公开(公告)号：WO2006133214A3

公开(公告)日：2006-12-14

申请号：PCT/US2006/021963

申请日：2006-06-06

Applicant: OPTICAL RESEARCH ASSOCIATES ,  MCGUIRE, James P., Jr. ,  CASSARLY, William, J.

Inventor： MCGUIRE, James P., Jr. ,  CASSARLY, William, J.

IPC: F21V9/10 ,  F21V11/00 ,  F21V9/00 ,  F21S10/02 ,  B60Q1/14 ,  F21V17/02 ,  G02B5/00 ,  G03B21/14 ,  H04N9/00

Abstract: Various embodiments described herein comprise illuminators comprising a phosphor color wheel for producing colored light. Light of a first wavelength emitted by a light source is incident on a phosphor color wheel comprising a plurality of different regions, where at least one of these regions comprises a phosphor that fluoresces at a second wavelength when illuminated with light of the first wavelength. The light from the light source and the different regions of the phosphor color wheel are movable with respect to each other such that as the different regions are illuminated by the light, different colors are produced.

公开(公告)号：WO2004106983A2

公开(公告)日：2004-12-09

申请号：PCT/US2004016221

申请日：2004-05-21

Applicant: OPTICAL RES ASSOCIATES ,  MCGUIRE JAMES P JR ,  ROGERS JOHN ,  NUTTER DOUG ,  CASSARLY BILL

Inventor： MCGUIRE JAMES P JR ,  ROGERS JOHN ,  NUTTER DOUG ,  CASSARLY BILL

IPC: G02B20060101 ,  G02B5/02 ,  G02B5/30 ,  G02B6/00 ,  G02B27/00 ,  G02B27/01 ,  G02B27/10 ,  G02B27/14 ,  G02B27/28 ,  H04N9/31 ,  G02B

CPC classification number: G03B21/14 ,  G02B5/02 ,  G02B5/30 ,  G02B5/3058 ,  G02B6/00 ,  G02B27/0101 ,  G02B27/0172 ,  G02B27/283 ,  G02B2027/0118 ,  G03B21/2073 ,  G03B21/208 ,  G03B33/12 ,  H04N9/315

Abstract: Various embodiments involving structures and methods for illumination can be employed, for example, in projectors, head-mounted displays, helmet-mounted displays, back projection TVs, flat panel displays as well as other optical systems. Certain embodiments may include prism elements for illuminating, for example, a spatial light modulator. Light may be coupled to the prism in some cases using fiber optics or lightpipes. The optical system may also include a diffuser having scatter features arranged to scatter light appropriately to produce a desired luminance profile. Other embodiments are possible as well.

Abstract translation: 涉及用于照明的结构和方法的各种实施例可以用于例如投影仪，头戴显示器，头戴式显示器，背投电视，平板显示器以及其它光学系统中。 某些实施例可以包括用于照亮例如空间光调制器的棱镜元件。 在某些情况下，光可以使用光纤或光管耦合到棱镜。 光学系统还可以包括散射器，散射特征被布置为适当散射光以产生期望的亮度分布。 其他实施例也是可能的。

公开(公告)号：WO2012096847A3

公开(公告)日：2012-11-01

申请号：PCT/US2012020504

申请日：2012-01-06

Applicant: KLA TENCOR CORP ,  WACK DANIEL C ,  KVAMME DAMON F ,  ROGERS JOHN R ,  MCGUIRE JAMES P JR ,  RODGERS JOHN M

Inventor： WACK DANIEL C ,  KVAMME DAMON F ,  ROGERS JOHN R ,  MCGUIRE JAMES P JR ,  RODGERS JOHN M

IPC: G03F1/22 ,  G03F1/24

CPC classification number: G03F1/84 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24

Abstract: One embodiment relates to an apparatus that includes an illumination source (102) for illuminating a target substrate (106), objective optics (108) for projecting the EUV light which is reflected from the target substrate, and a sensor (110) for detecting the projected EUV light. The objective optics includes a first mirror (202,302, or 402) which is arranged to receive and reflect the EUV light which is reflected from the target substrate, a second mirror (204, 304, or 404) which is arranged to receive and reflect the EUV light which is reflected by the first mirror, a third mirror (206, 306, or 406) which is arranged to receive and reflect the EUV light which is reflected by the second mirror, and a fourth mirror (208, 308, or 408) which is arranged to receive and reflect the EUV light which is reflected by the third mirror.

Abstract translation: 一个实施例涉及一种装置，其包括用于照射目标基板（106）的照明源（102），用于投射从目标基板反射的EUV光的物镜（108）和用于检测目标基板 预计EUV灯。 物镜包括第一反射镜（202,302或402），第一反射镜（202,302或402）被布置成接收和反射从目标基底反射的EUV光，第二反射镜（204,304或404），其布置成接收和反射 由第一反射镜反射的EUV光，被配置为接收和反射由第二反射镜反射的EUV光的第三反射镜（206,306或406）和第四反射镜（208,308或408） ），其被布置成接收和反射由第三反射镜反射的EUV光。

公开(公告)号：WO2006041596A3

公开(公告)日：2006-04-20

申请号：PCT/US2005/031511

申请日：2005-09-01

Applicant: OPTICAL RESEARCH ASSOCIATES ,  MCGUIRE, James, P., Jr.

Inventor： MCGUIRE, James, P., Jr.

IPC: G02B27/14

Abstract: One embodiment of the invention comprises a simplified light-weight head mounted displays comprising an off-axis combiner and imaging optics defining an optical path. The imaging optics comprises a lens group comprising a plurality of lenses in the optical path. The lens group has a first optical axis. Each of said plurality of lenses have optical axes collinear with the first optical axis. The imaging optics further comprises a single lens element in the optical path having a second optical axis that is different from the first optical axis. The single lens element has positive optical power and is the only lens element in the optical path between the lens group and the combiner that has an optical axis collinear with the second optical axis.

公开(公告)号：WO2006041596A2

公开(公告)日：2006-04-20

申请号：PCT/US2005031511

申请日：2005-09-01

Applicant: OPTICAL RES ASSOCIATES ,  MCGUIRE JAMES P JR

Inventor： MCGUIRE JAMES P JR

IPC: G02B27/14

CPC classification number: G02B27/0081 ,  G02B5/30 ,  G02B13/22 ,  G02B27/0172 ,  G02B27/1026 ,  G02B27/1033 ,  G02B27/14 ,  G02B27/143 ,  G02B27/144 ,  G02B27/145 ,  G02B27/283 ,  G02B2027/011 ,  G02B2027/0123

Abstract: One embodiment of the invention comprises a simplified light-weight head mounted displays comprising an off-axis combiner and imaging optics defining an optical path. The imaging optics comprises a lens group comprising a plurality of lenses in the optical path. The lens group has a first optical axis. Each of said plurality of lenses have optical axes collinear with the first optical axis. The imaging optics further comprises a single lens element in the optical path having a second optical axis that is different from the first optical axis. The single lens element has positive optical power and is the only lens element in the optical path between the lens group and the combiner that has an optical axis collinear with the second optical axis.

Abstract translation: 本发明的一个实施例包括简化的轻量化头戴式显示器，其包括离轴组合器和限定光路的成像光学元件。 成像光学器件包括在光路中包括多个透镜的透镜组。 透镜组具有第一光轴。 所述多个透镜中的每一个具有与第一光轴共线的光轴。 成像光学元件还包括在光路中具有不同于第一光轴的第二光轴的单个透镜元件。 单透镜元件具有正光焦度，并且是具有与第二光轴共线的光轴的透镜组和组合器之间的光路中的唯一透镜元件。

公开(公告)号：WO2004106983A3

公开(公告)日：2004-12-09

申请号：PCT/US2004/016221

申请日：2004-05-21

Applicant: OPTICAL RESEARCH ASSOCIATES ,  MCGUIRE, James, P., Jr. ,  ROGERS, John ,  NUTTER, Doug ,  CASSARLY, Bill

Inventor： MCGUIRE, James, P., Jr. ,  ROGERS, John ,  NUTTER, Doug ,  CASSARLY, Bill

IPC: G02B27/10

Abstract: Various embodiments involving structures and methods for illumination can be employed, for example, in projectors, head-mounted displays, helmet-mounted displays, back projection TVs, flat panel displays as well as other optical systems. Certain embodiments may include prism elements for illuminating, for example, a spatial light modulator (236). Light may be coupled to the prism in some cases using fiber optics (206) or lightpipes. The optical system may also include a diffuser (240) having scatter features arranged to scatter light appropriately to produce a desired luminance profile. Other embodiments are possible as well.

公开(公告)号：WO2012096847A2

公开(公告)日：2012-07-19

申请号：PCT/US2012/020504

申请日：2012-01-06

Applicant: KLA-TENCOR CORPORATION ,  WACK, Daniel, C. ,  KVAMME, Damon, F. ,  ROGERS, John, R. ,  MCGUIRE, James, P., Jr. ,  RODGERS, John, M.

Inventor： WACK, Daniel, C. ,  KVAMME, Damon, F. ,  ROGERS, John, R. ,  MCGUIRE, James, P., Jr. ,  RODGERS, John, M.

IPC: G03F1/22 ,  G03F1/24

CPC classification number: G03F1/84 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24

Abstract: One embodiment relates to an apparatus that includes an illumination source (102) for illuminating a target substrate (106), objective optics (108) for projecting the EUV light which is reflected from the target substrate, and a sensor (110) for detecting the projected EUV light. The objective optics includes a first mirror (202,302, or 402) which is arranged to receive and reflect the EUV light which is reflected from the target substrate, a second mirror (204, 304, or 404) which is arranged to receive and reflect the EUV light which is reflected by the first mirror, a third mirror (206, 306, or 406) which is arranged to receive and reflect the EUV light which is reflected by the second mirror, and a fourth mirror (208, 308, or 408) which is arranged to receive and reflect the EUV light which is reflected by the third mirror.

Abstract translation: 一个实施例涉及一种装置，其包括用于照射目标基板（106）的照明源（102），用于投射从目标基板反射的EUV光的物镜（108），以及 传感器（110），用于检测投射的EUV光。 物镜光学器件包括布置成接收和反射从目标基板反射的EUV光的第一反射镜（202,302或402），布置成接收和反射从目标基板反射的EUV光的第二反射镜（204,304或404） 由第一反射镜反射的EUV光，布置成接收和反射由第二反射镜反射的EUV光的第三反射镜（206,306或406），以及第四反射镜（208,308或408 ），其被安排成接收和反射由第三反射镜反射的EUV光。

公开(公告)号：WO2006133214A2

公开(公告)日：2006-12-14

申请号：PCT/US2006021963

申请日：2006-06-06

Applicant: OPTICAL RES ASSOCIATES ,  MCGUIRE JAMES P JR ,  CASSARLY WILLIAM J

Inventor： MCGUIRE JAMES P JR ,  CASSARLY WILLIAM J

IPC: H01J3/00

CPC classification number: F21S10/007 ,  F21S10/02 ,  F21V9/10 ,  F21V9/14 ,  F21V9/16 ,  G02B6/0066 ,  G02B26/008 ,  G03B21/204 ,  H04N9/3114 ,  H04N9/315

Abstract: Various embodiments described herein comprise illuminators comprising a phosphor color wheel for producing colored light. Light of a first wavelength emitted by a light source is incident on a phosphor color wheel comprising a plurality of different regions, where at least one of these regions comprises a phosphor that fluoresces at a second wavelength when illuminated with light of the first wavelength. The light from the light source and the different regions of the phosphor color wheel are movable with respect to each other such that as the different regions are illuminated by the light, different colors are produced.

Abstract translation: 本文描述的各种实施例包括包含用于产生有色光的荧光色轮的照明器。 由光源发射的第一波长的光入射到包括多个不同区域的荧光体色轮上，其中这些区域中的至少一个包括当用第一波长的光照射时以第二波长发荧光的荧光体。 来自光源和荧光体色轮的不同区域的光可以相对于彼此移动，使得当不同的区域被光照射时，产生不同的颜色。

公开(公告)号：WO2005086714A3

公开(公告)日：2006-02-16

申请号：PCT/US2005007156

申请日：2005-03-03

Applicant: OPTICAL RES ASSOCIATES ,  MCGUIRE JAMES P JR

Inventor： MCGUIRE JAMES P JR

IPC: G01B11/02 ,  G02B5/10

CPC classification number: G02B17/008 ,  G02B17/0631 ,  G02B17/0652 ,  G02B19/0019 ,  G02B19/0047 ,  G02B19/0095 ,  G03F7/70166 ,  G21K1/067

Abstract: Optical relays having at least three reflector portions (162a, 16b, 16c) to allow efficient grazing angle reflections with a relatively high acceptance of light. Light collected by the relay can be delivered to a selected location for various applications, including semiconductor lithography. The at least three reflector portions can be arranged with a light source (164) to provide such grazing angle reflections and high acceptance.

Abstract translation: 具有至少三个反射器部分（162a，16b，16c）的光学继电器，以允许具有较高接受光的有效的掠角反射。 由继电器收集的光可以被传送到用于各种应用的选定位置，包括半导体光刻。 至少三个反射器部分可以布置有光源（164）以提供这种掠角反射和高接受度。

公开(公告)号：WO2005086714A2

公开(公告)日：2005-09-22

申请号：PCT/US2005/007156

申请日：2005-03-03

Applicant: OPTICAL RESEARCH ASSOCIATES ,  MCGUIRE, James, P., Jr.

Inventor： MCGUIRE, James, P., Jr.

IPC: G01B11/02

CPC classification number: G02B17/008 ,  G02B17/0631 ,  G02B17/0652 ,  G02B19/0019 ,  G02B19/0047 ,  G02B19/0095 ,  G03F7/70166 ,  G21K1/067

Abstract: Optical relays having three or more reflector portions to allow efficient grazing angle reflections with a relatively high acceptance of light are described. Light collected by the relay can be delivered to a selected location for various applications, including semiconductor lithography. In some embodiments, the grazing angles are selected to utilize the high reflectivity of extreme ultraviolet light at low grazing angles. The three or more reflectors can be arranged with respect to a light source to provide such grazing angle reflections and high acceptance. Some collectors can have more than one shell to increase the acceptance. In some embodiments, some of the reflectors can be configured to shape the delivered light.

Abstract translation: 描述了具有三个或更多个反射器部分以允许具有相对较高的光接收的有效的掠角反射的光学继电器。 由继电器收集的光可以被传送到用于各种应用的选定位置，包括半导体光刻。 在一些实施例中，选择掠射角以在低掠射角度下利用极端紫外线的高反射率。 可以相对于光源布置三个或更多个反射器，以提供这种掠角反射和高接受度。 一些收藏家可以有多个外壳来增加验收。 在一些实施例中，一些反射器可被配置成对所传送的光进行成形。