公开(公告)号：KR1020060099043A

公开(公告)日：2006-09-19

申请号：KR1020050020022

申请日：2005-03-10

Applicant: 삼성전자주식회사

Inventor： 박대성

IPC: H01L21/02

CPC classification number: H01L21/02 ,  F01N13/001

Abstract: 가스공급라인의 분리 및 결합이 용이하고 가스의 유출을 방지할 수 있는 가스공급수단을 갖는 챔버 시스템에 대해 개시한다. 그 시스템은 챔버에 가스를 공급하며, 양쪽으로 분리된 각각의 가스공급라인으로 이루어진 복수개의 가스공급라인 및 챔버의 일측에 장착되어, 각각의 가스공급라인의 일부분을 일면에 고정시키고 각각의 가스공급라인의 타부분을 타면에 고정시키는 고정홀 영역이 형성된 판형태의 보정판을 포함한다.
챔버, 가스공급, 보정판, 고정홀

公开(公告)号：KR1020020001131A

公开(公告)日：2002-01-09

申请号：KR1020000035296

申请日：2000-06-26

Applicant: 삼성전자주식회사

Inventor： 김진휘 ,  황준흠 ,  강은정 ,  박대성

IPC: H04N5/445

CPC classification number: H04N21/4424 ,  G09G5/39 ,  G09G5/42 ,  H04N5/44513 ,  H04N21/4104 ,  H04N21/4312 ,  H04N21/4314 ,  H04N21/485 ,  H04N21/488 ,  H04N21/8153 ,  Y10S345/949 ,  Y10S715/967 ,  Y10S715/977

Abstract: PURPOSE: A method and apparatus for indicating the state of an electronic appliance are provided for anybody such as even a child or an old person who cannot read letters to easily recognize the current state of the electronic appliance. CONSTITUTION: Pictures indicating various states of an electronic appliance are stored in advance. According to key input of a user via a key input part(31), the state of the appliance is judged. According to the judged result, servo part(36) drive is controlled to convert the current state into the judged state. During the control of the drive of servo drive, an additional control signal is generated to read a picture corresponding to the judge state from the previously stored pictures. The read picture is displayed on a screen. The pictures are divided into blocks each of which has a predetermined size, being in the form of font.

Abstract translation: 目的：提供一种用于指示电子设备的状态的方法和装置，用于任何人，例如即使是不能读取字母以便容易地识别电子设备的当前状态的儿童或老人。 规定：预先存储指示电子设备的各种状态的图像。 根据用户经由键输入部（31）的键输入，判断器具的状态。 根据判断结果，控制伺服部（36）驱动，将当前状态转换为判定状态。 在伺服驱动器的驱动控制期间，产生附加的控制信号以从先前存储的图像读取与判断状态对应的图像。 读取的图像显示在屏幕上。 这些图像被分成具有预定尺寸的块，其形式为字体。

公开(公告)号：KR1020070081045A

公开(公告)日：2007-08-14

申请号：KR1020060012754

申请日：2006-02-09

Applicant: 삼성전자주식회사

Inventor： 박대성

IPC: H01L21/02

Abstract: A semiconductor manufacturing apparatus is provided to restrain the generation of safety accidents due to the overheat by detecting an inner temperature of a power supply unit and interlocking the semiconductor manufacturing apparatus in an overheated state of the power source unit using a detection unit and a control unit. A semiconductor manufacturing apparatus includes a process chamber, a power supply unit, a detection unit and a control unit. The process chamber(300) for performing a predetermined process on a substrate. The power supply unit(200) supplies power to the process chamber. The detection unit(230) is installed at a transformer of the power supply unit in order to sense an inner temperature of the power supply unit. The control unit(250) generates a predetermined control signal corresponding to a detection signal transmitted from the detection unit.

Abstract translation: 提供一种半导体制造装置，通过检测电源单元的内部温度来抑制由于过热而产生安全事故，并且使用检测单元和控制单元将电源单元的过热状态互锁在半导体制造装置中 。 半导体制造装置包括处理室，电源单元，检测单元和控制单元。 用于在基板上执行预定处理的处理室（300）。 电源单元（200）向处理室供电。 检测单元（230）安装在电源单元的变压器上，以便检测电源单元的内部温度。 控制单元（250）产生与从检测单元发送的检测信号相对应的预定控制信号。

公开(公告)号：KR100388944B1

公开(公告)日：2003-06-25

申请号：KR1020000035296

申请日：2000-06-26

Applicant: 삼성전자주식회사

Inventor： 김진휘 ,  황준흠 ,  강은정 ,  박대성

IPC: H04N5/445

CPC classification number: H04N21/4424 ,  G09G5/39 ,  G09G5/42 ,  H04N5/44513 ,  H04N21/4104 ,  H04N21/4312 ,  H04N21/4314 ,  H04N21/485 ,  H04N21/488 ,  H04N21/8153 ,  Y10S345/949 ,  Y10S715/967 ,  Y10S715/977

Abstract: An electronic device operation method and apparatus. A current state of a device such as TVs or VCRs is indicated as a graphic moving picture of a familiar character shape. Pictures containing an associated character shape are stored in correspondence with a various states of the electronic device. The pictures are formed of fonts each of which has a predetermined magnitude and corresponds to a block of the picture. One or more fonts are read during the time of shifting a device state according to a user key input, and the fonts are changed at time intervals to display a moving picture. A sound corresponding to the moving picture may be output together with the displayed moving picture, to further enhance the device state indication. Thus, a current state of the electronic device is more recognized by persons who do not read characters.

Abstract translation: 一种电子设备操作方法及装置。 诸如TV或VCR的设备的当前状态被表示为熟悉的人物形状的图形运动图像。 包含相关字符形状的图片被存储为与电子设备的各种状态对应。 图片由各自具有预定大小并对应于图片的块的字体形成。 在根据用户键输入移动设备状态期间读取一个或多个字体，并且字体按时间间隔改变以显示运动图像。 对应于运动图像的声音可以与所显示的运动图像一起输出，以进一步增强设备状态指示。 因此，电子设备的当前状态被不读字符的人更多地识别。

公开(公告)号：KR1020030036554A

公开(公告)日：2003-05-09

申请号：KR1020030024700

申请日：2003-04-18

Applicant: 삼성전자주식회사

Inventor： 김진휘 ,  황준흠 ,  강은정 ,  박대성

IPC: H04N5/44

CPC classification number: H04N5/44513 ,  H04N2005/44517

Abstract: PURPOSE: A method and an apparatus for displaying the state of an electronic device are provided to inform a user of the current state of an electronic device through the sound of a character. CONSTITUTION: An apparatus for displaying the state of an electronic device includes a key input unit(31), a micro-controller(32), and a melody generator(35). The key input unit selects a device state to input a key. The micro-controller judges the device state from the key input from the key input unit, and displaying the judged device state while controlling servo-drive for converting the current state into the judged state. The melody generator transmits a previously set melody according to the device state judged by the micro-controller. The melody generator includes a transistor(TR) and a buzzer(351). The base of the transistor is connected to a timer port of the micro-controller such that the transistor operates according to a pulse applied to the base. The buzzer is connected to the collector of the transistor to sound according to operation of the transistor.

Abstract translation: 目的：提供一种用于显示电子设备的状态的方法和装置，以通过字符的声音通知用户电子设备的当前状态。 构成：用于显示电子设备的状态的设备包括键输入单元（31），微控制器（32）和旋律发生器（35）。 键输入单元选择一个设备状态来输入一个键。 微型控制器从键输入单元的键输入判断设备状态，并且在控制用于将当前状态转换为判断状态的伺服驱动器的同时显示所判断的设备状态。 旋律发生器根据由微控制器判断的设备状态传输先前设定的旋律。 旋律发生器包括晶体管（TR）和蜂鸣器（351）。 晶体管的基极连接到微控制器的定时器端口，使得晶体管根据施加到基极的脉冲进行操作。 蜂鸣器连接到晶体管的集电极，以根据晶体管的工作进行发声。