公开(公告)号：WO2011017487A2

公开(公告)日：2011-02-10

申请号：PCT/US2010/044493

申请日：2010-08-05

Applicant: CORNELL UNIVERSITY ,  TAN, Christine, P. ,  LIN, David, M. ,  CRAIGHEAD, Harold, G.

Inventor： TAN, Christine, P. ,  LIN, David, M. ,  CRAIGHEAD, Harold, G.

IPC: H01L21/027

CPC classification number: B41M3/006 ,  B81C1/00031 ,  B81C2201/0184 ,  B81C2201/0187

Abstract: An apparatus for forming an array of deposits on a substrate is disclosed. The apparatus may include a stencil capable of releasable attached to the substrate and having an array of openings and at least one alignment mark. The apparatus may further include a high throughput deposition printer aligned with the stencil to form an array of deposits on the substrate. The array of deposits may be aligned with the array of openings through the at least one alignment mark and an optional alignment device. Methods of manufacturing the stencil and using it to generate multiplexed or combinatorial arrays are also disclosed.

Abstract translation: 公开了一种用于在衬底上形成沉积物阵列的装置。 该设备可以包括能够可释放地连接到基底并具有开口阵列和至少一个对准标记的模版。 该设备还可以包括与模板对准的高通量沉积打印机，以在衬底上形成沉积物阵列。 沉积物阵列可以通过至少一个对准标记和可选的对准装置与开口阵列对齐。 还公开了制造模板并将其用于生成多路复用或组合阵列的方法。

公开(公告)号：WO2011017487A3

公开(公告)日：2011-05-26

申请号：PCT/US2010044493

申请日：2010-08-05

Applicant: UNIV CORNELL ,  TAN CHRISTINE P ,  LIN DAVID M ,  CRAIGHEAD HAROLD G

Inventor： TAN CHRISTINE P ,  LIN DAVID M ,  CRAIGHEAD HAROLD G

IPC: H01L21/027

CPC classification number: B41M3/006 ,  B81C1/00031 ,  B81C2201/0184 ,  B81C2201/0187

Abstract: An apparatus for forming an array of deposits on a substrate is disclosed. The apparatus may include a stencil capable of releasable attached to the substrate and having an array of openings and at least one alignment mark. The apparatus may further include a high throughput deposition printer aligned with the stencil to form an array of deposits on the substrate. The array of deposits may be aligned with the array of openings through the at least one alignment mark and an optional alignment device. Methods of manufacturing the stencil and using it to generate multiplexed or combinatorial arrays are also disclosed.

Abstract translation: 公开了一种用于在衬底上形成沉积物阵列的设备。 该设备可以包括能够可释放地附着到基板并且具有开口阵列和至少一个对准标记的模版。 该设备可以进一步包括与模版对准的高吞吐量沉积印刷机，以在衬底上形成沉积物阵列。 沉积物阵列可以与通过至少一个对准标记和任选的对准装置的开口阵列对准。 还公开了制造模板并使用它来生成多路复用或组合阵列的方法。