公开(公告)号：IL317185A

公开(公告)日：2025-01-01

申请号：IL31718524

申请日：2024-11-21

Applicant: ASML NETHERLANDS BV ,  CALADO VICTOR EMANUEL ,  MATHIJSSEN SIMON GIJSBERT JOSEPHUS ,  ANDERSON AMANDA ELIZABETH

Inventor： CALADO VICTOR EMANUEL ,  MATHIJSSEN SIMON GIJSBERT JOSEPHUS ,  ANDERSON AMANDA ELIZABETH

Abstract: Disclosed is a metrology method. The method comprises obtaining measurement data relating to measurement of at least one target using two or more different illumination profiles; and a respective parameter of interest value for a parameter of interest for each of said two or more different illumination profiles. The method described determining, from said measurement data, a respective measurement parameter deviation value for each of said two or more different illumination profiles, said measurement parameter deviation value describing a deviation in a measurement parameter with respect to a measurement parameter value attributed to a region of interest of said target or a sub-target thereof; determining a relationship for the target between the parameter of interest values and the measurement parameter deviation values; and determining one or both of a corrected parameter of interest value and a preferred illumination profile from said relationship.

公开(公告)号：IL316705A

公开(公告)日：2024-12-01

申请号：IL31670524

申请日：2024-10-30

Applicant: ASML NETHERLANDS BV ,  VAN DER SCHAAR MAURITS ,  MATHIJSSEN SIMON GIJSBERT JOSEPHUS ,  DEN BOEF ARIE JEFFREY ,  ZACCA VINCENZO GIUSEPPE ,  WARNAAR PATRICK

Inventor： VAN DER SCHAAR MAURITS ,  MATHIJSSEN SIMON GIJSBERT JOSEPHUS ,  DEN BOEF ARIE JEFFREY ,  ZACCA VINCENZO GIUSEPPE ,  WARNAAR PATRICK

Abstract: Disclosed is a substrate comprising at least one target. The target comprises a plurality of sub-targets, the plurality of sub-targets comprising at least a first sub-target and second sub-target, each of the plurality of sub-targets comprising at least one subsegmented periodic structure having repetitions of a first region and a second region, wherein at least one of the first regions or second regions comprise subsegmented regions formed of periodic sub-features. The first sub-target comprises first subsegmentation characteristics for its subsegmented regions and the second sub-target comprises second subsegmentation characteristics for its subsegmented regions, the first subsegmentation characteristics and second subsegmentation characteristics being different in terms of at least one subsegmentation parameter.