公开(公告)号：KR1020080105193A

公开(公告)日：2008-12-04

申请号：KR1020070052426

申请日：2007-05-30

Applicant: 박종수

Inventor： 박종수 ,  임채근 ,  허웅

IPC: B05D1/04 ,  B05B1/02

Abstract: A method and a system for thin film coating are provided to uniformly coat the whole substrate with a thin film finally by using electrohydrodynamic phenomenon. A thin film coating system comprises: a solution feeding part(100) quantitatively feeding a coating solution; a high voltage providing part electrically charging the coating solution such that the coating solution is discharged in the form of continuous micro-wires relative to a substrate; a nozzle part(105) integrally arranged to a high density such that the electrically charged linear coating solutions are reciprocally united to coat the entire substrate uniformly; a pre-treatment part(112) formed in front of the nozzle part to perform pro-electric charge treatment relative to the substrate before discharging the electrically charged coating solution; and a heat-treatment unit(116) formed in rear of the nozzle part to heat and cure the coated substrate. The solution feeding part includes a storage tank(101) storing the costing solution, and a transfer pump(102) connected to the storage tank to pump a fixed quantity of the coating solution toward the nozzle part.

Abstract translation: 提供一种用于薄膜涂覆的方法和系统，以最终通过使用电流动力学现象以薄膜均匀地涂覆整个基底。 薄膜涂布系统包括：定量供给涂布溶液的溶液进料部分（100）; 高电压提供部分对所述涂布溶液进行充电，使得所述涂布溶液以相对于基底的连续微细线的形式排出; 一体地布置成高密度的喷嘴部分（105），使得带电的线性涂层溶液往复结合以均匀地涂覆整个基底; 形成在所述喷嘴部前方的预处理部（112），在对所述带电涂布液进行排出之前相对于所述基板进行电荷充电处理; 以及形成在喷嘴部的后方的热处理单元（116），以对涂布的基板进行加热固化。 溶液供给部分包括存储成本计算溶液的储罐（101）和连接到储存罐的输送泵（102），以将固定量的涂布溶液泵送到喷嘴部分。