公开(公告)号：WO2011103461A1

公开(公告)日：2011-08-25

申请号：PCT/US2011/025476

申请日：2011-02-18

Applicant: CASCADE MICROTECH, INC. ,  NEGISHI, Kazuki ,  SIMMONS, Michael ,  STORM, Christofer ,  SWE, Toenaing

Inventor： NEGISHI, Kazuki ,  SIMMONS, Michael ,  STORM, Christofer ,  SWE, Toenaing

IPC: G01R31/20

CPC classification number: G01R31/2889 ,  H01R13/6597 ,  H01R24/562 ,  H01R2201/20

Abstract: An adapter conductively interconects a chuck of a probe station and an instrument. The adapter includes a signal conductor conductively connected to the chuck and selectively connectable to a respective one of a ground potential, a bayonet connector output and a signal connection for the instrument. A guard potential conductor conductively connected to the chuck and selectively connectable to a one of a ground potential and a guard connection for the instrument; and a shield conductor connected to a ground potential.

Abstract translation: 适配器导电地相互连接探针台和仪器的卡盘。 适配器包括导体连接到卡盘并且可选地可连接到地面电位，卡口连接器输出和仪器的信号连接中的相应一个的信号导体。 导电连接到卡盘并且可选择地连接到仪器的接地电位和保护连接中的一个的保护电位导体; 以及连接到地电位的屏蔽导体。