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公开(公告)号：JP2004010992A
公开(公告)日：2004-01-15
申请号：JP2002168229
申请日：2002-06-10
Applicant: TOPPAN PRINTING CO LTD , KOKOMA MASUHIRO
Inventor： WATANABE YUKI , HARADA TAKAHIRO , KOKOMA MASUHIRO
Abstract: PROBLEM TO BE SOLVED: To provide a method of producing a layered product of stable quality which is excellent as a gaseous oxygen barrier and water vapor barrier, also has high transparency, is particularly free from deterioration in its base material film, has excellent flexibility and impact resistance in the base material film, and has high productivity. SOLUTION: In the method of producing a layered product, a carbon-containing metal oxide thin film expressed by a formula MC x O y (M is metal or silicon; x is 0.05 to 0.5; and y is 1.0 to 2.0) is deposited on a polymer film by a CVD method using plasma generated under a pressure close to atmospheric pressure. COPYRIGHT: (C)2004,JPO
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公开(公告)号：JP2002273168A
公开(公告)日：2002-09-24
申请号：JP2001073926
申请日：2001-03-15
Applicant: ALPHA TEKKU KK , KOKOMA MASUHIRO , NAITO TAKESHI
Inventor： NAITO TAKESHI , KOKOMA MASUHIRO , NAGASAWA KAZUTOSHI
IPC: G21F9/02 , B01D53/32 , B01D53/34 , B01D53/70 , B01J19/08 , C07B37/06 , C07C19/08 , H01L21/205 , H01L21/302 , H01L21/3065 , H05H1/24
Abstract: PROBLEM TO BE SOLVED: To reduce adhesion of reaction products in a plasma generation part in a device for removal of hazards, to facilitate cleaning when the reaction products are adhered and to prevent the back flow to a treatment chamber of a material harmful to etching and deposition generated during decomposition of the gas to be treated when the device is provided in the treatment chamber of etching, deposition or the like. SOLUTION: Reactive gases containing a greenhouse effect gas or an ozone layer depleting gas used for cleaning the etching of a film, a deposition, or a device are exhausted; during exhausting the gases the reactive gases are decomposed in a glow discharge plasma containing an inert plasma gas generated by the grow discharge nearly under atmospheric pressure; and the constituent particles of the decomposed reactive gases are reacted with the reactive treated gas, thereby converted to non-greenhouse effect gas or ozone layer depleting gas, or the gas treatable for converting to a harmless gas or the gas removable in known treatment devices.
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公开(公告)号：JP2897055B2
公开(公告)日：1999-05-31
申请号：JP6353190
申请日：1990-03-14
Applicant: BURIJISUTON KK , OKAZAKI SACHIKO , KOKOMA MASUHIRO
Inventor： KUSANO YUKIHIRO , YOSHIKAWA MASAHITO , NAITO TOSHIO , OKAZAKI SACHIKO , KOKOMA MASUHIRO
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公开(公告)号：JPH08188868A
公开(公告)日：1996-07-23
申请号：JP293495
申请日：1995-01-11
Applicant: MARUYAMA KAZUNORI , OKAZAKI SACHIKO , KOKOMA MASUHIRO
Inventor： MARUYAMA KAZUNORI , OKAZAKI SACHIKO , KOKOMA MASUHIRO
Abstract: PURPOSE: To simply form any of various kinds of functional thin films on a substrate disposed in the opening region of a discharge tube by placing a raw material substance in the discharge tube, introducing a rare gas under approximately atmospheric pressure into the discharge tube, generating an atmospheric pressure discharge plasma through applying RF power to electrodes in the discharge tube and sputtering the raw material substance by means of the plasma. CONSTITUTION: This formation comprises: placing a raw material substance (an oxide such as zinc oxide, tin oxide) in a capacitance type discharge tube 1; introducing a rare gas (gaseous Ar, etc.) into the discharge tube 1 from a gas supply means 2; applying RF power to electrodes in the discharge tube 1 supplied from a RF power supply device 3 through a matching device 4 to generate an atmospheric pressure discharge plasma; sputtering the raw material substance by means of the plasma to form a thin film on a substrate 5 disposed in the opening region of the discharge tube 1. Thus, the thin film forming device which has a simple structure and is easily movable can be obtained to form any of various kinds of high quality thin films on the substrate 5 in any optional place.
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公开(公告)号：JPH0696718A
公开(公告)日：1994-04-08
申请号：JP21141992
申请日：1992-08-07
Applicant: II C KAGAKU KK , OKAZAKI SACHIKO , KOKOMA MASUHIRO
Inventor： UCHIYAMA HIROSHI , OKAZAKI SACHIKO , KOKOMA MASUHIRO
Abstract: PURPOSE:To accomplish the stabilization of glow discharge by arranging a number of metal-made pipes each having a ceramic thermal spraying layer on the surface thereof in parallel to each other at small intervals to easily replace air between electrodes with plasma generating gas. CONSTITUTION:A stainless steel pipe with the diameter of about 10mm and the length of about 1150mm is bent at a right angle in the position of 50mm from the end thereof to form a part of an electrode 2. About 60 similar pieces are fitted to a metal frame 3 at an interval of 2 to 5mm to form an electrode. After the pipes are so lightly pressed as to form the bottom of the pipes in a uniform plane, ceramic thermal spray is applied to the whole surface of the pipes to make a dielectric coating film to be an upper electrode. For a lower electrode, a glass plate of 1mm thick is placed for a dielectric material on a brass plate of 10mm thick with an area of 1m . The upper and lower electrodes are placed at an interval of 10mm in a plasma reaction vessel, and the mixed gas of Ar and He is injected thereinto and a voltage of 3000 volts at 3000Hz is applied to make decision on the complete replacement with air at the time when glow discharge is brought about.
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Patent Agency Ranking
公开(公告)号：JPH0641337A
公开(公告)日：1994-02-15
申请号：JP15494691
申请日：1991-06-26
Applicant: KOKOMA MASUHIRO , OKAZAKI SACHIKO , KIMOTO KK
Inventor： KOKOMA MASUHIRO , OKAZAKI SACHIKO
Abstract: PURPOSE:To control the surface energy of a plastic to an arbitrary level by plasma treatment or corona treatment. CONSTITUTION:A surface of a plastic material is subjected to plasma treatment or corona treatment with a mixed gas consisting of a fluorine-containing compound such as CF4, C2F6 and SF6 capable of imparting hydrophobic nature to the surface by plasma treatment or corona treatment and a gas capable of imparting hydrophilic nature to the surface while adjusting the mixing ratio of both components. Since the molecules on the surface of the plastic material are directly fluorinated by this process, there is absolutely no problem of surface layer peeling and the fluorination degree can be controlled to an arbitrary level to enable the production of a hydrophobic product as well as a hydrophilic product.
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公开(公告)号：JPH05251198A
公开(公告)日：1993-09-28
申请号：JP8026892
申请日：1992-03-03
Applicant: KIMOTO KK , OKAZAKI SACHIKO , KOKOMA MASUHIRO
Inventor： OKAZAKI SACHIKO , KOKOMA MASUHIRO , UEHARA MAKOTO , KIMURA TAKEHISA
Abstract: PURPOSE:To generate uniform and stable glow discharge not only at a high frequency but also at a low frequency by means of a gas which cannot conventionally generate glow discharge under an air pressure equal to or higher than an atmospheric pressure by using a glow discharge plasma generating electrode which can be reduced in weight and formed in an arbitrary shape. CONSTITUTION:A glow discharge plasma generating electrode is constituted of a metal fine wire electrode 2 formed in a volume of a porosity of 70% or less by the use of a metal fine wire having a diameter of 0.01-0.5mm according to the kind of plasma generating gas; and a dielectric 6 disposed in contact with the metal fine wire electrode 2. The electrodes 2 are disposed at an equal interval as counter electrodes with the dielectric on the discharging surface side in a gaseous phase of a reactor under a pressure equal to or higher than an atmospheric pressure so as to apply a predetermined voltage between the electrodes, thus generating glow discharge. Since the electrode 2 is provided at least on one side of the reactors, a stable atmospheric glow discharge plasma can be obtained for each target gas.
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公开(公告)号：JPH05202208A
公开(公告)日：1993-08-10
申请号：JP18029292
申请日：1992-06-15
Applicant: BRIDGESTONE CORP , OKAZAKI SACHIKO , KOKOMA MASUHIRO
Inventor： KUSANO YUKIHIRO , AKIYAMA SETSUO , YOSHIKAWA MASAHITO , NAITO TOSHIO , OKAZAKI SACHIKO , KOKOMA MASUHIRO
Abstract: PURPOSE:To provide the title method which can easily be carried out in a clean environment, can give a vulcanized rubber having far better surface adhesion than one obtained by low-pressure glow plasma treatment, and does not impair the properties inherent in the rubber because only an extremely thin surface layer is treated. CONSTITUTION:The title method comprises treating the surface of a vulcanized rubber with an atmospheric-pressure plasma obtained from a gas containing oxygen atoms and a gas containing halogen atoms.
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9.发明专利
公开(公告)号：JPH05155605A
公开(公告)日：1993-06-22
申请号：JP25276091
申请日：1991-09-05
Applicant: II C KAGAKU KK , OKAZAKI SACHIKO , KOKOMA MASUHIRO
Inventor： UCHIYAMA HIROSHI , OKAZAKI SACHIKO , KOKOMA MASUHIRO
Abstract: PURPOSE:To maintain a stable glow discharge even in the gas wherein a glow discharge is hardly generated by using an electrode obtained by integrating the laminate of the dielectric sheets having a layer contg. conductive powder or a conductive layer with the discharge electrode. CONSTITUTION:The dielectric face of a dielectric film 2 is stuck to a discharge electrode 1, and a conductive layer 3 is formed on the other surface of the layer 3. The dielectric face of a dielectric film 4 larger than the film 2 is stuck to the layer 3, and a conductive layer 5 is formed on the other surface of the film 4. The conductivity of the layer 5 is made lower than that of the layer 3. By using a glow-discharge plasma electrode thus formed, a glow discharge is very easily generated in the Ar, nitrogen, air, oxygen, etc., wherein a glow discharge is difficult to generate. Accordingly, ozone is generated by this electrode, and a harmful matter is highly efficiently removed by passing a gas contg. NOx, SOx, etc., or the vapor of the harmful matter through the glow discharge.
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公开(公告)号：JPH05131132A
公开(公告)日：1993-05-28
申请号：JP9707292
申请日：1992-03-24
Applicant: BRIDGESTONE CORP , OKAZAKI SACHIKO , KOKOMA MASUHIRO
Inventor： KUSANO YUKIHIRO , YOSHIKAWA MASAHITO , NAITO TOSHIO , OKAZAKI SACHIKO , KOKOMA MASUHIRO
IPC: B01J19/08 , C08J7/00 , C23C16/50 , D06M10/00 , D06M10/02 , H01J37/32 , H01L21/302 , H01L21/3065 , H05H1/24 , H05H1/46
Abstract: PURPOSE:To uniformly and efficiently treat the surface of an axially symmetric base material by forming one electrode into a cylindrical shape to arrange the other electrode in the formed cylindrical electrode and forming atmospheric pressure glow plasma in the cylindrical electrode to place an object to be treated in said plasma. CONSTITUTION:An opposed electrode 7 is arranged in a cylindrical electrode 3 and voltage is applied across both electrodes 3, 7 from a power supply 1 to generate atmospheric pressure glow plasma. When an object 4 to be treated is arranged in the plasma region, the surface treatment of the object 4 to be treated is performed in the presence of gas selected corresponding to the kind of surface treatment by the atmospheric pressure glow plasma. By this constitution, the surface of an axially symmetric base material such as a rod like or tubular object can be uniformly and efficiently treated and, since heat is not almost generated during treatment, this method can be adapted even to a low m.p. base material.
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