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公开(公告)号：WO2023033305A1
公开(公告)日：2023-03-09
申请号：PCT/KR2022/007107
申请日：2022-05-18
Applicant: 삼성전자주식회사
Abstract: 냉장고는, 제1캐비닛을 포함하는 제1냉장고와, 제2캐비닛을 포함하고, 상기 제1냉장고와 독립적으로 동작하는 제2냉장고를 포함할 수 있다. 제1커넥터는 상기 제1캐비닛에 설치될 수 있고, 제2커넥터는 상기 제1커넥터와 대응되도록 상기 제2캐비닛에 설치될 수 있다. 상기 제2커넥터는, 상기 제1커넥터와 서로 결합되었을 때 상기 제1캐비닛의 상기 제2캐비닛에 대한 제1방향으로의 이동이 허용되고, 상기 제1캐비닛의 상기 제2캐비닛에 대한 상기 제1방향과 수직한 제2방향으로의 이동이 제한되도록 상기 제1커넥터와 결합되도록 마련될 수 있다.
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Patent Agency Ranking
公开(公告)号：KR1020150082058A
公开(公告)日：2015-07-15
申请号：KR1020140089539
申请日：2014-07-16
Applicant: 삼성전자주식회사
CPC classification number: F25D29/006 , F25D23/028 , F25D23/064 , F25D23/065 , F25D29/005 , F25D2400/40
Abstract: 본체의내부용적을늘리기위해단열두께가감소되면서저하된본체의강성을보강구조를통해향상시켜본체의변형량을감소시킬수 있으며, 냉장고의동작을제어하는전장부품이수용되는전장박스를본체상부의전방에마련되는힌지커버내부에배치되도록하여공간활용성을향상시킬수 있으며, 전장박스내부의부품들에서화재가발생되는경우화재가전장박스외부로번지는것이방지되도록하기위해전장박스내부에스틸재질의보강판이마련되는냉장고를제공한다.
Abstract translation: 本发明提供一种通过改善身体的硬度来降低身体的变形的冰箱，其通过降低绝缘厚度而降低的身体，以通过加强结构增加内部容量; 通过布置电子箱来改善空间的可用性，其中控制冰箱的操作的电子部件被放置在铰链盖内的主体的前部; 并将钢材的加强板放置在电子箱中，以防止在电子箱内发生火灾时火灾蔓延到电子箱外。
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公开(公告)号：KR1020040019192A
公开(公告)日：2004-03-05
申请号：KR1020020050532
申请日：2002-08-26
Applicant: 삼성전자주식회사
Inventor： 주용우
IPC: H01L21/027
Abstract: PURPOSE: A reticle loading apparatus of exposure equipment is provided to be capable of considerably reducing the time for a reticle loading process. CONSTITUTION: A reticle loading apparatus of an exposure equipment is provided with a reticle case(100) for storing a reticle, a particle checking box(400) for carrying out a particle checking process on the reticle supplied from the reticle case, and a carrier(300) installed at the inner portion of the particle checking box for moving the reticle to the X-axis direction. Preferably, the particle checking box is installed at the upper portion of the reticle case. Preferably, the particle checking box is installed at the predetermined position spaced apart from the reticle. Preferably, the position of the reticle is adjusted to the carrier when a particle checking process is carried out on the reticle in the particle checking box.
Abstract translation: 目的：提供曝光设备的掩模版加载装置，以便大大减少掩模版加载过程的时间。 构成：曝光设备的掩模版加载装置设置有用于存储掩模版的掩模版壳体（100），用于对由光罩壳体提供的掩模版进行粒子检查处理的粒子检测盒（400），以及载体 （300），安装在用于将掩模版移动到X轴方向的粒子检查箱的内部。 优选地，颗粒检查箱安装在标线箱壳体的上部。 优选地，粒子检查箱安装在与光罩间隔开的预定位置处。 优选地，当在粒子检查箱中的掩模版上进行粒子检查处理时，将掩模版的位置调节到载体。
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公开(公告)号：KR102209765B1
公开(公告)日：2021-01-29
申请号：KR1020190152841
申请日：2019-11-26
Applicant: 삼성전자주식회사
Abstract: 본체의내부용적을늘리기위해단열두께가감소되면서저하된본체의강성을보강구조를통해향상시켜본체의변형량을감소시킬수 있으며, 냉장고의동작을제어하는전장부품이수용되는전장박스를본체상부의전방에마련되는힌지커버내부에배치되도록하여공간활용성을향상시킬수 있으며, 전장박스내부의부품들에서화재가발생되는경우화재가전장박스외부로번지는것이방지되도록하기위해전장박스내부에스틸재질의보강판이마련되는냉장고를제공한다.
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公开(公告)号：KR1020040064148A
公开(公告)日：2004-07-16
申请号：KR1020030001448
申请日：2003-01-09
Applicant: 삼성전자주식회사
Inventor： 주용우
IPC: H01L21/027
Abstract: PURPOSE: An automatic inspecting apparatus of a laser alignment sensor is provided to obtain inspection data in real time and deal with an error by automatically inspecting an operation state of a laser beam of an LSA(laser step alignment) sensor. CONSTITUTION: An inspection parameter is selected to check the operation state of the LSA sensor in real time. The selected inspection parameter is developed. A database(17a) with an alarm code for an abnormal state is established. A computer(13) inputs the parameter. Monitoring equipment(15) monitors the parameter. The computer, the LSA sensor and the monitoring equipment are connected to the database of a server(17) through a network so as to manage an inspection flow for the inspection process. A wafer is introduced to exposure equipment to perform an exposure process. An exposure period of a predetermined unit is counted. The development of the selected parameter is permanently analyzed by the server so as to be compared with corresponding data stored in the database so that the irradiation state of a laser beam of the LSA sensor is detected in real time. If the detection result is normal, an exposure process continues. If the detection result is abnormal, a correction operation defined by an alarm code is carried out.
Abstract translation: 目的：提供激光对位传感器的自动检测装置，通过自动检查LSA（激光步进对准）传感器的激光束的工作状态，实时获取检测数据并处理错误。 构成：选择检查参数实时检查LSA传感器的运行状态。 开发出选定的检验参数。 建立具有用于异常状态的警报代码的数据库（17a）。 计算机（13）输入参数。 监控设备（15）监控参数。 计算机，LSA传感器和监控设备通过网络连接到服务器（17）的数据库，以便管理检查过程的检查流程。 向曝光设备引入晶片以进行曝光处理。 对预定单位的曝光期进行计数。 所选择的参数的开发由服务器永久分析，以便与存储在数据库中的相应数据进行比较，以便实时地检测LSA传感器的激光束的照射状态。 如果检测结果正常，则继续曝光。 如果检测结果异常，则执行由报警代码定义的校正操作。
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公开(公告)号：KR1020030043125A
公开(公告)日：2003-06-02
申请号：KR1020010074137
申请日：2001-11-27
Applicant: 삼성전자주식회사
Inventor： 주용우
IPC: H01L21/027
Abstract: PURPOSE: A reticle loading apparatus of photolithography equipment is provided to be capable of preventing the damage of a reticle by detecting the abnormal loading state of the reticle using a pressure sensor. CONSTITUTION: A reticle poke(30) is provided with a neck part(12) supported by a robot and a finger part(32) extended from the neck part(12) for supporting the edge portion of the rear surface of a reticle(R). A vacuum hole(34) is formed on the upper portion of the finger part(32), wherein the vacuum hole(34) is extended to the neck part(12) through the inside of the finger part(32). A protrusion(40) is formed on the upper portion of the finger part(32) nearby the neck part(12). A pressure sensor(36) is connected through the vacuum hole(34) for sensing the pressure state of the vacuum hole(34). A controller(38) is installed for controlling the abnormal loading state of the reticle by receiving a signal transmitted from the pressure sensor(36).
Abstract translation: 目的：提供光刻设备的掩模版加载装置，以便通过使用压力传感器检测掩模版的异常加载状态来防止掩模版的损坏。 构成：掩模版ke（30）设置有由机器人支撑的颈部部分（12）和从颈部部分（12）延伸的指状部分（32），用于支撑光罩的后表面的边缘部分（R ）。 在指部（32）的上部形成有真空孔（34），其中，真空孔（34）通过指部（32）的内部延伸到颈部（12）。 在颈部（12）附近的指部（32）的上部形成突起（40）。 压力传感器（36）通过真空孔（34）连接，用于感测真空孔（34）的压力状态。 安装控制器（38），用于通过接收从压力传感器（36）发送的信号来控制标线的异常加载状态。
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