公开(公告)号：WO2012164546A3

公开(公告)日：2013-01-24

申请号：PCT/IB2012052806

申请日：2012-06-04

Applicant: ECOLE POLYTECH ,  XIE SHENQI ,  SAVU ANDREEA VERONICA ,  BRUGGER JUERGEN

Inventor： XIE SHENQI ,  SAVU ANDREEA VERONICA ,  BRUGGER JUERGEN

IPC: C23C14/04

CPC classification number: C23C14/042 ,  C23C14/044

Abstract: The invention concerns a method and a device wherein a stencil is provided with an integrated microhotplate on the stencil membrane to prevent aperture clogging, whereby the stencil can be locally heated up in order to minimize material condensation, remove clogging and control the resolution of the deposited material by deforming the membrane towards or away from a substrate.

Abstract translation: 本发明涉及一种方法和装置，其中模板在模板膜上设置有集成的微型板，以防止孔堵塞，由此模板可以被局部加热以最小化材料冷凝，消除堵塞并控制沉积的分辨率 材料通过使膜朝向或远离衬底变形。

公开(公告)号：WO2012164546A2

公开(公告)日：2012-12-06

申请号：PCT/IB2012/052806

申请日：2012-06-04

Applicant: ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL) ,  XIE, Shenqi ,  SAVU, Andreea Veronica ,  BRUGGER, Juergen

Inventor： XIE, Shenqi ,  SAVU, Andreea Veronica ,  BRUGGER, Juergen

IPC: C23C14/04

CPC classification number: C23C14/042 ,  C23C14/044

Abstract: The invention concerns a method and a device wherein a stencil is provided with an integrated microhotplate on the stencil membrane to prevent aperture clogging, whereby the stencil can be locally heated up in order to minimize material condensation, remove clogging and control the resolution of the deposited material by deforming the membrane towards or away from a substrate.

Abstract translation: 本发明涉及一种方法和装置，其中模板在模板膜上设置有集成的微型板，以防止孔堵塞，由此模板可以被局部加热以最小化材料冷凝，消除堵塞并控制沉积的分辨率 材料通过使膜朝向或远离衬底变形。