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公开(公告)号：KR1020090112348A
公开(公告)日：2009-10-28
申请号：KR1020080038183
申请日：2008-04-24
Applicant: 광운대학교 산학협력단
CPC classification number: H02N2/183 , H01L41/0536 , H01L41/1136
Abstract: PURPOSE: A piezoelectric micro power generator and its manufacturing method are provided to solve the power problem through the electric power generating element. CONSTITUTION: The cantilever(11) generates the electric charge by the external force. The electrode(12) is formed in the cantilever and the generated electric charge is collected. The weight plumb(13) drops the resonant frequency of a cantilever. The piezoelectric thin film is organized by the piezoelectric. The weight plumb is formed in the cantilever end to maximize the deformation of a cantilever by the external force. The oxide film or the metal layer is evaporated on the elastic thin film. The piezoelectric thin film is evaporated on the formed oxide film or the metal layer.
Abstract translation: 目的：提供一种压电微型发电机及其制造方法，通过发电元件解决电力问题。 构成：悬臂（11）通过外力产生电荷。 电极（12）形成在悬臂中，并且产生的电荷被收集。 重锤（13）降低了悬臂的共振频率。 压电薄膜由压电体构成。 重锤在悬臂端形成，以通过外力最大化悬臂的变形。 氧化膜或金属层在弹性薄膜上蒸发。 压电薄膜在形成的氧化膜或金属层上蒸发。
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公开(公告)号：KR101016807B1
公开(公告)日：2011-02-25
申请号：KR1020080038181
申请日：2008-04-24
Applicant: 광운대학교 산학협력단
Abstract: 자기 발전기의 구조 개선 및 그 제조 방법에 관한 것이다. 본 발명의 자가 발전기는, 외력에 의해 전하를 발생시키며, 일체로 연결되되 나선형 구조를 갖도록 원형 배열된 다수의 외팔보들; 및 상기 각각의 외팔보에 형성되며, 상기 발생된 전하를 수집하는 전극;을 포함하는데, 개선된 구조를 통해 외력에 의한 발전 효율을 극대화할 수 있다.
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公开(公告)号：KR1020090112346A
公开(公告)日：2009-10-28
申请号：KR1020080038181
申请日：2008-04-24
Applicant: 광운대학교 산학협력단
CPC classification number: H02N11/002 , H01L41/113 , H02N2/18 , Y10S310/80
Abstract: PURPOSE: An Improved structural self micro-generator and its fabrication method are provided to maximize the amount of the electric power output per area by forming spiral array of a cantilever. CONSTITUTION: The first layer is a substrate(100) and the second layer is elastic thin film(200). The substrate is silicon. The elastic thin film becomes the silicon nitride film(Si3N4) or the silicon oxide layer(SiO2). The third layer is the piezoelectric thin film(300). The fourth layer is the electrode(410). The piezoelectric thin film is made of the piezo-electric materials like a piezoelectric. The electrode is made of platinum(Pt). The electrode layer is formed in the surface of the piezoelectric thin film.
Abstract translation: 目的：提出一种改进的结构自发电机及其制造方法，通过形成悬臂的螺旋阵列，最大化每个区域的电力输出量。 构成：第一层为基材（100），第二层为弹性薄膜（200）。 衬底是硅。 弹性薄膜成为氮化硅膜（Si 3 N 4）或氧化硅层（SiO 2）。 第三层是压电薄膜（300）。 第四层是电极（410）。 压电薄膜由压电材料制成，如压电薄膜。 电极由铂（Pt）制成。 电极层形成在压电薄膜的表面。
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