公开(公告)号：WO2004068066A3

公开(公告)日：2005-01-20

申请号：PCT/US2004002449

申请日：2004-01-28

Applicant: ORAXION ,  ROSAKIS ARES J ,  OWEN DAVID ,  GLEDDEN STEPHEN ,  OLSON SEAN

Inventor： ROSAKIS ARES J ,  OWEN DAVID ,  GLEDDEN STEPHEN ,  OLSON SEAN

IPC: G01B9/02 ,  G01B11/24 ,  G01J9/02

CPC classification number: G01B9/02098 ,  G01B9/0201 ,  G01B11/2441 ,  G01B2290/35 ,  G01J9/0215

Abstract: Techniques and systems for using optical interferometers to obtain full-field optical measurements of surfaces, such as surfaces of flat panels, patterned surfaces of wafers and substrates. Applications of various shearing interferometers for measuring surfaces are described.

Abstract translation: 使用光学干涉仪获得表面的全场光学测量的技术和系统，例如平板的表面，晶片和衬底的图案化表面。 描述了用于测量表面的各种剪切干涉仪的应用。

公开(公告)号：WO2004068088A3

公开(公告)日：2005-07-28

申请号：PCT/US2004002411

申请日：2004-01-27

Applicant: ORAXION ,  ROSAKIS ARES J ,  OWEN DAVID ,  GLENNDEN STEPHEN

Inventor： ROSAKIS ARES J ,  OWEN DAVID ,  GLENNDEN STEPHEN

IPC: G01B9/02 ,  G01B11/30

CPC classification number: G01B9/02024 ,  G01B9/02007 ,  G01B9/02027 ,  G01B9/02098 ,  G01B11/303 ,  G01B2290/30 ,  G01B2290/45

Abstract: Techniques and systems for processing optical transmission of a plate (401) in an optical shearing interferometer (450A, 450B) to measure the plate. Both optical reflection and optical transmission of the plate may be processed by optical shearing interferometers (451A, 452A 451B, 452B) to obtain measurements of the plate, including surface information of at least one reflective surface, the wedge slopes, and variation in the refractive index of the plate, net optical distortions through plate assembly.

Abstract translation: 用于处理光学剪切干涉仪（450A，450B）中的板（401）的光学透射以测量该板的技术和系统。 板的光学反射和光学透射可以由光学剪切干涉仪（451A，452A 451B，452B）进行处理，以获得板的测量结果，包括至少一个反射表面的表面信息，楔形斜率和折射率的变化 板的折射率，通过板组装的网络光学变形。

公开(公告)号：WO2004068088A2

公开(公告)日：2004-08-12

申请号：PCT/US2004/002411

申请日：2004-01-27

Applicant: ORAXION ,  ROSAKIS, Ares, J. ,  OWEN, David ,  GLENNDEN, Stephen

Inventor： ROSAKIS, Ares, J. ,  OWEN, David ,  GLENNDEN, Stephen

IPC: G01J

CPC classification number: G01B9/02024 ,  G01B9/02007 ,  G01B9/02027 ,  G01B9/02098 ,  G01B11/303 ,  G01B2290/30 ,  G01B2290/45

Abstract: Techniques and systems for processing optical transmission of a plate in an optical shearing interferometer to measure the plate. Both optical reflection and optical transmission of the plate may be processed by optical shearing interferometers to obtain measurements of the plate, including surface information of at least one reflective surface, the wedge slopes, and variation in the refractive index of the plate, net optical distortions through plate assembly.

Abstract translation: 用于处理光学剪切干涉仪中的板的光学透射以测量板的技术和系统。 板的光学反射和光学透射可以通过光学剪切干涉仪来处理，以获得板的测量，包括至少一个反射表面的表面信息，楔形斜率和板的折射率的变化，净光学变形 通过板组件。

公开(公告)号：WO2004068066A2

公开(公告)日：2004-08-12

申请号：PCT/US2004/002449

申请日：2004-01-28

Applicant: ORAXION ,  ROSAKIS, Ares, J. ,  OWEN, David ,  GLEDDEN, Stephen ,  OLSON, Sean

Inventor： ROSAKIS, Ares, J. ,  OWEN, David ,  GLEDDEN, Stephen ,  OLSON, Sean

IPC: G01B

CPC classification number: G01B9/02098 ,  G01B9/0201 ,  G01B11/2441 ,  G01B2290/35 ,  G01J9/0215

Abstract: Techniques and systems for using optical interferometers to obtain full-field optical measurements of surfaces, such as surfaces of flat panels, patterned surfaces of wafers and substrates. Applications of various shearing interferometers for measuring surfaces are described.

Abstract translation: 使用光学干涉仪获得表面的全场光学测量的技术和系统，例如平板的表面，晶片和衬底的图案化表面。 描述了用于测量表面的各种剪切干涉仪的应用。

公开(公告)号：EP1590696A2

公开(公告)日：2005-11-02

申请号：EP04706072.8

申请日：2004-01-28

Applicant: Oraxion

Inventor： ROSAKIS, Ares, J. ,  OWEN, David ,  GLEDDEN, Stephen ,  OLSON, Sean

IPC: G02B9/02

CPC classification number: G01B9/02098 ,  G01B9/0201 ,  G01B11/2441 ,  G01B2290/35 ,  G01J9/0215

Abstract: Techniques and systems for using optical interferometers to obtain full-field optical measurements of surfaces, such as surfaces of flat panels, patterned surfaces of wafers and substrates. Applications of various shearing interferometers for measuring surfaces are described.