公开(公告)号：JP2009031282A

公开(公告)日：2009-02-12

申请号：JP2008187050

申请日：2008-07-18

Applicant: Ir Microsystems Sa ,  アイアール マイクロシステムズ エス.エー.

Inventor： WILLING BERT ,  KOHLI MARKUS ,  SEIFERT ANDREAS

IPC: G01N21/00 ,  G01N21/39

CPC classification number: G01N21/1702 ,  G01N21/274

Abstract: PROBLEM TO BE SOLVED: To provide a gas sensing method and gas sensor for performing quartz-enhanced photoacoustic spectroscopy particularly used in a cost-oriented field and capable of increasing the accuracy of detection by quartz crystal.
SOLUTION: The gas sensor related to the present invention includes a quartz tuning fork 3 for photoacoustic measurement. Wall noises (due to absorption in the gas measurement cell) are generated by a laser beam 2 incident to the tuning fork. One tuning fork 3 or two tuning forks 3 and 6 are used according to kinds of target gases so that a wall noise signal is separated from the gas density signal S
GC . This configuration enables substitution of a photo diode used for measurement of laser intensity in a normal sensor by wall noises. Consequently, no photo diode is required and the sensor cost can be reduced.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供一种气体传感方法和气体传感器，用于执行特别用于成本取向领域的石英增强光声光谱，并且能够提高石英晶体的检测精度。 解决方案：与本发明有关的气体传感器包括用于光声测量的石英音叉3。 通过入口到音叉的激光束2产生壁噪声（由于在气体测量单元中的吸收）。 根据目标气体的种类使用一个音叉3或两个调音叉3和6，使得壁噪声信号与气体密度信号S GC 分离。 该结构能够通过壁噪声代替用于在正常传感器中测量激光强度的光电二极管。 因此，不需要光电二极管并且可以降低传感器成本。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2007298510A

公开(公告)日：2007-11-15

申请号：JP2007116623

申请日：2007-04-26

Applicant: Ir Microsystems Sa ,  アイアール マイクロシステムズ エス.エー.

Inventor： WILLING BERT ,  KOHLI MARKUS ,  SEIFERT ANDREAS

IPC: G01N21/27

CPC classification number: G01N21/3504 ,  G01N21/39

Abstract: PROBLEM TO BE SOLVED: To provide a gas detection method and a gas detection device which can suppress etalon fringes, independently of a DC drive current by determining etalon fringes during the calibration of a gas detection device, in the absence of a gas.
SOLUTION: A measurement signal that is dependent on the concentration of a gas but is independent of the intensity modulation of an initial light signal is generated, by determining a first pre-measurement signal, when a laser source 1 is operated at the center of a gas absorption peak, a second pre-measurement signal, when the laser source 1 is operated with a DC drive current at a wavelength shorter than that of the gas absorption peak; and a third pre-measurement signal, when the laser source 1 is operated with a DC drive current by a wavelength longer than at the gas absorption peak. The difference between the two DC drive currents corresponds to a cycle of etalon fringes, derived during the calibration. A final measurement signal is determined as the difference between the first pre-measurement signal and the arithmetic mean of the second pre-measurement signal and the third pre-measurement signal. This etalon fringe suppression very much simplifies a reference channel in a gas detection device. This eliminates the need for separate lock-in channels which analyze detector signal, either on a modulation frequency (f) or on doubled modulation frequency (2f).
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供一种气体检测方法和气体检测装置，其可以在不存在气体的情况下，通过在气体检测装置的校准期间通过确定标准具条纹来独立于DC驱动电流来抑制标准具条纹 。 解决方案：通过确定第一预测量信号，当激光源1被操作在第一预测量信号时，产生取决于气体浓度但与初始光信号的强度调制无关的测量信号 当激光源1以比气体吸收峰的波长短的直流驱动电流工作时，气体吸收峰的中心是第二预测量信号; 和第三预测量信号，当激光源1以直流驱动电流操作比波长比气体吸收峰长的波长时。 两个直流驱动电流之间的差异对应于在校准期间导出的标准具条纹周期。 最终测量信号被确定为第一预测量信号和第二预测量信号和第三预测量信号的算术平均值之间的差值。 该标准具条纹抑制非常简化气体检测装置中的参考通道。 这样就不需要分析检测器信号的分离锁定通道，无论是调制频率（f）还是调制频率（2f）。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2008083049A

公开(公告)日：2008-04-10

申请号：JP2007245227

申请日：2007-09-21

Applicant: Ir Microsystems Sa ,  アイアール マイクロシステムズ エス.エー.

Inventor： WILLING BERT ,  KOHLI MARKUS ,  SEIFERT ANDREAS

IPC: G01N21/39 ,  G01N21/00

CPC classification number: G01N21/1702

Abstract: PROBLEM TO BE SOLVED: To provide a gas detection method and a gas detector affected hardly by fluctuation of a laser wavelength caused by a temperature change.
SOLUTION: This photoacoustic near-infrared gas detector includes an amplitude-modulated laser source 1, a gas detecting chamber 5 for holding gas to be detected, a microphone 3 attached to the gas detecting chamber 5, a photoreception element 6 for receiving a laser beam passed through the gas detecting chamber of holding the gas to be detected, a modulation frequency generator 9 for imparting a modulation signal S
M to the laser source 1, and a computation processing means 15 including a control means for determining a gas concentration. The laser source 1 changes an output wavelength in every cycle of amplitude modulation between the maximum wavelength and the minimum wavelength to be scanned completely over a prescribed wavelength range, and a characteristic of absorption is averaged thereby in the gas to be detected.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供几乎不受由温度变化引起的激光波长的波动影响的气体检测方法和气体检测器。 该光声近红外气体检测器包括调幅激光源1，用于保持被检测气体的气体检测室5，安装在气体检测室5上的麦克风3，用于接收的光接收元件6 通过气体检测室的激光束保持要检测的气体;调制频率发生器9，用于向激光源1施加调制信号S SBM;以及计算处理装置15，其包括： 用于确定气体浓度的控制装置。 激光源1在最大波长和最小波长的每个振幅周期的周期中改变要在规定波长范围内完全扫描的输出波长，并且在待检测气体中平均吸收特性。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2008203248A

公开(公告)日：2008-09-04

申请号：JP2008006702

申请日：2008-01-16

Applicant: Ir Microsystems Sa ,  アイアール マイクロシステムズ エス.エー.

Inventor： WILLING BERT ,  KOHLI MARKUS ,  SEIFERT ANDREAS

IPC: G01N21/39 ,  G01N21/00 ,  G01N21/35

CPC classification number: G01N21/1702 ,  G01N21/39 ,  G01N2021/1704 ,  G01N2021/399

Abstract: PROBLEM TO BE SOLVED: To provide a gas sensor device enabling tunable diode laser spectroscopy and resonance photoacoustic detection in combination. SOLUTION: The gas sensor device includes a tunable diode laser (13) capable of producing a first modulation laser beam (8'), a tunable diode laser (14) capable of producing a second modulation laser beam (10'), a photosensor (18) for receiving the first modulation laser beam (8') and an acoustic sensor (4) for detecting photoacoustic made by the second modulation laser beam (10'), a measurement room (15) to provide a space for absorption of gas to be detected, and a microprocessor (21) for controlling the tunable diode lasers (13 and 14), processing the detected signals and outputting them as measurement signals. The gas sensor device of this invention can be down-sized and reduce production cost since it uses common photo-electronic parts and an electronic circuit board (12) to control two different measurements and process data. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供组合使能可调谐二极管激光光谱和共振光声检测的气体传感器装置。 气体传感器装置包括能够产生第一调制激光束（8'）的可调谐二极管激光器（13），能够产生第二调制激光束（10'）的可调谐二极管激光器（14） 用于接收第一调制激光束（8'）的光电传感器（18）和用于检测由第二调制激光束（10'）制成的光声的声传感器（4），提供吸收空间的测量室 的待检测气体，以及用于控制可调谐二极管激光器（13和14）的微处理器（21），处理检测到的信号并将其作为测量信号输出。 本发明的气体传感器装置可以减小尺寸并降低生产成本，因为它使用普通的光电子部件和电子电路板（12）来控制两个不同的测量和处理数据。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2007040995A

公开(公告)日：2007-02-15

申请号：JP2006207393

申请日：2006-07-31

Applicant: Ir Microsystems Sa ,  アイアール マイクロシステムズ エス.エー.

Inventor： WILLING BERT ,  KOHLI MARKUS ,  SEIFERT ANDREAS

IPC: G01N21/39 ,  G01N21/35

CPC classification number: G01N21/39 ,  G01J3/433 ,  G01N21/3504 ,  G01N2201/0691

Abstract: PROBLEM TO BE SOLVED: To provide a gas detection method and a gas detector with a low degree of dependence on temperature and on a sudden change in a wavelength. SOLUTION: This gas detector comprises at least one surface emission laser light source 1 and at least one light sensor 8 for detecting a light beam passing through a specimen chamber 4 containing a gas to be measured. A detection signal by the light sensor 8 is inputted into lock-in amplifiers 19 and 20 directly or after being differentiated in terms of time in a differential computing unit 25, and outputted therefrom as two different 2f detection signals, that is, measurement signals S MI and S MA . Here, f is the wavelength-modulated frequency of a light source. A ratio between the two measurement signals gives accurate gas concentration. In gas detection, at least first and second modulation reference signals S 2f0 and S 2f1 are used of a frequency 2f of twice the modulated frequency f of the laser light source. This gas detector excels conventional techniques since the use of the 2f modulation reference signals provides a result independent of absolute strength measurement, that is, independent of laser temperature change or mode hopping. Further, a merit is also provided that measurement accuracy is independent of gas concentration. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供对温度低依赖性和波长突然变化的气体检测方法和气体检测器。 解决方案：该气体检测器包括至少一个表面发射激光光源1和至少一个光传感器8，用于检测通过包含待测气体的试样室4的光束。 光传感器8的检测信号直接输入到锁定放大器19和20，或者在微分计算单元25中在时间上被区分后输出，作为两个不同的2f检测信号，即测量信号S MI 和S MA 。 这里，f是光源的波长调制频率。 两个测量信号之间的比率提供了精确的气体浓度。 在气体检测中，使用激光光源的调制频率f的两倍的频率2f的至少第一和第二调制参考信号S SB2f0和S 。 该气体检测器优于常规技术，因为使用2f调制参考信号提供独立于绝对强度测量的结果，即独立于激光器温度变化或模式跳变。 此外，还提供了测量精度与气体浓度无关的优点。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：CA2638053A1

公开(公告)日：2009-01-24

申请号：CA2638053

申请日：2008-07-17

Applicant: IR MICROSYSTEMS SA

Inventor： WILLING BERT ,  SEIFERT ANDREAS ,  KOHLI MARKUS

IPC: G01N29/14 ,  G01N29/42

Abstract: The present invention targets gas sensors based on quartz-enhanced photo- acoustics, notably for applications where a very low price procial. The underlying idea is to replace the photo diode normally used for laser intensity measurement by the wall noise which is generated on the tuning fork. This eliminates the costs of the photo diode. The wall noise generated by the laser beam incident on t he tuning fork is proportional to the intensity of the laser beam. Depending on the gas to be measured the wall noise signal can be separated from the gas concentration signal by using only one fork or a second fork preferably behind the first fork.