Abstract:
An inertial sensor calibration method and inertial sensor calibration apparatus. One or more diffraction patterns are generated by one or more fixed and/or moveable gratings (inertial sensors) illuminated by an atomically stabilized source attached to a base and detected by an imager. The grating and/or inertial sensor has a designed parameter value and an actual respective parameter value, such as motion or distance that can be determined upon ultra-precise measurement. Such ultra-precise measurement can be used to calibrate the grating or inertial sensor.
Abstract:
An exemplary thinned-down betavoltaic device includes an N+ doped silicon carbide (SiC) substrate having a thickness between about 3 to 50 microns, an electrically conductive layer disposed immediately adjacent the bottom surface of the SiC substrate; an N- doped SiC epitaxial layer disposed immediately adjacent the top surface of the SiC substrate, a P+ doped SiC epitaxial layer disposed immediately adjacent the top surface of the N- doped SiC epitaxial layer, an ohmic conductive layer disposed immediately adjacent the top surface of the P+ doped SiC epitaxial layer, and a radioisotope layer disposed immediately adjacent the top surface of the ohmic conductive layer. The radioisotope layer can be 63Ni, 147Pm, or 3H. Devices can be stacked in parallel or series. Methods of making the devices are disclosed.
Abstract translation:一种示例性的减薄型紫外线器件包括厚度在约3至50微米之间的N +掺杂碳化硅(SiC)衬底,紧邻SiC衬底的底表面设置的导电层; 紧邻SiC衬底的顶表面设置的N掺杂的SiC外延层,紧邻N掺杂的SiC外延层的顶表面设置的P +掺杂的SiC外延层,紧邻邻近顶部表面的欧姆导电层 P +掺杂的SiC外延层,以及紧邻欧姆导体层的顶表面设置的放射性同位素层。 放射性同位素层可以是63Ni,147Pm或3H。 设备可以并联或串联堆叠。 公开了制造装置的方法。
Abstract:
A charged particle accelerator having a curvilinear beam trajectory maintained solely by a laterally directed, constant electric field; requiring no magnetic field. A method for controlling the trajectory of a charged particle in an accelerator by applying only a constant electric field for beam trajectory control. Curvilinear steering electrodes held at a constant potential create the beam path. A method for making a chip-scale charged particle accelerator involves integrated circuit-based processes and materials. A particle accelerator that can generate 110 KeV may a footprint less than about 1 cm 2 .
Abstract:
A wafer-scale nano-metrology system (10) for sensing position of a nanofabrication element (16) when illuminated by a patterned optical projection defining a grid or position measuring gauge includes a frequency stabilized laser emitter (12) configured to generate a laser emission at a selected frequency, where the laser emission forms a diverging beam configured to illuminate a selected area occupied by a target fabrication object (18) having a proximal surface. An optical pattern generator (14) is illuminated by laser (12) and generates a patterned optical projection grid or gauge for projection upon the target fabrication object (18). A movable tool or nanofabrication element (16) carries an optical sensor array (50), and the sensor array detect at least a portion of the optical projection grid, and, in response to that detection, generates grid position data for use in controlling the position of the tool (16).
Abstract:
A system (120) for reflecting or redirecting incident light, microwave or sound energy includes a first substrate (144) configured to support an array of reflective elements (130) that can be angularly displaced through a range of substantially (90) degrees in response to a reflector angle control signal and a controller programmed to generate the reflector angle control signal to achieve desired incident energy, beam or wavefront re-direction. The reflective elements (130) preferably comprise MEMS micro-reflector elements hingedly or movably attached to the first substrate (130) and define a reflective surface that is aimed at the source of incident light, microwave or sound energy.
Abstract:
An inertial sensor calibration method and inertial sensor calibration apparatus. One or more diffraction patterns are generated by one or more fixed and/or moveable gratings (inertial sensors) illuminated by an atomically stabilized source attached to a base and detected by an imager. The grating and/or inertial sensor has a designed parameter value and an actual respective parameter value, such as motion or distance that can be determined upon ultra-precise measurement. Such ultra-precise measurement can be used to calibrate the grating or inertial sensor.
Abstract:
An autonomous, self -powered device includes a radioisotope-powered current impulse generator including a spring assembly comprising a cantilever, and a piezoelectric- surface acoustic wave (P-SAW) structure connected in parallel to the current impulse generator. Positive charges are accumulated on an electrically isolated 63 Ni thin film due to the continuous emission of β-particles (electrons), which are collected on the cantilever. The accumulated charge eventually pulls the cantilever into the radioisotope thin-film until electrical discharge occurs. The electrical discharge generates a transient magnetic and electrical field that can excite the RF modes of a cavity in which the electrical discharge occurs. A piezoelectric-SAW resonator is connected to the discharge assembly to control the RF frequency output. A method for generating a tuned RF signal includes inputting an energy pulse to a P-SAWresonator, exciting the resonant frequency thereof, and outputting an RF signal having a frequency tuned to the resonator frequency.
Abstract:
An GHz ultrasonic transducer pixel, alone or incorporated into imaging system with a CMOS device. The ultrasonic transducer pixel includes an ultrasonic transducer connected to a transmit circuit and a receive circuit. The transmit and receive circuits are chosen by switches. The ultrasonic transducer pixel also includes a mixer of the receive circuit positioned as a first stage in the receive circuit, a pixel select circuit comprising analog components and digital components, and a power supply conditioning circuitry.