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Patent Agency Ranking
公开(公告)号：KR1020130090631A
公开(公告)日：2013-08-14
申请号：KR1020120011904
申请日：2012-02-06
Applicant: 삼성전자주식회사
CPC classification number: G01R1/07342 , G01R3/00
Abstract: PURPOSE: A method for automatically focusing and cleaning needles of a probe card is provided to immediately produce map data by scanning the needles through a camera. CONSTITUTION: A monitor (150) is formed outside a stage part. A laser irradiation unit is formed on the stage part. A probe card receiving unit is formed on the upper side of a test system. A probe card (190) is received on the probe card receiving unit. Devices under test (192) and needles (193) are scanned by using a camera.
Abstract translation: 目的：提供用于自动对焦和清洁探针卡针的方法，通过相机扫描针头立即产生地图数据。 构成：在舞台部分之外形成监视器（150）。 在台架部上形成有激光照射单元。 探针卡接收单元形成在测试系统的上侧。 探针卡（190）被接收在探针卡接收单元上。 被测设备（192）和针（193）通过使用相机进行扫描。
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公开(公告)号：KR1020170064058A
公开(公告)日：2017-06-09
申请号：KR1020150168659
申请日：2015-11-30
Applicant: 삼성전자주식회사
Inventor： 강상부
CPC classification number: G01R1/07342 , G01R1/06733 , G01R1/07371 , G01R31/2831 , G01R31/2889
Abstract: 본발명은프로브카드및 그를포함하는테스트장치를개시한다. 그의카드는프로브기판과, 니들팁을갖는니들을포함한다. 니들팁은하부면, 상기하부면 상에배치되고상기하부면과교차하는방향으로배치되는상부면, 상기하부면과상기상부면 사이에연결되고, 상기하부면으로부터상기상부면까지뒤틀린측면들을갖는다.
Abstract translation: 本发明公开了一种探针卡和包括该探针卡的测试装置。 他的卡包括一个探针基板和针尖针。 针尖检流计表面，设置在下表面上并设置在与下表面相交的方向上的上表面，以及结合在下表面和上表面之间并从下表面扭转到上表面的一侧。
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公开(公告)号：KR1020160056453A
公开(公告)日：2016-05-20
申请号：KR1020140156177
申请日：2014-11-11
Applicant: 삼성전자주식회사
CPC classification number: G01R31/2891 , G01R31/2831
Abstract: 본발명은반도체테스트장치를제공한다. 반도체테스트장치는웨이퍼가배치되는척, 상기척 상에위치하고, 상기웨이퍼에테스트신호를제공하는프로브카드, 상기프로브카드에위치하는센서, 상기프로브카드와연결되며상기프로브카드에테스트신호를전달하는베이스유닛및 상기베이스유닛과상기프로브카드를연결하고, 상기프로브카드의변형을보정하는압력장치를포함한다.
Abstract translation: 公开了一种半导体测试装置。 该装置包括：卡盘，其上布置有晶片; 放置在卡盘上的探针卡，并向晶片提供测试信号; 放置在探针卡上的传感器; 以及耦合到所述探针卡的基本单元，并将所述测试信号发送到所述探针卡; 以及将基座单元耦合到探针卡的压力装置，并且校正探针卡的变形。 因此，用于测试半导体的装置能够校正探针卡的翘曲。
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公开(公告)号：KR101877432B1
公开(公告)日：2018-07-11
申请号：KR1020120011904
申请日：2012-02-06
Applicant: 삼성전자주식회사
CPC classification number: G01R1/07342 , G01R3/00
Abstract: 외부에모니터, 내부에카메라및 레이저조사부를가진스테이지부, 및상부에프로브카드안착부를가진테스트시스템을준비하고, 다수개의더트들및 니들들을가진프로브카드를상기프로브카드안착부에안착시키고, 상기카메라를이용하여상기더트들및 니들들을스캐닝하고, 상기레이저조사부에서조사될레이저빔의초점을상기니들들에포커싱하고, 및상기니들들에상기레이저빔을조사하는것을포함하는프로브카드의니들들을클리닝하는방법이설명된다.
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公开(公告)号：KR1020140110440A
公开(公告)日：2014-09-17
申请号：KR1020130024747
申请日：2013-03-08
Applicant: 삼성전자주식회사
CPC classification number: G01R31/2874 , G01R31/2889
Abstract: According to a probing method, set is an allowable temperature range which secures the contact between the needle of a probe card and a pad of an actual substrate having a test temperature. The allowable temperature range is provided to the probe card. The needle is in contact with the pad. A test current is provided to the pad through the needle, thereby testing the actual substrate. Therefore, the time for providing a test temperature environment to the probe card can be reduced, by heating or cooling a multilayer substrate only until the allowable temperature range which secures the contact between the pad of the substrate and the needle of the probe card, without heating and cooling a multilayer substrate to the test temperature.
Abstract translation: 根据探测方法，设定是确保探针卡的针与具有测试温度的实际衬底的焊盘之间的接触的容许温度范围。 允许的温度范围提供给探针卡。 针与垫接触。 通过针向衬垫提供测试电流，从而测试实际的衬底。 因此，通过加热或冷却多层基板，直到保持基板焊盘与探针卡针之间的接触的允许温度范围，才能够减少向探针卡提供测试温度环境的时间，而不需要 将多层基板加热并冷却至测试温度。
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