公开(公告)号：KR101046828B1

公开(公告)日：2011-07-06

申请号：KR1020080101252

申请日：2008-10-15

Applicant: 국민대학교산학협력단

Inventor： 임홍재 ,  신동훈 ,  김우송 ,  박경서

IPC: H01L21/027 ,  B82Y40/00

Abstract: 온도제어 기능을 가진 UV 나노 임프린트 리소그래피를 수행하는 장치 및 온도제어방법을 제공한다. 상기 UV 나노 임프린트 리소그래피를 수행하는 장치는 로딩 플레이트의 온도를 측정을 위한 써머커플 및 온도증감을 위한 히팅라인이 설치된 항온 플레이트; 유리기판에 도포된 레진 상부에 놓여지는 몰드에 압력을 가하는 방향으로 이동되며, 로딩 플레이트에 놓여진 유리기판에 자외선을 조사하는 UV 램프를 내장하는 가압부와, 자외선 투과가능한 투명한 재질로서 가압부 하부에 설치되며 패턴 형성을 위한 몰드의 온도감지를 위해 써머커플을 장착한 탄성패드로 이루어진 가압유닛; 도어를 통해 개방이 가능한 수용공간을 가져, 상기 로딩 플레이트, 항온 플레이트, 가압유닛을 수용하는 챔버; 챔버의 내부온도를 측정하기 위해 챔버 내에 설치되는 온도센서; 챔버 외부에 설치되며, 상기 챔버 내부의 공기를 순환시켜 챔버의 내부온도가 일정하게 유지되도록 하는 외부공조기; 및 상기 항온 플레이트와 가압유닛에 각각 설치된 써머커플 및 상기 온도센서를 통해 측정된 온도데이타를 근거로 상기 항온 플레이트의 온도조절 및 외부공조기의 작동을 제어하는 제어반;을 포함하여 구성됨을 요지로 한다.
UV 나노 임프린트, 몰드, 유리기판, 온도제어

Abstract translation: 提供了一种用于执行具有温度控制功能的UV纳米压印光刻的设备和温度控制方法。 用于进行UV纳米压印光刻的热板设备被安装，用于热电偶的加热线路，和温度梯度，用于测量所述装载板的温度; 被移动到将压力施加到模具被放置在树脂顶涂层到玻璃基板上的方向，作为按压部，和UV透射的透明材料能够按压部低的内置UV灯照射紫外线，以放置在所述装载板中的玻璃基板 一种压力单元，其包括安装有用于图案形成的模具的温度感测的热电偶的弹性垫; 腔室，用于接收装载板，恒温板和加压单元，腔室具有可通过门打开的容纳空间; 安装在腔室内的温度传感器，用于测量腔室的内部温度; 外部空调器安装在室外并使室内的空气循环，使室内的温度保持恒定; 控制面板控制恒温板的温度和基于安装在恒温板和加压单元中的热电偶以及通过温度传感器测量的温度数据的外部空调器的操作。

公开(公告)号：KR1020100042114A

公开(公告)日：2010-04-23

申请号：KR1020080101252

申请日：2008-10-15

Applicant: 국민대학교산학협력단

Inventor： 임홍재 ,  신동훈 ,  김우송 ,  박경서

IPC: H01L21/027 ,  B82Y40/00

CPC classification number: G03F7/0002 ,  B81C1/0046 ,  B82Y10/00 ,  B82Y40/00 ,  H01L21/67248 ,  Y10S977/887

Abstract: PURPOSE: A UV nano implant lithography device with a temperature control function and a temperature control method are provided to improve accuracy of a pattern by minimizing thermal expansion difference between a mold and a substrate due to heating of a polymer resin. CONSTITUTION: A thermocouple and a heating line are installed on a thermostat plate. A chamber(4) receives a loading plate, a thermostat plate, and a pressure unit in a receiving space which is opened through a door. A temperature sensor(5) is installed inside the chamber to measure an inner temperature of the chamber. An external air handing unit constantly maintains the inner temperature of the chamber by circulating the air inside a chamber. A control board controls the operation of the external air handing unit and controls the temperature of the thermostat plate based on temperature data measured by a thermo couple and a temperature sensor.

Abstract translation: 目的：提供一种具有温度控制功能和温度控制方法的紫外线纳米植入式光刻设备，通过使聚合物树脂的加热使模具和基板之间的热膨胀差最小化来提高图案的精度。 构成：热电偶和加热线安装在恒温盘上。 腔室（4）在通过门打开的接收空间中容纳加载板，恒温器板和压力单元。 温度传感器（5）安装在室内，以测量室的内部温度。 外部空气处理单元通过使室内的空气循环来恒定地维持室的内部温度。 控制板控制外部空气处理单元的操作，并根据由热电偶和温度传感器测量的温度数据来控制恒温板的温度。

公开(公告)号：KR1020100042113A

公开(公告)日：2010-04-23

申请号：KR1020080101251

申请日：2008-10-15

Applicant: 국민대학교산학협력단

Inventor： 임홍재 ,  신동훈 ,  김우송 ,  박경서

IPC: H01L21/683 ,  H01L21/687 ,  H01L21/027 ,  B82Y40/00

CPC classification number: G03F7/0002 ,  B25B11/005 ,  B81C1/0046 ,  B82Y10/00 ,  B82Y40/00 ,  H01L21/6838 ,  Y10S977/887

Abstract: PURPOSE: A substrate alignment stage for a UV nano imprint device is provided to minimize the change of a substrate by uniformly distributing an adsorption nozzle along the edge of an alignment stage when fixing the substrate on an adsorption plate. CONSTITUTION: An adsorption plate(10) has a flat upper side in which a substrate is received. A vacuum hole(12) is formed on the upper side of the adsorption plate and is connected to a vacuum exhaust pipe through a vacuum path formed inside the absorption plate. An adsorption nozzle(14) is recessed on the upper side of the adsorption plate from the vacuum hole exposed to the upper side of the adsorption plate and forms vacuum pressure for vacuum adsorption of the substrate between the substrate received in the adsorption plate and the adsorption plate.

Abstract translation: 目的：提供一种用于UV纳米压印装置的衬底对准阶段，用于通过在将衬底固定在吸附板上时沿着取向台的边缘均匀地分布吸附喷嘴来最小化衬底的变化。 构成：吸附板（10）具有平坦的上侧，接收基板。 在吸附板的上侧形成有真空孔（12），并且通过形成在吸收板内的真空路径与真空排气管连接。 吸附喷嘴（14）从暴露于吸附板的上侧的真空孔凹入吸附板的上侧，并且形成用于真空吸附吸附板上的基板和吸附板之间的基板的真空压力 盘子。

公开(公告)号：KR100856559B1

公开(公告)日：2008-09-04

申请号：KR1020070095832

申请日：2007-09-20

Applicant: 국민대학교산학협력단

Inventor： 신동훈 ,  박경서 ,  임홍재

IPC: H01L21/027 ,  G03F7/20 ,  B82Y40/00

CPC classification number: G03F7/0002 ,  B82Y40/00 ,  G03F7/70858 ,  H01L21/67248 ,  Y10S977/887

Abstract: A temperature controller of a nano imprint apparatus and a nano imprint apparatus including the same are provided to reduce a manufacturing cost of the nano imprint apparatus by controlling arbitrarily and freely an installation position. A heat exchange pin(100) is composed of a heat-conducting material and includes a plurality of air flow paths. A first thermoelectric module(200) is coupled with the one side of the heat exchange pin in order to connect a heat-absorbing reaction part. A second thermoelectric module(300) is coupled with the heat exchange pin in order to connect a heat-radiating reaction part with the other side of the heat exchange pin. An air suction tube(400) is used for forming an air suction path from the inside of the chamber to the air flow path of the heat exchange pin. An air discharge tube(500) is used for forming an air returning path to the inside of the chamber through the heat exchange pin. A temperature sensor(600) senses the temperature of the air through the air suction tube or the air discharge tube. A temperature control unit(700) compares the temperature received from the temperature sensor with the reference temperature and supplies selectively the power to the first and second thermoelectric modules.

Abstract translation: 提供纳米压印装置的温度控制器和包括该温度控制器的纳米压印装置，以通过任意且自由地控制安装位置来降低纳米压印装置的制造成本。 热交换销（100）由导热材料构成，并且包括多个空气流路。 第一热电模块（200）与热交换销的一侧耦合以连接吸热反应部分。 第二热电模块（300）与热交换销耦合以便将热辐射反应部分与热交换销的另一侧连接。 空气吸引管400用于形成从室内到热交换销的空气流路的空气吸入路径。 空气排出管（500）用于通过热交换销形成到室内的空气返回路径。 温度传感器（600）通过吸气管或排气管感测空气的温度。 温度控制单元（700）将从温度传感器接收的温度与参考温度进行比较，并且选择性地向第一和第二热电模块供电。