유체 분사 장치의 제조 방법

    公开(公告)号:KR100325525B1

    公开(公告)日:2002-04-17

    申请号:KR1019980054150

    申请日:1998-12-10

    Abstract: 잉크젯 프린터(Inkjet printer)나 팩시밀리 등과 같은 출력 장치의 프린터 헤드에 사용되는 유체 분사 장치를 제조하기 위한 방법이다. 구동부, 멤버레인, 및 노즐부를 형성함으로써 이루어지는 유체 분사 장치의 제조 방법에 있어서, 노즐부가 구동부 및 멤버레인의 중간 조립체에 대하여 일체로 형성되는 것을 특징으로 한다. 노즐부를 형성하는 단계는 멤버레인의 상측에 분사 유체 배리어층을 형성하는 단계; 분사 유체 배리어층에 분사 유체실을 형성하는 단계; 분사 유체 배리어층의 상측에 노즐판을 형성하는 단계; 및 노즐판에 노즐을 형성하는 단계를 포함한다. 분사 유체 배리어층을 형성하는 단계와 노즐판을 형성하는 단계는 드라이 필름의 라미네이션 공정에 의해 이루어진다. 분사 유체실을 형성하는 단계와 노즐을 형성하는 단계는 리소그래피 공정에 의해 이루어진다. 또한, 노즐부를 형성하는 단계는 노즐판 상측에 강성 보강을 위한 보강층을 형성하는 단계를 더 포함할 수도 있다. 이에 따르면, 작업 공정이 줄어들어 생산성이 크게 향상되는 동시에 수율도 크게 높아진다.

    광커넥터 제조방법
    3.
    发明公开
    광커넥터 제조방법 失效
    制造光连接器的方法

    公开(公告)号:KR1020020025544A

    公开(公告)日:2002-04-04

    申请号:KR1020000057448

    申请日:2000-09-29

    Abstract: PURPOSE: A method for manufacturing an optical connector is provided to reduce a total size and easily arrange optical elements according to an optical axis using a plurality of etching mask layers. CONSTITUTION: First upper and lower etching mask layers(143,144) are deposited on both surface of a wafer and a first patterning step is performed to expose hole corresponding and V-groove corresponding areas(155,157). A second etching mask layer is deposited on the first upper and lower etching mask layers(143,144) and a second patterning step is performed to expose a micro pit corresponding area(150) and the hole corresponding area(155). The micro pit and hole corresponding areas(150,155) are etched by a predetermined depth(d1). The second etching mask layer is removed, the micro pit and hole corresponding areas(150,155) is etched by a predetermined depth(d2), and the first upper etching mask layer(143) is removed.

    Abstract translation: 目的:提供一种用于制造光连接器的方法,以减少总尺寸,并且可以使用多个蚀刻掩模层来容易地根据光轴布置光学元件。 构成:第一上蚀刻掩模层和下蚀刻掩模层(143,144)沉积在晶片的两个表面上,并且执行第一图案化步骤以暴露孔相应的和V形槽对应的区域(155,157)。 在第一上蚀刻掩模层和下蚀刻掩模层(143,144)上沉积第二蚀刻掩模层,并且执行第二图案化步骤以暴露微坑对应区域(150)和孔对应区域(155)。 微孔和孔对应区域(150,155)被蚀刻预定深度(d1)。 去除第二蚀刻掩模层,将微孔和孔对应区域(150,155)蚀刻预定深度(d2),并且去除第一上蚀刻掩模层(143)。

    잉크분사장치 및 잉크분사장치의 제작방법
    4.
    发明公开
    잉크분사장치 및 잉크분사장치의 제작방법 无效
    用于喷墨的装置和用于喷墨的装置的方法

    公开(公告)号:KR1020010045311A

    公开(公告)日:2001-06-05

    申请号:KR1019990048560

    申请日:1999-11-04

    Abstract: PURPOSE: A device for spraying ink and a method for the device for spraying ink are provided to simplify the progresses of manufacturing a device for spraying ink by that the progress for connecting a driving portion and a nozzle portion isn't needed for manufacturing the driving portion and the nozzle portion on a wafer in order. CONSTITUTION: In the device for spraying ink and the method for the device for spraying ink, a chamber(127), a nozzle portion(140), a nozzle plate(147), an ink chamber barrier(145) and a nozzle hole(149) are included. The operation fluid chamber(127) is formed by that an oxidized film(114) etches a laid board(115). The nozzle portion(140) is formed by plating metal and the form of the nozzle plate(147) is made evenly. The progresses of manufacturing the nozzle portion(140) are more simplified by forming the ink chamber barrier(145) and the nozzle plate with a body. The form of the nozzle plate(147) is even and the control of the inclination angle of the nozzle hole(149) becomes easy by that the nozzle portion(140) plates metal on the plating frames. The progress of removing the plating frames is finished, the progresses for manufacturing the nozzle portion(140) are finished and thereby the device for spraying ink is gained.

    Abstract translation: 目的:提供一种用于喷墨的装置和用于喷墨的装置的方法,以简化制造用于喷墨的装置的过程,因为不需要用于连接驱动部分和喷嘴部分的进行来制造驱动 部分和喷嘴部分在晶片上。 构成:在用于喷墨的装置和用于喷墨的装置的方法中,一个腔室(127),一喷嘴部分(140),一喷嘴板(147),一墨室隔板(145)和一喷嘴孔 149)。 操作流体室(127)由氧化膜(114)蚀刻成板(115)形成。 喷嘴部分(140)通过电镀金属形成,并且喷嘴板(147)的形状被均匀地制成。 通过用主体形成墨室隔离物(145)和喷嘴板,来简化制造喷嘴部分(140)的进程。 喷嘴板(147)的形状是均匀的,并且通过喷嘴部分(140)在电镀框架上镀金属,使喷嘴孔(149)的倾斜角度的控制变得容易。 完成移除电镀框架的进程,完成喷嘴部分(140)的制造过程,从而获得喷墨装置。

    잉크분사장치의 노즐부 제작방법 및 잉크분사장치
    5.
    发明公开
    잉크분사장치의 노즐부 제작방법 및 잉크분사장치 失效
    用于制造用于喷墨的装置的喷嘴部分的方法

    公开(公告)号:KR1020010045306A

    公开(公告)日:2001-06-05

    申请号:KR1019990048555

    申请日:1999-11-04

    Inventor: 고희권 박경진

    Abstract: PURPOSE: A method for manufacturing a nozzle portion of a device for spraying ink is provided to carry out spraying of ink stably by preventing reaction between ink in an ink chamber and an ink chamber barrier because, chamber barrier is formed with metal materials. CONSTITUTION: In the method for manufacturing the nozzle portion of the device for spraying ink, a driving portion(20), a membrane(30), a nozzle portion(140) and an ink chamber(157) are included. On the upper face of an ink chamber barrier(145) including the ink chamber(157), the polymer is applied. When forming of a sticking layer(143) is finished, a wafer is separated form the nozzle portion(140) by separating a seed layer from a nozzle plate. The driving portion(20), on which the membrane(30) is sticked, is pressed on the upper part of the sticking layer(143) and thereby the completed device for spraying ink is gained.

    Abstract translation: 目的:提供一种用于制造用于喷墨的装置的喷嘴部分的方法,以通过防止油墨室中的油墨与油墨室阻挡物之间的反应而稳定地进行喷墨,因为室壁由金属材料形成。 构成:在用于制造喷墨装置的喷嘴部分的方法中,包括驱动部分(20),膜(30),喷嘴部分(140)和墨室(157)。 在包括墨水室(157)的墨水室屏障(145)的上表面上涂布聚合物。 当完成粘贴层(143)的形成时,通过从喷嘴板分离种子层,从喷嘴部分(140)分离晶片。 其上贴有薄膜30的驱动部分20被压在粘贴层143的上部,从而获得完成的喷墨装置。

    열압축 방식의 유체 분사 장치
    6.
    发明公开
    열압축 방식의 유체 분사 장치 失效
    热压式液体注射装置

    公开(公告)号:KR1020000055353A

    公开(公告)日:2000-09-05

    申请号:KR1019990003936

    申请日:1999-02-05

    CPC classification number: B41J2/01 B41J2/135 B41J2002/0055

    Abstract: PURPOSE: A thermal compression type liquid injection apparatus is provided to accomplish an improved quality and reliability of the apparatus while preventing deterioration of performance of membrane caused by an air bubble. CONSTITUTION: An apparatus comprises a driving unit having an operating liquid chamber(111) containing operating liquid and electrodes(112a,112b,112c) and heating element(113) for thermally expanding the operating liquid so as to generate a driving force, a membrane driven by the driving force from the driving unit, a nozzle unit for injecting liquid through a nozzle being driven by the membrane, an operating liquid injection path(117) for injecting operating liquid into the operating liquid chamber(111), an operating liquid injection port connected to a plurality of operating liquid injection path(117), and a member(140) for removing air bubble generated from the plurality of operating liquid chambers(111) and operating liquid injection path.

    Abstract translation: 目的:提供一种热压缩型液体注射装置,以实现设备的质量和可靠性的提高,同时防止由气泡引起的膜的性能劣化。 构成:装置包括驱动单元,该驱动单元具有包含工作液体的操作液室(111)和用于使工作液体热膨胀以产生驱动力的电极(112a,112b,112c)和加热元件(113) 由来自驱动单元的驱动力驱动的喷嘴单元,用于通过由膜驱动的喷嘴喷射液体的喷嘴单元,用于将操作液体喷射到操作液体室(111)中的操作液体注入路径(117),操作液体注入 连接到多个操作液体注入路径(117)的端口,以及用于去除从多个操作液体室(111)和操作液体注入路径产生的气泡的构件(140)。

    유체 분사 장치의 제조 방법_
    7.
    发明公开
    유체 분사 장치의 제조 방법_ 失效
    制造流体注射装置的方法

    公开(公告)号:KR1020000038965A

    公开(公告)日:2000-07-05

    申请号:KR1019980054149

    申请日:1998-12-10

    Abstract: PURPOSE: A method for manufacturing a fluid injection device is provided to integrally form a nozzle and an injection fluid chamber in a single thin layer, thereby reducing manufacturing procedure and minimizing a difference deviation through a whole board. CONSTITUTION: A method for manufacturing a fluid injection device includes the steps of respectively forming a driving part(110), a membrane(120), and a nozzle part(130), and assembling the formed driving part, membrane and the nozzle part in sequence, wherein assembling the nozzle part is performed by a single nozzle layer(131) made of a silicon material, and includes the sub-steps of laminating the nozzle layer on a board(139) by joining and abrasing the nozzle layer in a predetermined thickness, pre-forming a nozzle(132), forming the nozzle and an injection chamber(133) by anisotropic etching, and separating the board.

    Abstract translation: 目的:提供一种用于制造流体注射装置的方法以在单个薄层中一体地形成喷嘴和注射流体室,由此减少制造程序并使通过整个板的差异偏差最小化。 构成:用于制造流体注射装置的方法包括分别形成驱动部分(110),膜(120)和喷嘴部分(130)的步骤,并将形成的驱动部分,膜和喷嘴部分组装在 顺序,其中组装所述喷嘴部分由单个由硅材料制成的喷嘴层(131)进行,并且包括通过以预定的方式将所述喷嘴层接合和磨损而将喷嘴层层压在板(139)上的子步骤 预成形喷嘴(132),通过各向异性蚀刻形成喷嘴和喷射室(133),并分离板。

    미소구조의 유체분사장치 제작방법 및 그 유체분사장치
    8.
    发明公开
    미소구조의 유체분사장치 제작방법 및 그 유체분사장치 失效
    微结构流体喷雾器及其喷雾器的生产方法

    公开(公告)号:KR1020000021392A

    公开(公告)日:2000-04-25

    申请号:KR1019980040447

    申请日:1998-09-29

    CPC classification number: B05B17/04 B05B1/24 H01L21/28 H01L21/768

    Abstract: PURPOSE: A production method of a fluid sprayer is offered to improve quickness and an attachment of a work by minimizing an attachment process while producing a fluid sprayer. CONSTITUTION: A fluid sprayer is composed of: a substrate(100), an insulation layer(101) formed on the substrate(100), a specific size of an emitting body(102) formed to be projected on the insulation layer(101) and an electrode(103), a lower wall(104) formed to cover around a driving fluid chamber(105), a protection layer(106), a membrane(108) formed on the upper end of the protection layer(106), a nozzle plate(114) having a nozzle(115). In this state, a production method of the fluid sprayer contains the steps of: inputting a driving fluid(116) in the driving fluid chamber(105), and attaching the nozzle plate(114) having the nozzle(115) formed to correspond to a vent fluid chamber(112) on an upper wall(110a). Thereby, all the structures except the nozzle plate(114) are produced as an integration form without an attaching process.

    Abstract translation: 目的:提供流体喷雾器的生产方法,通过在生产流体喷雾器的同时最小化附着过程来提高工作的快速性和附着性。 构成:流体喷雾器由以下部分组成:基板(100),形成在基板(100)上的绝缘层(101),形成为突出在绝缘层(101)上的发射体(102)的特定尺寸, 以及电极(103),形成为覆盖驱动流体室(105)周围的下壁(104),保护层(106),形成在保护层(106)的上端的隔膜(108) 具有喷嘴(115)的喷嘴板(114)。 在这种状态下,流体喷雾器的制造方法包括以下步骤:在驱动流体室(105)中输入驱动流体(116),并且将具有喷嘴(115)的喷嘴板(114) 在上壁(110a)上的排气流体室(112)。 由此,除了喷嘴板(114)之外的所有结构都作为一体形式生产而没有附着工艺。

    모바일 디바이스 및 그의 스피커 제어 방법

    公开(公告)号:KR102228396B1

    公开(公告)日:2021-03-16

    申请号:KR1020140026027

    申请日:2014-03-05

    Abstract: 모바일디바이스가개시된다. 본발명의모바일디바이스는오디오데이터를처리하여오디오신호를생성하는오디오처리부, 오디오신호를출력하는출력부, AP(Access Point) 네트워크에연결가능한통신부및 오디오신호가출력중인상태에서기 설정된이벤트가발생하면, 통신부를통해서 AP 네트워크에포함된외부스피커로오디오신호를전송하여, 오디오신호를출력하도록제어하는제어부를포함한다.

    모바일 디바이스 및 그의 스피커 제어 방법
    10.
    发明公开
    모바일 디바이스 및 그의 스피커 제어 방법 审中-实审
    移动装置和用于调音台的方法

    公开(公告)号:KR1020150104371A

    公开(公告)日:2015-09-15

    申请号:KR1020140026027

    申请日:2014-03-05

    Abstract: 모바일 디바이스가 개시된다. 본 발명의 모바일 디바이스는 오디오 데이터를 처리하여 오디오 신호를 생성하는 오디오 처리부, 오디오 신호를 출력하는 출력부, AP(Access Point) 네트워크에 연결 가능한 통신부 및 오디오 신호가 출력 중인 상태에서 기 설정된 이벤트가 발생하면, 통신부를 통해서 AP 네트워크에 포함된 외부 스피커로 오디오 신호를 전송하여, 오디오 신호를 출력하도록 제어하는 제어부를 포함한다.

    Abstract translation: 公开了一种移动设备。 根据本发明的移动设备包括:音频处理单元,其通过处理音频数据来产生音频信号; 输出单元,其输出音频信号; 能够连接到接入点(AP)网络的通信单元; 以及控制单元,其经由通信单元将音频信号发送到包括在AP网络中的外部扬声器,并且当在输出音频信号时发生预定事件时,控制要输出的音频信号。

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