公开(公告)号：IL312052A

公开(公告)日：2024-06-01

申请号：IL31205224

申请日：2024-04-10

Applicant: CARBON AUTONOMOUS ROBOTIC SYSTEMS INC ,  COCHRANE SIMON ,  PILLMANN RAVEN ,  SERGEEV ALEXANDER IGOREVICH ,  STARK BRIAN PHILLIP

Inventor： COCHRANE SIMON ,  PILLMANN RAVEN ,  SERGEEV ALEXANDER IGOREVICH ,  STARK BRIAN PHILLIP

IPC: G06V10/82 ,  G06V20/10 ,  G06V20/56

Abstract: Disclosed herein are methods, devices, modules, and systems which may be employed to accurately track, and subsequently target, objects of interest relative to a moving body, such as a vehicle. An object tracking method may be implemented by a detection system with a sensor coupled to the moving body. A targeting system may be used to target objects tracked by the detection system, such as for automated crop cultivation or maintenance. Devices disclosed herein may be configured to locate, identify, and autonomously target a weed with a beam, such as a laser beam, which may burn or irradiate the weed. The methods, devices, modules, and systems may be used for agricultural crop management or for at-home weed control.

公开(公告)号：WO2008042603A3

公开(公告)日：2008-04-10

申请号：PCT/US2007/078907

申请日：2007-09-19

Applicant: ROBERT BOSCH GMBH ,  ULM, Markus ,  STARK, Brian ,  METZ, Matthias

Inventor： ULM, Markus ,  STARK, Brian ,  METZ, Matthias

IPC: H01L41/113 ,  H01L41/22 ,  H02N2/18

Abstract: Embodiments of making an energy harvesting device (300) are described. In one embodiment, a case (310, 308, 306) and integrated piezoelectric cantilever (302) to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device The entire assembly can be encapsulated in plastic.

公开(公告)号：WO2008042603A2

公开(公告)日：2008-04-10

申请号：PCT/US2007078907

申请日：2007-09-19

Applicant: BOSCH GMBH ROBERT ,  ULM MARKUS ,  STARK BRIAN ,  METZ MATTHIAS

Inventor： ULM MARKUS ,  STARK BRIAN ,  METZ MATTHIAS

CPC classification number: B60C23/0411 ,  H01L41/1136 ,  H01L41/331 ,  H01L41/43 ,  H02N2/186 ,  H02N2/22 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49007 ,  Y10T29/49172 ,  Y10T29/49176 ,  Y10T29/49224

Abstract: Embodiments of making an energy harvesting device are described. In one embodiment, a case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device The entire assembly can be encapsulated in plastic.

Abstract translation: 描述制造能量收集装置的实施例。 在一个实施例中，通过印刷成型方法注射成型方法产生用于从被感测环境收集振动能量的壳体和集成压电悬臂。 悬臂装置由压电材料构件和与压电构件耦合的高密度材料的检验质量组成。 印刷形成方法用于构建装置的基底和壁以及压电构件的中性层。 印刷金属层以形成压电元件的电极层和器件的电接触部分。 无源元件也可以形成为器件层的一部分整个组件可以被封装在塑料中。

公开(公告)号：WO2007143058A3

公开(公告)日：2007-12-13

申请号：PCT/US2007/012878

申请日：2007-05-31

Applicant: ROBERT BOSCH GMBH ,  LUTZ, Markus ,  PARTRIDGE, Aaron ,  STARK, Brian, H.

Inventor： LUTZ, Markus ,  PARTRIDGE, Aaron ,  STARK, Brian, H.

IPC: H01L21/00

Abstract: Many inventions are disclosed. Some aspects are directed to MEMS, and/or methods for use with and/or for fabricating MEMS, that supply, store, and/or trap charge on a mechanical structure disposed in a chamber. Various structures may be disposed in the chamber and employed in supplying, storing and/or trapping charge on the mechanical structure. In some aspects, a breakable link, a thermionic electron source and/or a movable mechanical structure are employed. The breakable link may comprise a fuse. In one embodiment, the movable mechanical structure is driven to resonate. In some aspects, the electrical charge enables a transducer to convert vibrational energy to electrical energy, which may be used to power circuit(s), device(s) and/or other purpose(s). In some aspects, the electrical charge is employed in changing the resonant frequency of a mechanical structure and/or generating an electrostatic force, which may be repulsive.

公开(公告)号：WO2007143129A3

公开(公告)日：2008-12-31

申请号：PCT/US2007012997

申请日：2007-06-01

Applicant: BOSCH GMBH ROBERT ,  LUTZ MARKUS ,  PARTRIDGE AARON ,  STARK BRIAN H

Inventor： LUTZ MARKUS ,  PARTRIDGE AARON ,  STARK BRIAN H

IPC: H02H3/26

CPC classification number: B81B3/0086 ,  B81B3/0021

Abstract: Many inventions are disclosed. Some aspects are directed to MEMS, and/or methods for use with and/or for fabricating MEMS, that supply, store, and/or trap charge on a mechanical structure disposed in a chamber. Various structures may be disposed in the chamber and employed in supplying, storing and/or trapping charge on the mechanical structure. In some aspects, a breakable link, a thermionic electron source and/or a movable mechanical structure are employed. The breakable link may comprise a fuse. In one embodiment, the movable mechanical structure is driven to resonate. In some aspects, the electrical charge enables a transducer to convert vibrational energy to electrical energy, which may be used to power circuit(s), device(s) and/or other purpose(s). In some aspects, the electrical charge is employed in changing the resonant frequency of a mechanical structure and/or generating an electrostatic force, which may be repulsive.

Abstract translation: 许多发明被公开。 一些方面涉及用于和/或制造MEMS的MEMS，和/或用于在设置在室中的机械结构上提供，存储和/或捕获电荷的方法。 各种结构可以设置在室中并用于在机械结构上供应，储存和/或捕集电荷。 在一些方面，采用易碎连接件，热离子电子源和/或可移动机械结构。 可破坏的连接件可以包括保险丝。 在一个实施例中，可移动机械结构被驱动以共振。 在一些方面，电荷使得换能器将振动能量转换成电能，其可用于为电路，设备和/或其他目的供电。 在一些方面，电荷用于改变机械结构的谐振频率和/或产生可能是排斥性的静电力。

公开(公告)号：WO2008067097A2

公开(公告)日：2008-06-05

申请号：PCT/US2007/082882

申请日：2007-10-29

Applicant: ROBERT BOSCH GMBH ,  METZ, Matthias ,  PAN, Zhiyu ,  STARK, Brian ,  ULM, Markus ,  YAMA, Gary

Inventor： METZ, Matthias ,  PAN, Zhiyu ,  STARK, Brian ,  ULM, Markus ,  YAMA, Gary

IPC: B81C1/00

CPC classification number: B81C1/00301 ,  B81B2207/015 ,  B81B2207/097 ,  B81C2203/0136 ,  B81C2203/0145 ,  H01L21/56 ,  H01L2924/0002 ,  H01L2924/00

Abstract: There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device, having mechanical structures encapsulated in a chamber prior to final packaging. An embodiment further includes location of a piezoelectric material as part of a semiconductor sensing structure. The semiconductor sensing structure, in conjunction with the piezoelectric material, can be used as a sensing device to provide an output signal associated with a sensed event.

Abstract translation: 这里描述和说明了许多发明。 在一个方面，本发明涉及MEMS器件以及制造或制造MEMS器件的技术，其具有在最终封装之前封装在室中的机械结构。 一个实施例还包括作为半导体感测结构的一部分的压电材料的位置。 结合压电材料的半导体感测结构可以用作感测装置以提供与感测到的事件相关联的输出信号。

公开(公告)号：WO2003089368A3

公开(公告)日：2003-10-30

申请号：PCT/US2003/011848

申请日：2003-04-17

Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN ,  NAJAFI, Khalil ,  STARK, Brian, H.

Inventor： NAJAFI, Khalil ,  STARK, Brian, H.

IPC: B81B7/00

Abstract: A low temperature method for forming a microcavity on a substrate and article having same are provided which utilize electroplated films. The method is particularly useful to package microelectromechanical systems (MEMS) in vacuum on the wafer level and provide sealed feedthroughs to the outside world. The method may be performed in a batch process to substantially reduce cost and to form metal diaphragms. Furthermore, the method is performed at near room temperature, which provides more flexibility in the manufacturing process. The method enables substantial cost savings in the production of vacuum-sealed MEMS. Many feedthroughs can be incorporated into the package to transfer signals in and out of the package. One significant advantage of this method is that it does not require bonding of a second substrate, which reduces the system cost.

公开(公告)号：WO2007143129A2

公开(公告)日：2007-12-13

申请号：PCT/US2007/012997

申请日：2007-06-01

Applicant: ROBERT BOSCH GMBH ,  LUTZ, Markus ,  PARTRIDGE, Aaron ,  STARK, Brian, H.

Inventor： LUTZ, Markus ,  PARTRIDGE, Aaron ,  STARK, Brian, H.

IPC: H01L21/00

CPC classification number: B81B3/0086 ,  B81B3/0021

Abstract: Many inventions are disclosed. Some aspects are directed to MEMS, and/or methods for use with and/or for fabricating MEMS, that supply, store, and/or trap charge on a mechanical structure disposed in a chamber. Various structures may be disposed in the chamber and employed in supplying, storing and/or trapping charge on the mechanical structure. In some aspects, a breakable link, a thermionic electron source and/or a movable mechanical structure are employed. The breakable link may comprise a fuse. In one embodiment, the movable mechanical structure is driven to resonate. In some aspects, the electrical charge enables a transducer to convert vibrational energy to electrical energy, which may be used to power circuit(s), device(s) and/or other purpose(s). In some aspects, the electrical charge is employed in changing the resonant frequency of a mechanical structure and/or generating an electrostatic force, which may be repulsive.

Abstract translation: 许多发明被公开。 一些方面涉及用于和/或制造MEMS的MEMS，和/或用于在设置在室中的机械结构上提供，存储和/或捕获电荷的方法。 各种结构可以设置在室中并用于在机械结构上供应，储存和/或捕集电荷。 在一些方面，采用易碎连接件，热离子电子源和/或可移动机械结构。 可破坏的连接件可以包括保险丝。 在一个实施例中，可移动机械结构被驱动以共振。 在一些方面，电荷使得换能器将振动能转换成电能，其可用于为电路，设备和/或其他目的供电。 在一些方面，电荷用于改变机械结构的谐振频率和/或产生可能是排斥性的静电力。

公开(公告)号：WO2007143058A2

公开(公告)日：2007-12-13

申请号：PCT/US2007012878

申请日：2007-05-31

Applicant: BOSCH GMBH ROBERT ,  LUTZ MARKUS ,  PARTRIDGE AARON ,  STARK BRIAN H

Inventor： LUTZ MARKUS ,  PARTRIDGE AARON ,  STARK BRIAN H

IPC: H01L21/00

CPC classification number: H01H85/04 ,  B81B3/0021 ,  B81B3/0086

Abstract: Many inventions are disclosed. Some aspects are directed to MEMS, and/or methods for use with and/or for fabricating MEMS, that supply, store, and/or trap charge on a mechanical structure disposed in a chamber. Various structures may be disposed in the chamber and employed in supplying, storing and/or trapping charge on the mechanical structure. In some aspects, a breakable link, a thermionic electron source and/or a movable mechanical structure are employed. The breakable link may comprise a fuse. In one embodiment, the movable mechanical structure is driven to resonate. In some aspects, the electrical charge enables a transducer to convert vibrational energy to electrical energy, which may be used to power circuit(s), device(s) and/or other purpose(s). In some aspects, the electrical charge is employed in changing the resonant frequency of a mechanical structure and/or generating an electrostatic force, which may be repulsive.

Abstract translation: 许多发明被公开。 一些方面涉及用于和/或制造MEMS的MEMS，和/或用于在设置在室中的机械结构上提供，存储和/或捕获电荷的方法。 各种结构可以设置在室中并用于在机械结构上供应，储存和/或捕集电荷。 在一些方面，采用易碎连接件，热离子电子源和/或可移动机械结构。 可破坏的连接件可以包括保险丝。 在一个实施例中，可移动机械结构被驱动以共振。 在一些方面，电荷使得换能器将振动能量转换成电能，其可用于为电路，设备和/或其他目的供电。 在一些方面，电荷用于改变机械结构的谐振频率和/或产生可能是排斥性的静电力。

公开(公告)号：WO2006115592A8

公开(公告)日：2007-11-01

申请号：PCT/US2006008600

申请日：2006-03-10

Applicant: BOSCH GMBH ROBERT ,  ULM MARKUS ,  METZ MATTHIAS ,  STARK BRIAN ,  YAMA GARY ,  LUTZ MARKUS ,  PARTRIDGE AARON ,  FREY WILHELM

Inventor： ULM MARKUS ,  METZ MATTHIAS ,  STARK BRIAN ,  YAMA GARY ,  LUTZ MARKUS ,  PARTRIDGE AARON ,  FREY WILHELM

IPC: B81C1/00

CPC classification number: B81C1/0096 ,  B81B3/0005 ,  B81C2201/112 ,  B82Y30/00 ,  H01L2224/13 ,  H01L2924/1461 ,  H01L2924/00

Abstract: A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.

Abstract translation: 机械结构设置在室中，其至少一部分由封装结构限定。 第一种方法提供了一种通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。 第二种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一部分，以密封抗静脉通道。 该至少一个部分与机电装置分开制造，然后固定在机电装置上。 第三种方法提供了通道盖，其具有至少部分地设置在抗静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。 所述至少一个部分可以包括线球，螺柱，金属箔或焊料预制件。 一种器件包括衬底，封装结构和机械结构。 抗静电层设置在机械结构的至少一部分上。 在基板和封装结构中的至少一个中形成抗静电通道。 至少部分地，盖具有至少一个预制件部分设置在防静电通道的上方或其至少一部分中，以密封抗静电通道。