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公开(公告)号：KR102123592B1
公开(公告)日：2020-06-16
申请号：KR1020180121076
申请日：2018-10-11
Applicant: 국방과학연구소
IPC: H01L29/778 , H01L29/66 , H01L29/45 , H01L21/3065 , H01L21/306 , H01L21/324
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