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    PHOTOACOUSTIC TRANSDUCER
    1.
    发明申请
    PHOTOACOUSTIC TRANSDUCER 有权

    公开(公告)号：US20220276149A1

    公开(公告)日：2022-09-01

    申请号：US17310242

    申请日：2020-01-27

    Applicant: UNIVERSITEIT GENT ,  IMEC VZW ,  VMICRO SAS ,  CNRS ,  ISEN YNCRÉA HAUTS-DE-FRANCE ,  UNIVERSITÉ DE LILLE ,  ECOLE CENTRALE DE LILLE ,  UNIVERSITÉ POLYTECHNIQUE HAUTS-DE-FRANCE

    Inventor： Bart KUYKEN ,  Mathias VANWOLLEGHEM ,  Mattias VERSTUYFT ,  Benjamin WALTER ,  Jean-Francois LAMPIN

    IPC: G01N21/17

    Abstract: An integrated photoacoustic transducer, sensing system and method for assisting in sensing a concentration of a species in a fluid such that the integrated photoacoustic transducer includes a waveguide structure. The waveguide structure has an optical resonance spectrally overlapping a spectral absorption line or band of the species. The photoacoustic transducer includes at least one acoustic cavity formed in a portion of the waveguide structure and configured for receiving the fluid for sensing comprising the species. The at least one acoustic cavity has an acoustic resonance spectrally overlapping with a harmonic of a modulation frequency. At least one acoustic transducer comprising a deformable mechanical portion is included in the photoacoustic transducer. The deformable mechanical portion is in direct acoustic communication with the at least one acoustic cavity and has an adjustable mechanical resonance, which can be brought into spectral overlap with an acoustic resonance of the least one acoustic cavity.

    PHOTOACOUSTIC TRANSDUCER
    2.
    发明申请
    PHOTOACOUSTIC TRANSDUCER 审中-公开

    公开(公告)号：WO2020157022A1

    公开(公告)日：2020-08-06

    申请号：PCT/EP2020/051960

    申请日：2020-01-27

    Applicant: UNIVERSITEIT GENT ,  IMEC VZW ,  VMICRO SAS ,  CNRS ,  ISEN YNCRÉA HAUTS-DE-FRANCE ,  UNIVERSITÉ DE LILLE ,  ECOLE CENTRALE DE LILLE ,  UNIVERSITÉ POLYTECHNIQUE HAUTS-DE-FRANCE

    Inventor： KUYKEN, Bart ,  VANWOLLEGHEM, Mathias ,  VERSTUYFT, Mattias ,  WALTER, Benjamin ,  LAMPIN, Jean-François

    IPC: G01N21/17

    Abstract: An integrated photoacoustic transducer, sensing system and method for assisting in sensing a concentration of a species (108) in a fluid are disclosed. The integrated photoacoustic transducer comprises a waveguide structure (101) which is configured as an optical resonator for enhancing a modulated radiation signal. The waveguide structure (101) has an optical resonance which is spectrally overlapping a spectral absorption line or band of the species. The photoacoustic transducer further comprises at least one acoustic cavity (104) formed in a portion of the waveguide structure (101) and configured for receiving the fluid for sensing comprising the species. The at least one acoustic cavity (104) has an acoustic resonance which is spectrally overlapping with a harmonic of a modulation frequency. At least one acoustic transducer comprising a deformable mechanical portion (205) is also included in the photoacoustic transducer. The deformable mechanical portion (205) is in direct acoustic communication with the at least one acoustic cavity (104) and has an adjustable mechanical resonance, which can be brought into spectral overlap with an acoustic resonance of the least one acoustic cavity (104).

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