公开(公告)号：WO2011056194A2

公开(公告)日：2011-05-12

申请号：PCT/US2010/002822

申请日：2010-10-22

Applicant: LAM RESEARCH CORPORATION ,  AUGUSTINO, Jason ,  HART, Tim

Inventor： AUGUSTINO, Jason ,  HART, Tim

IPC: H01L21/02

CPC classification number: H01J37/32467 ,  Y10T137/8359

Abstract: A five-sided quartz window configured to be mounted on a degas chamber as a UV-transmissive window. The quartz window is made of synthetic quartz and has a uniform thickness. The shape of the quartz window is defined by an upper surface, a lower surface and a sidewall therebetween. The sidewall has five straight sections interconnected by five arcuate sections. The quartz window has four arcuate recesses extending into the sidewall.

Abstract translation: 五面石英窗被配置为安装在除气室上作为紫外透射窗口。 石英窗由合成石英制成，厚度均匀。 石英窗的形状由上表面，下表面和其间的侧壁限定。 侧壁有五个直线部分，由五个弧形部分互连。 石英窗有四个弧形凹槽伸入侧壁。

公开(公告)号：WO2011056194A3

公开(公告)日：2011-07-21

申请号：PCT/US2010002822

申请日：2010-10-22

Applicant: LAM RES CORP ,  AUGUSTINO JASON ,  HART TIM

Inventor： AUGUSTINO JASON ,  HART TIM

IPC: H01L21/02

CPC classification number: H01J37/32467 ,  Y10T137/8359

Abstract: A five-sided quartz window configured to be mounted on a degas chamber as a UV-transmissive window. The quartz window is made of synthetic quartz and has a uniform thickness. The shape of the quartz window is defined by an upper surface, a lower surface and a sidewall therebetween. The sidewall has five straight sections interconnected by five arcuate sections. The quartz window has four arcuate recesses extending into the sidewall.

Abstract translation: 五面石英窗被配置为安装在脱气室上作为UV透射窗。 石英窗由合成石英制成，厚度均匀。 石英窗的形状由上表面，下表面和侧壁之间限定。 侧壁具有由五个弧形部分相互连接的五个直线部分。 石英窗有四个弧形的凹槽延伸到侧壁。