公开(公告)号：KR102032403B1

公开(公告)日：2019-10-15

申请号：KR1020170075953

申请日：2017-06-15

Applicant: (주)에스아이엔지니어링 ,  한국산업기술대학교산학협력단

Inventor： 임윤수 ,  김창규

IPC: H01L21/68 ,  H01L21/67 ,  H01L21/683 ,  H01L21/677 ,  H01L21/66

公开(公告)号：KR100817297B1

公开(公告)日：2008-03-27

申请号：KR1020070039344

申请日：2007-04-23

Applicant: (주)에스아이엔지니어링

Inventor： 임윤수

IPC: H01L21/02 ,  H01L21/66

Abstract: A level detecting apparatus using a multi sensor for a differential pressure is provided to avoid an erroneous detection caused by a fluid flow or impurities by measuring the measurement pressure of a chemical solution in a sealed bath or tank and a variation pressure of the inside of a bath or tank in a semiconductor or LCD(liquid crystal display) production process. A first sensor(70) is connected to a solution level detecting tube on the bottom of a sealed tank(10) containing a chemical solution, detecting a pressure variation value proportional to a solution level of a small amount of nitrogen gas supplied through the tube. A second sensor(80) detects a varied pressure value of the tank by external influence. A level detecting unit(90) stores data that the chemical solution in the tank is converted by a program according to its level and compares differentially amplified data with the converted data to detect the level of the chemical solution in the tank wherein the differentially amplified data is obtained by differentially amplifying a difference between a pressure variation value proportional to the solution level detected by the first sensor and a variation pressure value of the tank varied by the external influence detected by the second sensor. A remote panel(100) displays an alarm signal when the level detection value of the chemical solution exceeds a control condition. A network computer(110) monitors the operation process of the level detecting unit.

Abstract translation: 提供使用用于差压的多传感器的电平检测装置，以通过测量密封的浴槽中的化学溶液的测量压力和内部的变化压力来避免由流体流动或杂质引起的错误检测 浴缸或水箱在半导体或LCD（液晶显示器）的生产过程中。 第一传感器（70）连接到包含化学溶液的密封罐（10）的底部的溶液液位检测管，检测与通过管供给的少量氮气的溶液液位成比例的压力变化值 。 第二传感器（80）通过外部影响检测罐的变化的压力值。 电平检测单元（90）存储根据其电平通过程序转换容器中的化学溶液的数据，并将差分放大的数据与转换的数据进行比较，以检测罐中的化学溶液的水平，其中差分放大数据 通过差分放大由与第一传感器检测到的溶液液面成比例的压力变化值与由第二传感器检测到的外部影响而变化的罐的变化压力值之间的差异。 当化学溶液的电平检测值超过控制条件时，远程面板（100）显示报警信号。 网络计算机（110）监视电平检测单元的操作处理。