MEMS MEMBRANE WITH INTEGRAL MIRROR/LENS
    1.
    发明申请
    MEMS MEMBRANE WITH INTEGRAL MIRROR/LENS 审中-公开
    具有整体镜/镜片的MEMS膜

    公开(公告)号:WO2002073285A2

    公开(公告)日:2002-09-19

    申请号:PCT/US2002/007589

    申请日:2002-03-11

    Abstract: An optical membrane device (110) and method for making such a device (110) are described. This membrane is notable in that it comprises an optically curved surface (250). In some embodiments, this curved optical surface (250) is optically concave and coated, for example, with a highly reflecting (HR) coating to create a curved mirror. In other embodiments, the optical surface is optically convex and coated with, preferably, an antireflective (AR) coating to function as a refractive or diffractive lens.

    Abstract translation: 描述了一种用于制造这种装置(110)的光学膜装置(110)和方法。 该膜是值得注意的,因为它包括光学曲面(250)。 在一些实施例中,该弯曲光学表面(250)是光学凹入的并且例如涂覆有高反射(HR)涂层以形成弯曲镜。 在其它实施例中,光学表面是光学凸起的并且涂覆有优选抗反射(AR)涂层,用作折射或衍射透镜。

    OPTICAL TRAIN ALIGNMENT PROCESS UTILIZING METROLOGY AND PLASTIC DEFORMATION
    2.
    发明申请
    OPTICAL TRAIN ALIGNMENT PROCESS UTILIZING METROLOGY AND PLASTIC DEFORMATION 审中-公开
    光学对准方法利用计量学和塑性变形

    公开(公告)号:WO2002065178A2

    公开(公告)日:2002-08-22

    申请号:PCT/US2002/001184

    申请日:2002-01-14

    Abstract: A micro-optical train manufacturing process includes a step of characterizing the position of optical components (114) on an optical bench (130), typically using a metrology system. These optical components (114) are then aligned with respect to each other in a passive alignment step (250) based on data from the metrology system and optical system design information. As a result, a subsequent active align process (260) can be avoided in some situations, or if a subsequent active alignment process (260) is performed, the time required for that active alignment process (260) can be reduced because of this initial metrology-based passive alignment step (250).

    Abstract translation: 微型光学系统制造方法包括通常使用计量系统来表征光学平台(130)上的光学部件(114)的位置的步骤。 基于来自计量系统和光学系统设计信息的数据,这些光学部件(114)然后在无源对准步骤(250)中相对于彼此对齐。 结果,在一些情况下可以避免随后的主动对准过程(260),或者如果执行后续的主动对准过程(260),那么由于该初始化可以减少该主动对准过程(260)所需的时间 基于计量的被动对准步骤(250)。

    OPTICAL TRAIN ALIGNMENT PROCESS UTILIZING METROLOGY AND PLASTIC DEFORMATION
    3.
    发明申请
    OPTICAL TRAIN ALIGNMENT PROCESS UTILIZING METROLOGY AND PLASTIC DEFORMATION 审中-公开
    光学对准方法利用计量学和塑性变形

    公开(公告)号:WO02065178A3

    公开(公告)日:2003-03-20

    申请号:PCT/US0201184

    申请日:2002-01-14

    Abstract: A micro-optical train manufacturing process includes a step of characterizing the position of optical components (114) on an optical bench (130), typically using a metrology system. These optical components (114) are then aligned with respect to each other in a passive alignment step (250) based on data from the metrology system and optical system design information. As a result, a subsequent active align process (260) can be avoided in some situations, or if a subsequent active alignment process (260) is performed, the time required for that active alignment process (260) can be reduced because of this initial metrology-based passive alignment step (250).

    Abstract translation: 微型光学系统制造方法包括通常使用计量系统来表征光学平台(130)上的光学部件(114)的位置的步骤。 基于来自计量系统和光学系统设计信息的数据,这些光学部件(114)然后在被动对准步骤(250)中相对于彼此对准。 结果,在一些情况下可以避免随后的主动对准过程(260),或者如果执行后续的主动对准过程(260),那么由于该初始化可以减少该主动对准过程(260)所需的时间 基于计量的被动对准步骤(250)。

Patent Agency Ranking