVINSKY, Thomas, D.

Inventor： ZETTL, Alexander, K. ,  FENNIMORE, Adam, M. ,  YUZVINSKY, Thomas, D.

IPC: H01J

CPC classification number: B82Y10/00 ,  G02B26/0833 ,  H02N1/002 ,  Y10S977/725 ,  Y10S977/733 ,  Y10S977/752

Abstract: A rotational actuator/motor based on rotation of a carbon nanotube is disclosed. The carbon nanotube is provided with a rotor plate attached to an outer wall, which moves relative to an inner wall of the nanotube. After deposit of a nanotube on a silicon chip substrate, the entire structure may be fabricated by lithography using selected techniques adapted from silicon manufacturing technology. The structures to be fabricated may comprise a multiwall carbon nanotube (MWNT), two in plane stators, S1, S2 and a gate stator S3 buried beneath the substrate surface. The MWNT is suspended between two anchor pads and comprises a rotator attached to an outer wall and arranged to move in response to electromagnetic inputs. The substrate is etched away to allow the rotor to freely rotate. Rotation may be either in a reciprocal or fully rotatable manner.

Abstract translation: 公开了一种基于碳纳米管旋转的旋转致动器/马达。 碳纳米管设置有转子板，该转子板附接到相对于纳米管的内壁移动的外壁。 在硅芯片基板上沉积纳米管之后，可以使用从硅制造技术中选择的技术通过光刻制造整个结构。 要制造的结构可以包括多壁碳纳米管（MWNT），两个在平面定子中的S1，S2和埋在衬底表面下方的栅极定子S3。 MWNT悬挂在两个锚垫之间并且包括附接到外壁并被布置为响应于电磁输入而移动的旋转器。 蚀刻掉衬底以允许转子自由旋转。 旋转可以是相互或完全可旋转的方式。

公开(公告)号：WO2005008708A3

公开(公告)日：2005-09-29

申请号：PCT/US2004022922

申请日：2004-07-16

Applicant: UNIV CALIFORNIA ,  ZETTL ALEXANDER K ,  FENNIMORE ADAM M ,  YUZVINSKY THOMAS D

Inventor： ZETTL ALEXANDER K ,  FENNIMORE ADAM M ,  YUZVINSKY THOMAS D

IPC: G02B26/08 ,  G02B26/10 ,  H01J20060101 ,  H02N1/00 ,  H02N2/00 ,  H02N2/10

CPC classification number: B82Y10/00 ,  G02B26/0833 ,  H02N1/002 ,  Y10S977/725 ,  Y10S977/733 ,  Y10S977/752

Abstract: A rotational actuator/motor based on rotation of a carbon nanotube is disclosed. The carbon nanotube is provided with a rotor plate attached to an outer wall, which moves relative to an inner wall of the nanotube. After deposit of a nanotube on a silicon chip substrate, the entire structure may be fabricated by lithography using selected techniques adapted from silicon manufacturing technology. The structures to be fabricated may comprise a multiwall carbon nanotube (MWNT), two in plane stators (26, 28) and a gate stator (30) buried beneath the substrate surface. The MWNT is suspended between two anchor pads and comprises a rotator attached to an outer wall and arranged to move in response to electromagnetic inputs. The substrate is etched away to allow the rotor to freely rotate. Rotation may be either in a reciprocal or fully rotatable manner.

Abstract translation: 公开了一种基于碳纳米管旋转的旋转致动器/马达。 碳纳米管设置有转子板，该转子板附接到相对于纳米管的内壁移动的外壁。 在硅芯片基板上沉积纳米管之后，可以使用从硅制造技术中选择的技术通过光刻制造整个结构。 要制造的结构可以包括多壁碳纳米管（MWNT），两个在平面定子（26,28）中的栅极定子（30）和埋在基板表面下方的栅极定子（30）。 MWNT悬挂在两个锚垫之间并且包括附接到外壁并被布置为响应于电磁输入而移动的旋转体。 蚀刻掉衬底以允许转子自由旋转。 旋转可以是相互或完全可旋转的方式。