公开(公告)号：WO2012115635A1

公开(公告)日：2012-08-30

申请号：PCT/US2011/025886

申请日：2011-02-23

Applicant: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS ,  FERREIRA, Placid, M. ,  AZEREDO, Bruno ,  FANG, Nicholas, X. ,  HAN, Xuefei ,  JACOBS, Kyle, E. ,  KUMAR, Anil ,  HSU, Keng, Hao

Inventor： FERREIRA, Placid, M. ,  AZEREDO, Bruno ,  FANG, Nicholas, X. ,  HAN, Xuefei ,  JACOBS, Kyle, E. ,  KUMAR, Anil ,  HSU, Keng, Hao

IPC: H01L21/027

CPC classification number: G03F7/0002 ,  H01L21/033

Abstract: Disclosed herein are electrochemical fabrication platforms for making structures, arrays of structures and functional devices having selected nanosized and/or microsized physical dimensions, shapes and spatial orientations. Methods, systems and system components use an electrochemical stamping tool such as solid state polymeric electrolytes for generating patterns of relief and/or recessed features exhibiting excellent reproducibility, pattern fidelity and resolution on surfaces of solid state ionic conductors and in metal. Electrochemical stamping tools are capable high throughput patterning of large substrate areas, are compatible with commercially attractive manufacturing pathways to access a range of functional systems and devices including nano- and micro-electromechanical systems, sensors, energy storage devices, metal masks for printing, interconnects, and integrated electronic circuits.

Abstract translation: 本文公开了用于制造具有选定的纳米尺寸和/或微尺寸物理尺寸，形状和空间取向的结构，结构阵列和功能装置的电化学制造平台。 方法，系统和系统组件使用电化学冲压工具，例如固态聚合物电解质，用于产生在固态离子导体和金属表面上显示出优异的再现性，图案保真度和分辨率的浮雕和/或凹陷特征图案。 电化学冲压工具能够实现大基板区域的高通量图案化，与商业上有吸引力的制造途径兼容，以访问一系列功能系统和设备，包括纳米和微机电系统，传感器，能量存储设备，印刷用金属掩模，互连 ，和集成电子电路。

公开(公告)号：WO2011049804A3

公开(公告)日：2011-04-28

申请号：PCT/US2010/052581

申请日：2010-10-14

Applicant: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS ,  LI, Xiuling ,  FANG, Nicholas, X. ,  FERREIRA, Placid, M. ,  CHERN, Winston ,  CHUN, Ik, Su ,  HSU, Keng, Hao

Inventor： LI, Xiuling ,  FANG, Nicholas, X. ,  FERREIRA, Placid, M. ,  CHERN, Winston ,  CHUN, Ik, Su ,  HSU, Keng, Hao

IPC: B32B1/00

Abstract: A new method for forming an array of high aspect ratio semiconductor nanostructures entails positioning a surface of a stamp comprising a solid electrolyte in opposition to a conductive film disposed on a semiconductor substrate. The surface of the stamp includes a pattern of relief features in contact with the conductive film so as to define a film- stamp interface. A flux of metal ions is generated across the film-stamp interface, and a pattern of recessed features complementary to the pattern of relief features is created in the conductive film. The recessed features extend through an entire thickness of the conductive film to expose the underlying semiconductor substrate and define a conductive pattern on the substrate. The stamp is removed, and material immediately below the conductive pattern is selectively removed from the substrate. Features are formed in the semiconductor substrate having a length-to-width aspect ratio of at least about 5: 1.

公开(公告)号：WO2011049804A2

公开(公告)日：2011-04-28

申请号：PCT/US2010052581

申请日：2010-10-14

Applicant: UNIV ILLINOIS ,  LI XIULING ,  FANG NICHOLAS X ,  FERREIRA PLACID M ,  CHERN WINSTON ,  CHUN IK SU ,  HSU KENG HAO

Inventor： LI XIULING ,  FANG NICHOLAS X ,  FERREIRA PLACID M ,  CHERN WINSTON ,  CHUN IK SU ,  HSU KENG HAO

IPC: B32B1/00

CPC classification number: H01L21/3081 ,  B82Y10/00 ,  B82Y40/00 ,  H01L21/3086 ,  H01L29/0676 ,  Y10S977/893

Abstract: A new method for forming an array of high aspect ratio semiconductor nanostructures entails positioning a surface of a stamp comprising a solid electrolyte in opposition to a conductive film disposed on a semiconductor substrate. The surface of the stamp includes a pattern of relief features in contact with the conductive film so as to define a film- stamp interface. A flux of metal ions is generated across the film-stamp interface, and a pattern of recessed features complementary to the pattern of relief features is created in the conductive film. The recessed features extend through an entire thickness of the conductive film to expose the underlying semiconductor substrate and define a conductive pattern on the substrate. The stamp is removed, and material immediately below the conductive pattern is selectively removed from the substrate. Features are formed in the semiconductor substrate having a length-to-width aspect ratio of at least about 5: 1.

Abstract translation: 用于形成高纵横比半导体纳米结构阵列的新方法需要将包含固体电解质的印模表面定位成与布置在半导体衬底上的导电膜相对。 印模的表面包括与导电膜接触的浮雕特征图案，以限定膜 - 印记界面。 金属离子通量在薄膜印记界面上产生，并且在导电薄膜中产生与浮雕特征图案互补的凹陷特征图案。 凹陷结构延伸穿过导电膜的整个厚度以暴露下面的半导体衬底并且在衬底上限定导电图案。 去除印模，并且选择性地从衬底上去除导电图案正下方的材料。 特征形成在具有至少约5：1的长宽比纵横比的半导体衬底中。

公开(公告)号：WO2010027466A2

公开(公告)日：2010-03-11

申请号：PCT/US2009/004966

申请日：2009-09-03

Applicant: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS ,  DONG, Jingyan ,  FERREIRA, Placid, M.

Inventor： DONG, Jingyan ,  FERREIRA, Placid, M.

IPC: B81B7/00 ,  B81B7/02

CPC classification number: H02N1/006 ,  H02N1/008

Abstract: An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal. The drive signal includes an actuation signal constituent and a sensing signal constituent. The sensing signal constituent is at a frequency higher than a natural mechanical resonant frequency of the electrostatic drive. In response to the actuation signal constituent, displacement between the first electrode and the second electrode changes, which is evaluated by detecting a change in an electrical characteristic of the drive as a function of the sensing signal constituent.

Abstract translation: 静电驱动器包括响应于驱动信号的第一电极和第二电极。 驱动信号包括致动信号成分和感测信号成分。 感测信号成分的频率高于静电驱动器的自然机械共振频率。 响应于构成的致动信号，第一电极和第二电极之间的位移发生改变，这通过检测作为感测信号组分的函数的驱动器的电特性的改变来评估。

公开(公告)号：WO2009011709A1

公开(公告)日：2009-01-22

申请号：PCT/US2007/077217

申请日：2007-08-30

Applicant: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS ,  ROGERS, John A. ,  PARK, Jang-ung ,  FERREIRA, Placid M. ,  MUKHOPADHYAY, Deepkishore

Inventor： ROGERS, John A. ,  PARK, Jang-ung ,  FERREIRA, Placid M. ,  MUKHOPADHYAY, Deepkishore

IPC: B41J2/04

CPC classification number: B41J2/06 ,  B41J2/09 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645

Abstract: Provided are high-resolution electrohydrodynamic inkjet (e-jet) printing systems and related methods for printing functional materials on a substrate surface. In an embodiment, a nozzle with an ejection orifice that dispenses a printing fluid faces a surface that is to be printed. The nozzle is electrically connected to a voltage source that applies an electric charge to the fluid in the nozzle to controllably deposit the printing fluid on the surface. In an aspect, a nozzle that dispenses printing fluid has a small ejection orifice, such as an orifice with an area less than 700 µm 2 and is capable of printing nanofeatures or microfeatures. In an embodiment the nozzle is an integrated-electrode nozzle system that is directly connected to an electrode and a counter-electrode. The systems and methods provide printing resolutions that can encompass the sub-micron range.

Abstract translation: 提供了高分辨率电动喷墨（e-jet）印刷系统和用于在基材表面上印刷功能材料的相关方法。 在一个实施例中，具有分配打印流体的喷射孔的喷嘴面向待打印的表面。 喷嘴电连接到电压源，该电压源对喷嘴中的流体施加电荷以可控地将打印流体沉积在表面上。 在一方面，分配打印流体的喷嘴具有小的喷射孔，例如面积小于700μm2的孔口，并且能够印刷纳米尺寸或微特征。 在一个实施例中，喷嘴是直接连接到电极和对电极的整体电极喷嘴系统。 这些系统和方法提供可以涵盖亚微米范围的打印分辨率。

公开(公告)号：WO2007100749A2

公开(公告)日：2007-09-07

申请号：PCT/US2007/004890

申请日：2007-02-23

Applicant: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS ,  FERREIRA, Placid, M. ,  YAO, Qing

Inventor： FERREIRA, Placid, M. ,  YAO, Qing

CPC classification number: H02N2/028 ,  H02N1/006 ,  Y10T74/20594

Abstract: In one embodiment, a flexure subsystem (26) comprises a base (30), a stage (34), a positioning mechanism (40), and a control device (22). The base (30) and stage (34) have first and second portions that are spaced apart from each other. The positioning mechanism (40) is coupled between the base (30) and the stage (34). The positioning mechanism (40) includes an actuator (42a, 42b) and a flexure structure engaged by the actuator (42a, 42b). The flexure structure includes base links (62) coupled to the first base portion, stage links (64) coupled to the first stage portion, and an intermediate member (58) coupled to both the base and stage links (62, 64). All structures are coupled by flexure hinges (56). The control device (22) generates a control signal to change position of the stage (34) by sending a control signal to the actuator (42a, 42b) which provides a force to elastically deform the flexure structure and correspondingly move the stage (34).

Abstract translation: 在一个实施例中，柔性子系统（26）包括基座（30），平台（34），定位机构（40）和控制装置（22）。 基部（30）和台（34）具有彼此间隔开的第一和第二部分。 定位机构（40）联接在基座（30）和平台（34）之间。 定位机构（40）包括致动器（42a，42b）和由致动器（42a，42b）接合的挠曲构件。 弯曲结构包括联接到第一基部的基部连杆（62），联接到第一平台部分的平台连杆（64）和联接到基座和平台连杆（62,64）的中间构件（58）。 所有结构通过弯曲铰链（56）联接。 控制装置（22）通过向致动器（42a，42b）发送控制信号来产生用于改变载物台（34）的位置的控制信号，该致动器（42a，42b）提供用于使挠曲构件弹性变形的力并相应地使载物台（34）移动， 。

公开(公告)号：WO2010027466A3

公开(公告)日：2010-06-03

申请号：PCT/US2009004966

申请日：2009-09-03

Applicant: UNIV ILLINOIS ,  DONG JINGYAN ,  FERREIRA PLACID M

Inventor： DONG JINGYAN ,  FERREIRA PLACID M

IPC: B81B7/00 ,  B81B7/02

CPC classification number: H02N1/006 ,  H02N1/008

Abstract: An electrostatic drive includes a first electrode and a second electrode responsive to a drive signal. The drive signal includes an actuation signal constituent and a sensing signal constituent. The sensing signal constituent is at a frequency higher than a natural mechanical resonant frequency of the electrostatic drive. In response to the actuation signal constituent, displacement between the first electrode and the second electrode changes, which is evaluated by detecting a change in an electrical characteristic of the drive as a function of the sensing signal constituent.

Abstract translation: 静电驱动器包括响应驱动信号的第一电极和第二电极。 驱动信号包括致动信号成分和感测信号成分。 感测信号成分的频率高于静电驱动器的自然机械共振频率。 响应于致动信号成分，第一电极和第二电极之间的位移改变，其通过检测作为感测信号成分的函数的驱动器的电特性的变化来评估。

公开(公告)号：WO2007100749A3

公开(公告)日：2008-05-22

申请号：PCT/US2007004890

申请日：2007-02-23

Applicant: UNIV ILLINOIS ,  FERREIRA PLACID M ,  YAO QING

Inventor： FERREIRA PLACID M ,  YAO QING

IPC: B64C17/06

CPC classification number: H02N2/028 ,  H02N1/006 ,  Y10T74/20594

Abstract: In one embodiment, a flexure subsystem comprises a base, a stage, a positioning mechanism, and a control device. The base and stage have first and second portions that are spaced apart from each other. The positioning mechanism is coupled between the base and the stage. The positioning mechanism includes an actuator and a flexure structure engaged by the actuator. The flexure structure includes base links coupled to the first base portion, stage links coupled to the first stage portion, and an intermediate member coupled to both the base and stage links. All structures are coupled by flexure hinges. The control device generates a control signal to change position of the stage by sending a control signal to the actuator which provides a force to elastically deform the flexure structure and correspondingly move the stage.

Abstract translation: 在一个实施例中，柔性子系统包括基座，台架，定位机构和控制装置。 基座和台架具有彼此间隔开的第一和第二部分。 定位机构连接在基座和平台之间。 定位机构包括致动器和由致动器接合的挠曲构件。 弯曲结构包括联接到第一基部部分的基部连杆，联接到第一阶段部分的平台连杆以及联接到基部和平台连杆两者的中间部件。 所有结构通过挠性铰链连接。 控制装置通过向致动器发送控制信号来产生控制信号以改变载物台的位置，该致动器提供弹性变形弯曲结构并相应地移动载物台的力。

公开(公告)号：WO2013010113A1

公开(公告)日：2013-01-17

申请号：PCT/US2012/046744

申请日：2012-07-13

Applicant: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS ,  ROGERS, John, A. ,  FERREIRA, Placid, M. ,  SAEIDPOURAZAR, Reza

Inventor： ROGERS, John, A. ,  FERREIRA, Placid, M. ,  SAEIDPOURAZAR, Reza

IPC: B41J29/38

CPC classification number: B41F16/00 ,  B41J2/475

Abstract: A transfer printing process that exploits the mismatch in mechanical or thermo-mechanical response at the interface of a printable micro- or nano-device and a transfer stamp to drive the release of the device from the stamp and its non-contact transfer to a receiving substrate are provided. The resulting facile, pick-and-place process is demonstrated with the assembling of 3-D microdevices and the printing of GAN light-emitting diodes onto silicon and glass substrates. High speed photography is used to provide experimental evidence of thermo-mechanically driven release.

Abstract translation: 一种利用机械或热机械反应在可印刷的微型或纳米器件的接口上的不匹配的转移印刷方法和转印印模，以将装置从印模及其非接触转印释放到接收 衬底。 通过组装3-D微型器件和将GAN发光二极管印刷到硅和玻璃基板上，可以显示出所得到的轻便，拾取和放置过程。 高速摄影用于提供热机械驱动释放的实验证据。

公开(公告)号：WO2007106911A3

公开(公告)日：2007-09-20

申请号：PCT/US2007/064132

申请日：2007-03-16

Applicant: THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS ,  RAPAKA, Venkata K. ,  FANG, Nicholas X. ,  FERREIRA, Placid M. ,  HSU, Keng Hao ,  SCHULTZ, Peter L.

Inventor： FANG, Nicholas X. ,  FERREIRA, Placid M. ,  HSU, Keng Hao ,  SCHULTZ, Peter L.

IPC: H01M14/00

Abstract: The present invention provides an electrochemical fabrication platform for making structures, arrays of structures and functional devices having selected anodized and/or microsized physical dimensions, shapes and spatial orientations. Methods, systems and system components of the present invention use an electrochemical stamping tool for generating patterns of relief and/or recessed features exhibiting excellent reproducibility, pattern fidelity and resolution on surfaces of solid state ionic conductors and in metal. Electrochemical stamping tools of the present invention are capable high throughput patterning of large substrate areas and, thus, enable a robust and commercially attractive manufacturing pathway to a range of functional systems and devices including nano- and micro-electromechanical systems, sensors, energy storage devices and integrated electronic circuits.