EDDY CURRENT BRAKING DEVICE FOR LINEAR SYSTEMS
    1.
    发明公开
    EDDY CURRENT BRAKING DEVICE FOR LINEAR SYSTEMS 审中-公开
    线性系统用涡流制动装置

    公开(公告)号:EP3183802A2

    公开(公告)日:2017-06-28

    申请号:EP15759996.0

    申请日:2015-08-20

    Abstract: An apparatus has a first truck that includes a frame. A roller is rotatably attached to the frame and a lever arm is pivotably connected to the frame. The lever arm includes a load point, a magnet, and a non-ferrous conductive material. A biasing element biases the lever arm into a first angular position. A load applied to the load point drives the lever arm against a biasing force of the biasing element, and towards a second angular position.

    Abstract translation: 一种设备具有其上设置有第一元件的磁制动系统的第一部分。 第一部分围绕轴线旋转。 第一个元素的位置与轴的距离是固定的。 磁制动系统的第二部分具有设置在其上的第二元件。 弹簧使可旋转的第一部分偏离第二部分第一距离。 在对其中一个部分施加力时,可旋转的第一部分到第二部分的相对位置被减小到小于第一距离的第二距离。

    EDDY CURRENT BRAKING DEVICE FOR ROTARY SYSTEMS
    2.
    发明公开
    EDDY CURRENT BRAKING DEVICE FOR ROTARY SYSTEMS 审中-公开
    用于旋转系统的涡流制动装置

    公开(公告)号:EP3183039A1

    公开(公告)日:2017-06-28

    申请号:EP15759997.8

    申请日:2015-08-20

    Abstract: An apparatus has a first portion of a magnetic braking system with a first element disposed thereon. The first portion rotates about an axis. The position of the first element is a fixed distance from the axis. A second portion of the magnetic braking system has a second element disposed thereon. A spring biases the rotatable first portion a first distance from the second portion. Upon application of a force to one of the portions, the relative position of the rotatable first portion to the second portion is reduced to a second distance less than the first distance.

    Abstract translation: 一种设备具有其上设置有第一元件的磁制动系统的第一部分。 第一部分围绕轴线旋转。 第一个元素的位置与轴的距离是固定的。 磁制动系统的第二部分具有设置在其上的第二元件。 弹簧使可旋转的第一部分偏离第二部分第一距离。 在对其中一个部分施加力时,可旋转的第一部分到第二部分的相对位置被减小到小于第一距离的第二距离。

    DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS FOR NEGATIVE RESISTS
    6.
    发明申请
    DEVELOPABLE BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS FOR NEGATIVE RESISTS 审中-公开
    可发展的底部防反射涂层组合物

    公开(公告)号:WO2013023124A2

    公开(公告)日:2013-02-14

    申请号:PCT/US2012/050267

    申请日:2012-08-10

    CPC classification number: G03F7/0382 C09J133/14 G03F7/091 G03F7/094 G03F7/095

    Abstract: A negative developable bottom antireflective coating (NDBARC) material includes a polymer containing an aliphatic alcohol moiety, an aromatic moiety, and a carboxylic acid moiety. The NDBARC composition is insoluble in a typical resist solvent such as propylene glycol methyl ether acetate (PGMEA) after coating and baking. The NDBARC material also includes a photoacid generator, and optionally a crosslinking compound. In the NDBARC material, the carboxylic acid provides the developer solubility, while the alcohol alone, the carboxylic acid alone, or their combination provides the PGMEA resistance. The NDBARC material has resistance to the resist solvent, and thus, intermixing does not occur between NDBARC and resist during resist coating over NDBARC. After exposure and bake, the lithographically exposed portions of both the negative photoresist (30E) and the NDBARC layer (20E) become insoluble in developer due to the chemically amplified crosslinking of the polymers in negative resist and NDBARC layer in the lithographically exposed portions.

    Abstract translation: 负显影底部抗反射涂层(NDBARC)材料包括含有脂族醇部分,芳族部分和羧酸部分的聚合物。 在涂布和烘烤后,NDBARC组合物不溶于典型的抗蚀剂溶剂如丙二醇甲基醚乙酸酯(PGMEA)中。 NDBARC材料还包括光酸产生剂和任选的交联化合物。 在NDBARC材料中,羧酸提供显影剂溶解性,而单独的醇,单独的羧酸或其组合提供PGMEA抗性。 NDBARC材料对抗蚀剂溶剂具有抗性,因此在NDBARC上抗蚀剂涂覆期间NDBARC和抗蚀剂之间不会发生混合。 在曝光和烘烤之后,由于光刻曝光部分中的负抗蚀剂和NDBARC层中的聚合物的化学放大交联,负光刻胶(30E)和NDBARC层(20E)的光刻曝光部分变得不溶于显影剂。 / p>

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