COMPOSITE METAL LAYER FORMED USING METAL NANOCRYSTALLINE PARTICLES IN AN ELECTROPLATING BATH
    1.
    发明申请
    COMPOSITE METAL LAYER FORMED USING METAL NANOCRYSTALLINE PARTICLES IN AN ELECTROPLATING BATH 审中-公开
    使用金属纳米颗粒在电镀浴中形成的复合金属层

    公开(公告)号:WO2007002956A1

    公开(公告)日:2007-01-04

    申请号:PCT/US2006/026217

    申请日:2006-06-28

    Abstract: A method for forming a composite metal layer on a substrate comprises providing nanocrystalline particles of a first metal, adding the nanocrystalline particles to a plating bath that contains ions of a second metal to form a colloid-like suspension, immersing the substrate in the plating bath, and causing a co-deposition of the second metal and the nanocrystalline particles of the first metal on the substrate to form the composite metal layer. The co-deposition may be caused by inducing a negative bias on the substrate and applying an electric current to the plating bath to induce an electroplating process. In the electroplating process, the ions of the second metal are reduced by the substrate and become co-deposited on the substrate with the nanocrystalline particles of the first metal to form the composite metal layer.

    Abstract translation: 在基板上形成复合金属层的方法包括提供第一金属的纳米晶体颗粒,将纳米晶体颗粒添加到含有第二金属离子的镀液中以形成胶体样悬浮液,将基板浸入镀浴 并且使第一金属的第二金属和纳米晶体颗粒在基底上共沉淀形成复合金属层。 可以通过在衬底上引起负偏压并将电流施加到电镀槽以引起电镀工艺来引起共沉积。 在电镀工艺中,第二金属的离子被衬底还原,并与第一金属的纳米晶体颗粒共同沉积在衬底上以形成复合金属层。

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