公开(公告)号：KR1020100119268A

公开(公告)日：2010-11-09

申请号：KR1020090038294

申请日：2009-04-30

Applicant: 강릉원주대학교산학협력단

Inventor： 김세훈 ,  최재철 ,  김태경 ,  강석용 ,  유인상 ,  박병석

IPC: H01L41/318 ,  H01L41/37 ,  C04B35/495

CPC classification number: H01L41/318 ,  C04B35/495 ,  H01L41/1873 ,  H01L41/43

Abstract: PURPOSE: A manufacturing method is provided to decrease the film crystallization temperature of a deposited film than a normal film and to improve crystallizability. CONSTITUTION: A sol is manufactured based on composition to achieve Nb : K : Na = 1.0 : 0.5 : 0.5. A fullerene system C60 is melted into a solvent in order to add a low temperature sintering material to the sol. A thin film is formed by spin-coating the sol to the substrate and thermally processing it. The sintering material is melted in order to be a homogeneous mixing phase with a KNN system sol.

Abstract translation: 目的：提供一种降低沉积膜的膜结晶温度而不是普通膜的制造方法，提高结晶性。 构成：基于成分制造溶胶，以实现Nb:K:Na = 1.0:0.5:0.5。 将富勒烯系统C60熔化成溶剂，以向溶胶中加入低温烧结材料。 通过将溶胶旋涂到基底上并对其进行热处理来形成薄膜。 将烧结材料熔化，以便与KNN系统溶胶均匀混合。