公开(公告)号：WO2009155352A3

公开(公告)日：2010-03-25

申请号：PCT/US2009047675

申请日：2009-06-17

Applicant: LAM RES CORP ,  LEMING ANDRES ,  KUTHI ANDRAS ,  ANDERSON THOMAS

Inventor： LEMING ANDRES ,  KUTHI ANDRAS ,  ANDERSON THOMAS

IPC: H05H1/36 ,  H01L21/205 ,  H01L21/3065

CPC classification number: H03B21/00

Abstract: A complex waveform frequency matching device is disclosed. In various embodiments, the matching device comprises a plurality of radio frequency generators coupled in parallel with one another. Each subsequent one of the plurality of radio frequency generators is configured to produce a harmonic frequency related by an integral multiple to a frequency produced by any lower-frequency producing radio frequency generator, thereby generating a complex waveform. A plurality of frequency splitter circuits is coupled to an output of the plurality of radio frequency generators, and each of a plurality of matching networks has an input coupled to an output of one of the plurality of frequency splitter circuits and an output configured to be coupled to a plasma chamber.

Abstract translation: 公开了一种复杂的波形频率匹配装置。 在各种实施例中，匹配装置包括彼此并联耦合的多个射频发生器。 多个射频发生器中的后续一个被配置为产生与由任何较低频产生的射频发生器产生的频率的整数倍相关的谐波频率，从而产生复合波形。 多个分频器电路耦合到多个射频发生器的输出，并且多个匹配网络中的每一个具有耦合到多个分频器电路之一的输出的输入和被配置为耦合的输出 到等离子体室。

公开(公告)号：WO2009155352A2

公开(公告)日：2009-12-23

申请号：PCT/US2009/047675

申请日：2009-06-17

Applicant: LAM RESEARCH CORPORATION ,  LEMING, Andres ,  KUTHI, Andras ,  ANDERSON, Thomas

Inventor： LEMING, Andres ,  KUTHI, Andras ,  ANDERSON, Thomas

IPC: H05H1/36 ,  H01L21/3065 ,  H01L21/205

CPC classification number: H03B21/00

Abstract: A complex waveform frequency matching device is disclosed. In various embodiments, the matching device comprises a plurality of radio frequency generators coupled in parallel with one another. Each subsequent one of the plurality of radio frequency generators is configured to produce a harmonic frequency related by an integral multiple to a frequency produced by any lower-frequency producing radio frequency generator, thereby generating a complex waveform. A plurality of frequency splitter circuits is coupled to an output of the plurality of radio frequency generators, and each of a plurality of matching networks has an input coupled to an output of one of the plurality of frequency splitter circuits and an output configured to be coupled to a plasma chamber.

Abstract translation: 公开了一种复杂的波形频率匹配装置。 在各种实施例中，匹配装置包括彼此并联耦合的多个射频发生器。 多个射频发生器中的后续一个被配置为产生与由任何较低频产生的射频发生器产生的频率的整数倍相关的谐波频率，从而产生复合波形。 多个分频器电路耦合到多个射频发生器的输出，并且多个匹配网络中的每一个具有耦合到多个分频器电路之一的输出的输入和被配置为耦合的输出 到等离子体室。