公开(公告)号：KR101025316B1

公开(公告)日：2011-03-31

申请号：KR1020100049851

申请日：2010-05-27

Applicant: 국민대학교산학협력단

Inventor： 장시열 ,  이기태

IPC: B29C59/02 ,  B29C35/08

CPC classification number: B29C59/022 ,  B29C35/0805 ,  B29C59/002 ,  B29C59/16 ,  B29C2035/0827

Abstract: PURPOSE: An imprinting apparatus is provided to ensure the optimum process condition by selecting the material and method of the pressing unit according to the material of resin and a mold or the size of a substrate. CONSTITUTION: An imprinting apparatus(10) comprises a lower chamber(100), an upper chamber(200), a pressing unit, and a vacuum pump. The lower chamber comprises a UV(Ultraviolet) lamp(110) which irradiates light to photo-curable resin(2) to be cured and quartz glass(120) which supports a substrate on which the photo-curable resin is set. The upper chamber includes side walls(210) and a top surface(220) for forming a space(230) and is arranged on the top of the lower chamber to seal the space. The pressing unit is detachably arranged on the upper chamber by tightly contacting the side walls and lowered by hydraulic pressure to press a mold(3) against the substrate. The vacuum pump evacuates the space or supplies hydraulic pressure to the space.

Abstract translation: 目的：提供一种压印装置，通过根据树脂和模具的材料或基板的尺寸选择压制单元的材料和方法来确保最佳工艺条件。 构成：压印装置（10）包括下腔室（100），上腔室（200），按压单元和真空泵。 下室包括将光照射到待固化的光固化树脂（2）上的UV（紫外）灯（110）和支撑设置有光固化树脂的基板的石英玻璃（120）。 上室包括侧壁（210）和用于形成空间（230）的顶表面（220），并设置在下室的顶部以密封空间。 按压单元通过紧紧接触侧壁并通过液压降低而可拆卸地布置在上室上，以将模具（3）压靠在基板上。 真空泵排空空间或向该空间供应液压。