公开(公告)号：JP2005172456A

公开(公告)日：2005-06-30

申请号：JP2003408896

申请日：2003-12-08

Applicant: Aoi Electronics Co Ltd ,  Gen Hashiguchi ,  Masayasu Hosoki ,  Yutaka Mihara ,  Fumikazu Ohira ,  アオイ電子株式会社 ,  豊 三原 ,  文和 大平 ,  原 橋口 ,  真保 細木

Inventor： HOSOKI MASAYASU ,  HASHIGUCHI GEN ,  MIHARA YUTAKA ,  OHIRA FUMIKAZU

IPC: G01Q60/38 ,  G01Q70/00 ,  G01Q70/10 ,  G01Q70/16 ,  G01Q80/00 ,  G01N13/16 ,  G12B21/02

Abstract: PROBLEM TO BE SOLVED: To provide a cantilever for a scanning probe microscope capable of performing stable scanning even with respect to a linear sample of which the area is narrower than that of the leading end part of a probe.
SOLUTION: The cantilever 10 for the scanning probe microscope is constituted by forming a probe part 12 to one end of a lever part 11 and integrally forming a support 13 to the other end of the lever part 11. The probe part 12 is a linear projection having a length L protruded in the thickness direction (Z-direction) of the lever part 11 and extended in the length direction (X-direction) of the lever part 11. The leading end of the probe part 12 is a ridgeline 12a.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了对于扫描探针显微镜提供悬臂，该扫描探针显微镜即使对于面积比探针的前端部的面积窄的线性样品，也能够进行稳定的扫描。 解决方案：用于扫描探针显微镜的悬臂10通过将探针部分12形成在杆部分11的一端并且一体地形成到杆部分11的另一端的支撑体13而构成。探针部分12是 具有在杠杆部11的厚度方向（Z方向）上突出并沿杆部11的长度方向（X方向）延伸的长度L的线状突起。探针部12的前端是脊线 12A。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2003025335A

公开(公告)日：2003-01-29

申请号：JP2001213140

申请日：2001-07-13

Applicant: Advanex Inc ,  Gen Hashiguchi ,  Yutaka Mihara ,  Nkk Corp ,  Fumikazu Ohira ,  Hidenori Yoshimura ,  豊 三原 ,  英徳 吉村 ,  文和 大平 ,  日本鋼管株式会社 ,  株式会社アドバネクス ,  原 橋口

Inventor： OGAWA ATSUSHI ,  MIHARA YUTAKA ,  HASHIGUCHI GEN ,  OHIRA FUMIKAZU ,  YOSHIMURA HIDENORI ,  CHIKASHIGE KIYOSHI

IPC: G02B3/00 ,  B29C33/38 ,  B29L11/00 ,  C22C14/00 ,  C23C14/06 ,  C23C30/00

Abstract: PROBLEM TO BE SOLVED: To provide a mold for a micro part low in production cost, having high accuracy and capable of withstanding repeated use or highly accurate processing such as extrusion molding or the like because of its high surface hardness, and a method for manufacturing the same.
SOLUTION: The master mold 6 of the mold for the micro part is prepared by processing the surface of an Si substrate and a hard film comprising a TiN film 5 is subsequently formed on the surface of the master mold 6. Then, the master mold 6 is transferred, for example, to a Ti-4.5Al-3V-2Fe-2Mo alloy having super-plasticity.
COPYRIGHT: (C)2003,JPO

Abstract translation: 要解决的问题：为了提供一种生产成本低的模具，具有高精度并且能够承受反复使用或由于其高表面硬度而引起的挤出成型等的高精度加工，以及制造方法 一样。 解决方案：通过加工Si基板的表面制备微型部件模具的母模6，随后在母模6的表面上形成包括TiN膜5的硬膜。然后，将母模6 例如转移到具有超塑性的Ti-4.5Al-3V-2Fe-2Mo合金。

公开(公告)号：JP2003013160A

公开(公告)日：2003-01-15

申请号：JP2001203689

申请日：2001-07-04

Applicant: Advanex Inc ,  Gen Hashiguchi ,  Yutaka Mihara ,  Nkk Corp ,  Fumikazu Ohira ,  Hidenori Yoshimura ,  豊 三原 ,  英徳 吉村 ,  文和 大平 ,  日本鋼管株式会社 ,  株式会社アドバネクス ,  原 橋口

Inventor： OGAWA ATSUSHI ,  MIHARA YUTAKA ,  HASHIGUCHI GEN ,  OHIRA FUMIKAZU ,  YOSHIMURA HIDENORI ,  CHIKASHIGE KIYOSHI

IPC: B81C1/00 ,  B81C99/00 ,  C22C14/00 ,  B81C5/00

Abstract: PROBLEM TO BE SOLVED: To provide a mold for micro-parts having high precision and a low manufacturing cost, and a manufacturing method therefor.
SOLUTION: This manufacturing method comprises preparing an original mold 5 of the mold for micro-parts, by machining the surface of a Si substrate by a lithography method, a dry etching method, or the like, and transferring the original mold 5 to a titanium alloy 7 having superplasticity.
COPYRIGHT: (C)2003,JPO

Abstract translation: 要解决的问题：提供一种具有高精度和低制造成本的微型零件的模具及其制造方法。 解决方案：该制造方法包括通过利用光刻法，干法蚀刻法等将Si基板的表面加工成微型部件的原模5，将原模5转印到钛 合金7具有超塑性。

公开(公告)号：JP2005110204A

公开(公告)日：2005-04-21

申请号：JP2004110319

申请日：2004-04-02

Applicant: Aoi Electronics Co Ltd ,  Gen Hashiguchi ,  Yutaka Mihara ,  Fumikazu Ohira ,  アオイ電子株式会社 ,  豊 三原 ,  文和 大平 ,  原 橋口

Inventor： HASHIGUCHI GEN ,  MIHARA YUTAKA ,  OHIRA FUMIKAZU ,  MIYAKE JUNYA

IPC: H04R19/04 ,  H04R31/00

Abstract: PROBLEM TO BE SOLVED: To provide a ultraminiature capacitor microphone having a desired resonance frequency.
SOLUTION: A capacitor microphone 1 comprises a base plate 31, a back plate 13, a diaphragm 32, and a beam section 12a. The diaphragm 32 and the beam section 12a are formed integrally. The diaphgramn 32 is disposed facing the back plate 13 with a gap A formed therebetween. An Al film 51 is formed on the front surface of the beam section 12a as a movable side electrode, and an Al film 52 is formed on the front surface of the back plate 13 as a fixed side electrode. The Al film 51 and the Al film 52 are flushed with each other.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供具有期望的共振频率的超微电容器麦克风。 解决方案：电容器麦克风1包括基板31，背板13，隔膜32和梁部分12a。 隔膜32和梁部12a一体地形成。 记录纸32被设置成与背板13相对设置，间隙A形成在其间。 在作为可动侧电极的光束部12a的前表面上形成有Al膜51，在背板13的前表面上形成作为固定侧电极的Al膜52。 Al膜51和Al膜52彼此冲洗。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2004106341A

公开(公告)日：2004-04-08

申请号：JP2002271637

申请日：2002-09-18

Applicant: Advanex Inc ,  Aoi Electronics Co Ltd ,  Gen Hashiguchi ,  Yutaka Mihara ,  Fumikazu Ohira ,  Hidenori Yoshimura ,  アオイ電子株式会社 ,  三原 豊 ,  吉村 英徳 ,  大平 文和 ,  株式会社アドバネクス ,  橋口 原

Inventor： OGAWA ATSUSHI ,  MIHARA YUTAKA ,  HASHIGUCHI GEN ,  OHIRA FUMIKAZU ,  YOSHIMURA HIDENORI ,  CHIKASHIGE KIYOSHI

IPC: B29C33/38

Abstract: PROBLEM TO BE SOLVED: To provide a mold for a microcomponent, which reduces manufacturing costs and has high accuracy and wherein a hardness of a surface layer is high, and a manufacturing method therefor.
SOLUTION: This mold 10 for the microcomponent is composed of plated metal in which a hard coating 11 is formed at least as the surface layer. The hard coating 11 has a skewed distribution composition. The hard coating 11 is composed of a titanium film including titanium nitride, and the concentration of the titanium nitride is gradually decreased inward from the surface layer of the coating 11. In this manufacturing method for the mold 10, a surface of a silicon substrate 20 is worked; an original mold for the mold 10 is prepared; the coating 11 is formed on the surface of the original mold; an electroless-plating metallic layer 13 and/or an electrolytic-plating metallic layer 14 are/is formed on the surface of the coating 11 by electroless plating and/or electrolytic plating; the metallic layer 13 and/or the metallic layer 14 and the coating 11 are brought into close contact with one another; and the original mold for the mold 10 is transferred to the metallic layer 13 and/or the metallic layer 14.
COPYRIGHT: (C)2004,JPO

公开(公告)号：JP2005114509A

公开(公告)日：2005-04-28

申请号：JP2003348227

申请日：2003-10-07

Applicant: Aoi Electronics Co Ltd ,  Gen Hashiguchi ,  Yutaka Mihara ,  Fumikazu Ohira ,  アオイ電子株式会社 ,  豊 三原 ,  文和 大平 ,  原 橋口

Inventor： HASHIGUCHI GEN ,  MIHARA YUTAKA ,  OHIRA FUMIKAZU

IPC: G01Q60/16 ,  G01Q60/38 ,  G01Q70/00 ,  G01Q70/16 ,  G01N13/16 ,  G01N13/12 ,  G12B21/02

Abstract: PROBLEM TO BE SOLVED: To provide a method for manufacturing a number of cantilevers for scanning probe microscopes, without dimensional variations from a single sheet of semiconductor substrate.
SOLUTION: The cantilever 10 for scanning-type probe microscopes is manufactured by an SOI wafer 100, while a probe 12 and a support 13 are integrated at one end and the other end of the lever 11, respectively. In the manufacturing process, the longitudinal direction of the lever 11 is selected to be in the thickness direction of the SOI wafer 100, the longitudinal direction of the probe 12 is selected to be in parallel with the surface of the SOI wafer 100, and the SOI wafer 100 is removed selectively. The cantilever 10 for scanning-type probe microscopes can be manufactured substantially in similar process, even if an Si single-crystal wafer is used, instead of the SOI wafer 100.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供用于制造用于扫描探针显微镜的多个悬臂的方法，而不需要从单片半导体衬底的尺寸变化。 解决方案：用于扫描型探针显微镜的悬臂10由SOI晶片100制造，而探针12和支撑件13分别集成在杠杆11的一端和另一端。 在制造工序中，杠杆11的长度方向选择为SOI晶片100的厚度方向，探头12的长度方向选择为与SOI晶片100的表面平行， 选择性地去除SOI晶片100。 即使采用Si单晶晶片代替SOI晶圆100，也可以基本上以类似的工艺制造用于扫描型探针显微镜的悬臂10。（C）2005，JPO＆NCIPI

公开(公告)号：JP2004325304A

公开(公告)日：2004-11-18

申请号：JP2003121558

申请日：2003-04-25

Applicant: Advanex Inc ,  Aoi Electronics Co Ltd ,  Yoshinobu Baba ,  Gen Hashiguchi ,  Mihara Yutaka ,  Ohira Fumikazu ,  U-Mic:Kk ,  アオイ電子株式会社 ,  三原 豊 ,  大平 文和 ,  株式会社アドバネクス ,  株式会社ユーミック ,  原 橋口 ,  嘉信 馬場

Inventor： TSUDA JUN ,  TADA YUKI ,  HASHIGUCHI GEN ,  HIRANO KEN ,  KACHI NORIMASA ,  BABA YOSHINOBU

IPC: G01N27/447 ,  B81B1/00 ,  B81C99/00 ,  G01N37/00 ,  B81C5/00

Abstract: PROBLEM TO BE SOLVED: To provide a low-priced columnar structure and an electrophoresis device. SOLUTION: The columnar structure 1 has a structure in which a plastic substrate 2 and many columnar projections 3 are integrated, and is replicated by a forming method using a mold. The electrophoresis device has a minute flow path formed by bonding the columnar structure 1 and a transparent substrate together. A sample is allowed to path through the minute flow path and to be separated by electrophoresis. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供低价柱状结构和电泳装置。 解决方案：柱状结构1具有其中塑料基板2和许多柱状突起3一体化的结构，并且通过使用模具的成形方法来复制。 电泳装置具有通过将柱状结构1和透明基板结合在一起形成的微小流路。 允许样品通过微流路并通过电泳分离。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2004317340A

公开(公告)日：2004-11-11

申请号：JP2003112636

申请日：2003-04-17

Applicant: Aoi Electronics Co Ltd ,  Yoshinobu Baba ,  Gen Hashiguchi ,  Mihara Yutaka ,  Ohira Fumikazu ,  アオイ電子株式会社 ,  三原 豊 ,  大平 文和 ,  原 橋口 ,  嘉信 馬場

Inventor： TSUDA JUN ,  TADA YUKI ,  HASHIGUCHI GEN ,  HIRANO KEN ,  KACHI NORIMASA ,  BABA YOSHINOBU

IPC: G01N27/447 ,  B81B1/00 ,  B81C1/00 ,  G01N37/00

Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method of a columnar structure capable of acquiring a desired micro-aperture, and an electrophoretic device capable of accurately separating DNA or the like. SOLUTION: Many pillars 3 are formed on a silicon substrate 2 by ICP-RIE, and the pillars 3 are thermally oxidized, and a polycrystal silicon film is stuck on the thermally-oxidized pillars 3. The polycrystal silicon film is thermally oxidized, and a polycrystal silicon film 12 is stuck onto the thermally-oxidized polycrystal silicon film. This electrophoretic device has a micro-passage constituted of the columnar structure manufactured by the measuring method and a glass substrate. COPYRIGHT: (C)2005,JPO&NCIPI

公开(公告)号：US09224415B2

公开(公告)日：2015-12-29

申请号：US13071555

申请日：2011-03-25

Applicant: Yongfang Li ,  Yasushi Tomizawa ,  Akihiro Koga ,  Gen Hashiguchi ,  Masakazu Sugiyama

Inventor： Yongfang Li ,  Yasushi Tomizawa ,  Akihiro Koga ,  Gen Hashiguchi ,  Masakazu Sugiyama

IPC: G01R1/06 ,  G11B9/14 ,  G01R11/04 ,  G01R1/067 ,  G01R19/155

CPC classification number: G11B9/1418 ,  G01R1/06788 ,  G01R11/04 ,  G01R19/155 ,  Y10T29/49155

Abstract: According to one embodiment, a microprobe includes a supporting base, an insulating layer, and an electrode layer arrayed in a first direction in this order. A principal surface of the microprobe is formed in a second direction different from the first direction. A step is formed on at least the electrode layer on the principal surface, and the electrode layer is partitioned into a first area and a second area by the step.

Abstract translation: 根据一个实施例，微探针包括依次排列在第一方向上的支撑基底，绝缘层和电极层。 微探针的主表面形成在与第一方向不同的第二方向上。 至少在主表面上的电极层上形成台阶，电极层通过台阶分割成第一区域和第二区域。

公开(公告)号：US20110194398A1

公开(公告)日：2011-08-11

申请号：US13016464

申请日：2011-01-28

Applicant: Yongfang Li ,  Yasushi Tomizawa ,  Gen Hashiguchi ,  Masakazu Sugiyama

Inventor： Yongfang Li ,  Yasushi Tomizawa ,  Gen Hashiguchi ,  Masakazu Sugiyama

IPC: G11B9/08

CPC classification number: G11B9/1436 ,  G11B9/1409

Abstract: According to one embodiment, a MEMS memory microprobe includes a probe tip, a lever, and a base. The probe tip is arranged to oppose a recording medium and is brought into contact with the recording medium to perform recording or reproduction of information when a current or voltage is applied between them. In the probe tip, a plurality of electrodes used in the recording or reproduction and a plurality of support portions which form the probe tip together with the electrodes are alternately arranged, and the electrodes and the support portions form a single plane which opposes the recording medium.

Abstract translation: 根据一个实施例，MEMS存储器微探针包括探针尖端，杠杆和基部。 探针尖端被布置为与记录介质相对，并且当在其之间施加电流或电压时与记录介质接触以执行信息的记录或再现。 在探针尖端中，用于记录或再现的多个电极和与电极一起形成探针尖端的多个支撑部分交替布置，并且电极和支撑部分形成与记录介质相对的单个平面 。