公开(公告)号：WO0101442A9

公开(公告)日：2003-01-30

申请号：PCT/US0016786

申请日：2000-06-14

Applicant: LAM RES CORP ,  HAO FANGLI ,  DHINDSA RAJINDER ,  POURHASHEMI JAVAD

Inventor： HAO FANGLI ,  DHINDSA RAJINDER ,  POURHASHEMI JAVAD

IPC: H05H1/46 ,  C23C16/44 ,  C23C16/455 ,  H01J37/32 ,  H01L21/00 ,  H01L21/302 ,  H01L21/3065 ,  H01J37/34

CPC classification number: C23C16/45572 ,  H01J37/3244 ,  H01J37/32522 ,  H01L21/67103

Abstract: A component useful for a plasma reaction chamber includes a heat sink such as a temperature-controlled support member (22) and a heated member such as an electrically powered showerhead electrode (20). The showerhead electrode is peripherally secured to the support member to enclose a gas distribution chamber between a top surface (30) of the electrode and a bottom surface (32) of the support member. A heat transfer member (36) extends between the electrode and the support member and transfers heat from an area of highest temperature buildup on the top surface of the showerhead electrode to the bottom surface of the support member in order to control the temperature distribution across the showerhead electrode.

Abstract translation: 用于等离子体反应室的部件包括诸如温度控制的支撑构件（22）的散热器和诸如电动喷头电极（20）的加热构件。 淋浴头电极周边地固定到支撑构件以将气体分配室封闭在电极的顶表面（30）和支撑构件的底表面（32）之间。 传热构件（36）在电极和支撑构件之间延伸并且将热量从喷淋头电极的顶表面上的最高温度积聚区域传递到支撑构件的底表面，以便控制横跨 喷头电极

公开(公告)号：WO2001001442A1

公开(公告)日：2001-01-04

申请号：PCT/US2000/016786

申请日：2000-06-14

Applicant: LAM RESEARCH CORPORATION ,  HAO, Fangli ,  DHINDSA, Rajinder ,  POURHASHEMI, Javad

Inventor： HAO, Fangli ,  DHINDSA, Rajinder ,  POURHASHEMI, Javad

IPC: H01J37/32

CPC classification number: C23C16/45572 ,  H01J37/3244 ,  H01J37/32522 ,  H01L21/67103

Abstract: A component useful for a plasma reaction chamber includes a heat sink such as a temperature-controlled support member (22) and a heated member such as an electrically powered showerhead electrode (20). The showerhead electrode is peripherally secured to the support member to enclose a gas distribution chamber between a top surface (30) of the electrode and a bottom surface (32) of the support member. A heat transfer member (36) extends between the electrode and the support member and transfers heat from an area of highest temperature buildup on the top surface of the showerhead electrode to the bottom surface of the support member in order to control the temperature distribution across the showerhead electrode.

Abstract translation: 用于等离子体反应室的部件包括诸如温度控制的支撑构件（22）的散热器和诸如电动喷头电极（20）的加热构件。 淋浴头电极周边地固定到支撑构件以将气体分配室封闭在电极的顶表面（30）和支撑构件的底表面（32）之间。 传热构件（36）在电极和支撑构件之间延伸并且将热量从喷淋头电极的顶表面上的最高温度积聚区域传递到支撑构件的底表面，以便控制横跨 喷头电极