公开(公告)号：KR1020080022919A

公开(公告)日：2008-03-12

申请号：KR1020060086746

申请日：2006-09-08

Applicant: 삼성전자주식회사

Inventor： 박종필 ,  김인호 ,  김준화 ,  송성용

IPC: H01L21/02 ,  G02F1/133 ,  G02F1/136

Abstract: A fluid control valve used for a manufacturing apparatus of a display apparatus is provided to detect easily an erroneous state of a fluid control unit by forming a main body unit with a transparent material or a semi-transparent material. A fluid control valve includes a main body unit(10) and a fluid control unit(20). The main body unit includes a fluid path. The fluid control unit is inserted into the fluid path in order to adjust a flow rate of the fluid. The main body unit is transparent or semi-transparent. The main body unit is formed of a polymer material or a PVC(Polyvinyl Chloride) material. The fluid control unit is formed of a fluoric resin material. The fluid control valve includes a diaphragm valve and a QDR valve.

Abstract translation: 用于显示装置的制造装置的流体控制阀被设置成通过用透明材料或半透明材料形成主体单元来容易地检测流体控制单元的错误状态。 流体控制阀包括主体单元（10）和流体控制单元（20）。 主体单元包括流体路径。 流体控制单元被插入到流体路径中以调节流体的流量。 主体单元是透明或半透明的。 主体单元由聚合物材料或PVC（聚氯乙烯）材料形成。 流体控制单元由氟树脂材料形成。 流体控制阀包括隔膜阀和QDR阀。