公开(公告)号：WO2011057201A3

公开(公告)日：2011-08-18

申请号：PCT/US2010055852

申请日：2010-11-08

Applicant: BROOKS AUTOMATION INC ,  BRUCKER GERARDO A ,  VAN ANTWERP KENNETH D JR

Inventor： BRUCKER GERARDO A ,  VAN ANTWERP KENNETH D JR

IPC: G01L21/00 ,  G01J3/28 ,  G01N21/25 ,  H01L21/66

CPC classification number: G01M3/226 ,  G01M3/205 ,  G01M3/229 ,  G01M3/34

Abstract: A gas analyzer for a vacuum chamber includes processing electronics configured to receive mass spectral data, receive input of total pressure in the vacuum chamber, receive external input from at least one sensor, and employ the mass spectral data, the total pressure in the vacuum chamber, and the external input from the at least one sensor to calculate a vacuum quality index based on at least one criteria of quality.

Abstract translation: 用于真空腔室的气体分析器包括处理电子器件，其被配置为接收质谱数据，接收真空腔室中的总压力的输入，接收来自至少一个传感器的外部输入，并且使用质谱数据，真空腔室中的总压力 以及来自所述至少一个传感器的外部输入，以基于至少一个质量标准来计算真空质量指数。

公开(公告)号：WO2011057201A2

公开(公告)日：2011-05-12

申请号：PCT/US2010/055852

申请日：2010-11-08

Applicant: BROOKS AUTOMATION, INC. ,  BRUCKER, Gerardo, A. ,  VAN ANTWERP, Kenneth, D., Jr.

Inventor： BRUCKER, Gerardo, A. ,  VAN ANTWERP, Kenneth, D., Jr.

IPC: G01L21/00 ,  G01J3/28 ,  G01N21/25 ,  H01L21/66

CPC classification number: G01M3/226 ,  G01M3/205 ,  G01M3/229 ,  G01M3/34

Abstract: A gas analyzer for a vacuum chamber includes processing electronics configured to receive mass spectral data, receive input of total pressure in the vacuum chamber, receive external input from at least one sensor, and employ the mass spectral data, the total pressure in the vacuum chamber, and the external input from the at least one sensor to calculate a vacuum quality index based on at least one criteria of quality.

Abstract translation: 用于真空室的气体分析器包括处理电子器件，其被配置为接收质谱数据，接收真空室中的总压力的输入，从至少一个传感器接收外部输入，并使用质谱数据，真空室中的总压力 以及来自至少一个传感器的外部输入，以基于至少一个质量标准来计算真空质量指数。