公开(公告)号：KR1020080025463A

公开(公告)日：2008-03-21

申请号：KR1020060089962

申请日：2006-09-18

Applicant: 삼성전자주식회사

Inventor： 김영길 ,  김창수 ,  라상일 ,  유재우 ,  한완택 ,  한형규

IPC: H01L21/68

CPC classification number: H01L21/67733 ,  H01L21/67259

Abstract: An automatic transfer device for a semiconductor manufacturing apparatus is provided to stop driving of a vehicle when an obstacle is sensed while the vehicle is driving along a track. An automatic transfer device for a semiconductor manufacturing apparatus comprises a track(10), a vehicle(20), a main sensor, an obstacle sensor(40), and a sensor controller(50). The track installed on a ceiling makes a closed circuit by connecting a curved section and a linear section. The vehicle driving along the track moves a clamped wafer carrier to be loaded/unloaded into/from a process facility. The main sensor senses a frontal vehicle from one side of a driving direction of the vehicle. The obstacle sensor, which is a laser sensor, is secured onto the ceiling by a fixing member and senses a directly lower side of the vehicle, while the vehicle is driving along the linear section. The sensor controller comprises a controller(51) discriminating whether an obstacle is sensed or not by a signal sensed by the obstacle sensor, a motor(52) driven by a signal from the controller, and a pad(53) located in a sensing area of the main sensor of the vehicle, which is driving while being rotated by the motor.

Abstract translation: 提供一种用于半导体制造装置的自动转移装置，用于当车辆沿着轨道行驶时在障碍物被感测时停止车辆的行驶。 一种用于半导体制造装置的自动转移装置包括轨道（10），车辆（20），主传感器，障碍物传感器（40）和传感器控制器（50）。 安装在天花板上的轨道通过连接弯曲部分和线性部分而形成闭路。 沿着轨道行驶的车辆将夹紧的晶片载体移动到装载/卸载到处理设备中。 主传感器从车辆行驶方向的一侧感测前方车辆。 作为激光传感器的障碍物传感器通过固定构件固定在天花板上，并且在车辆沿线性部分行驶时感测车辆的直接下侧。 传感器控制器包括：通过由障碍物传感器感测到的信号，由来自控制器的信号驱动的电动机（52）以及位于感测区域中的垫（53）来鉴别障碍物是否被感测到的控制器（51） 该车辆的主传感器在由电动机旋转的同时被驱动。

公开(公告)号：KR1020070091408A

公开(公告)日：2007-09-11

申请号：KR1020060020836

申请日：2006-03-06

Applicant: 삼성전자주식회사

Inventor： 라상일 ,  유재우 ,  한형규 ,  김창수 ,  한완택

IPC: H01L21/02 ,  H01L21/66

Abstract: An apparatus and a method for monitoring fluid pressure in semiconductor manufacturing equipment are provided to prevent the generation of defective wafers by monitoring a rapid pressure difference between bays in a gas or chemical supply process. An apparatus for monitoring fluid pressure includes at least one bay(14a-14f), at least one pressure switches(16a-16f), a controller(22), and a pressure monitoring unit(24). The bays are branched through supply tubes(12). The pressure switches are installed at ends of the supply tubes of bays in order to measure pressure of fluid to be supplied to the bays. The controller receives measured pressure values from the pressure switches in order to detect a pressure difference more than a predetermined value, to generate alarm sound or a warning control signal, and to output the measured pressure values in real time. The pressure monitoring unit stores and displays the measured pressure values.

Abstract translation: 提供一种用于监测半导体制造设备中的流体压力的装置和方法，以通过监测气体或化学品供应过程中的间隔之间的快速压力差来防止产生缺陷晶片。 用于监测流体压力的装置包括至少一个隔间（14a-14f），至少一个压力开关（16a-16f），控制器（22）和压力监测单元（24）。 托架通过供应管（12）分支。 压力开关安装在托架的供应管的端部，以便测量要供应到托架的流体的压力。 控制器从压力开关接收测量的压力值，以检测超过预定值的压差，产生报警声或报警控制信号，并实时输出测量的压力值。 压力监控单元存储和显示测量的压力值。

公开(公告)号：KR1020080011736A

公开(公告)日：2008-02-11

申请号：KR1020060072095

申请日：2006-07-31

Applicant: 삼성전자주식회사

Inventor： 김영길 ,  김대수 ,  김창수 ,  라상일 ,  유재우 ,  한완택 ,  한형규

IPC: B66F9/20

CPC classification number: B66F17/003 ,  B60Q1/525 ,  B66F9/07504

Abstract: A forklift equipped with a collision prevention unit is provided to prevent important facilities from being damaged by sensing collision with the facilities during loading or transferring of heavy weight components. A forklift includes a frame portion having a pair of guide frames(11), a lifting frame(12), a chassis(13) and wheels(14), a fork unit(20), a driving unit(30) and an operation unit(40). The forklift with a collision prevention unit comprises: a pressing unit(50), a sensing unit(60) and a control unit. The pressing unit allows an extended end portion to be engaged with a holder(22) of the fork unit. The sensing unit is mounted on an upper end surface of the lifting frame and an upper surface of the pressing unit. The sensing unit senses contact from the upper surfaces. Additionally, the control unit stops lifting of the fork unit according to a contact signal sensed from the sensing unit.

Abstract translation: 提供装有防碰撞装置的叉车，以防止在装载或搬运重型部件时感测到与设施碰撞的重要设备的损坏。 叉车包括具有一对引导架（11），提升架（12），底架（13）和轮（14），叉单元（20），驱动单元（30）和操作 单元（40）。 具有防撞单元的叉车包括：按压单元（50），感测单元（60）和控制单元。 按压单元允许延伸的端部与叉单元的保持器（22）接合。 感测单元安装在提升框架的上端表面和按压单元的上表面上。 感测单元感测来自上表面的接触。 此外，控制单元根据从感测单元感测的接触信号停止提升叉单元。

公开(公告)号：KR1020060110898A

公开(公告)日：2006-10-26

申请号：KR1020050032659

申请日：2005-04-20

Applicant: 삼성전자주식회사

Inventor： 유재우 ,  김창수 ,  한형규

IPC: H01L21/02

CPC classification number: H01L21/67248 ,  G05B23/027 ,  H01L21/67057 ,  H01L21/67086 ,  H01L21/67109

Abstract: An overheating prevention device is provided to prevent fire due to overheating of a heater by blocking AC power when an inter-lock signal is occurred from a heater temperature control part using temperature sensors. An overheating prevention device includes a heater(62) for increasing temperature, a plurality of temperature sensor, a heater temperature control part, and a power supply. The temperature sensors(52,64,66) are installed to detect a temperature of the heater. The heater temperature control parts(70,72) are installed for generating an inter-lock signal, when sensing an excessive temperature from the temperature sensors than a predetermined temperature. The power supply(56) is prepared to block AC(Alternating Current) power, when occurring the inter-lock signal from the heater temperature control parts.

Abstract translation: 提供一种过热防止装置，用于当使用温度传感器从加热器温度控制部发生锁相信号时，通过阻断交流电来防止加热器过热引起的火灾。 过热防止装置包括用于增加温度的加热器（62），多个温度传感器，加热器温度控制部分和电源。 安装温度传感器（52,66,66）以检测加热器的温度。 安装加热器温度控制部件（70,72），用于当感测到来自温度传感器的温度超过预定温度时产生互锁信号。 当发生来自加热器温度控制部分的锁相信号时，电源（56）准备阻止AC（交流）电力。

公开(公告)号：KR1020090008517A

公开(公告)日：2009-01-22

申请号：KR1020070071510

申请日：2007-07-18

Applicant: 삼성전자주식회사

Inventor： 라상일 ,  김영길 ,  김창수 ,  박홍진 ,  유재우 ,  한형규

IPC: G01N31/22 ,  G01N31/00 ,  G01N31/20

CPC classification number: G01N31/221 ,  Y10T156/10

Abstract: An adsorption cloth for adsorbing a chemical solution is provided to allow what chemical solution is adsorbed to the adsorption cloth to be known by the eyes by the change of color, thereby allowing the used adsorption cloth to be divided according to the kind of a chemical solution. An adsorption cloth for adsorbing a chemical solution is such that the adsorption cloth is coated with a material whose color changes differently to an acid, an alkali or an organic compound by the reaction with the chemicals so as to allow the kind of the chemical solution adsorbed to the adsorption cloth. Preferably the material is Ph.

Abstract translation: 提供了用于吸附化学溶液的吸附布，以允许通过颜色变化使吸附布吸附到吸附布上，从而允许使用的吸附布根据化学溶液的种类被分开 。 用于吸附化学溶液的吸附布是这样的：吸附布被涂覆有与化学品反应的颜色变化不同于酸，碱或有机化合物的材料，以便吸附化学溶液的种类 到吸附布。 材料优选为Ph。

公开(公告)号：KR1020070081506A

公开(公告)日：2007-08-17

申请号：KR1020060013432

申请日：2006-02-13

Applicant: 삼성전자주식회사

Inventor： 유재우 ,  김창수 ,  라상일 ,  한완택 ,  한형규

IPC: H01L21/02

Abstract: An apparatus for a local exhaust of pollution gas is provided to secure the safety of workers by restraining or minimizing the amount of the pollution gas exhausted to the outside of a chamber in a chamber cleaning process. An apparatus for a local exhaust of pollution gas includes an absorption unit, a pollution gas moving unit, and at least one controller. The absorption unit is installed at an upper portion of a chamber in order to absorb the pollution gas of the chamber. The pollution gas moving unit(200) has an upper opening portion. The pollution gas moving unit is used for fixing the absorption unit and supplying a predetermined path for the pollution gas. The controller(220) controls the up/down motion of the absorption unit.

Abstract translation: 提供了一种用于局部排放污染气体的装置，以通过限制或最小化在室清洁过程中排出到室外的污染气体的量来确保工人的安全。 用于局部排放污染气体的装置包括吸收单元，污染气体移动单元和至少一个控制器。 吸收单元安装在室的上部以吸收室的污染气体。 污物气体移动单元（200）具有上开口部。 污染气体移动单元用于固定吸收单元并为污染气体提供预定的路径。 控制器（220）控制吸收单元的上/下运动。

公开(公告)号：KR100665849B1

公开(公告)日：2007-01-09

申请号：KR1020050032659

申请日：2005-04-20

Applicant: 삼성전자주식회사

Inventor： 유재우 ,  김창수 ,  한형규

IPC: H01L21/02

CPC classification number: H01L21/67248 ,  G05B23/027 ,  H01L21/67057 ,  H01L21/67086 ,  H01L21/67109

Abstract: A temperature control device comprising a heater, a plurality of heater temperature sensors, a heater temperature controller, and a power supply unit, and adapted to prevent overheating and fires caused by the overheating of a heater, is disclosed. The heater adapted to increase in temperature in response to receiving power, each heater temperature sensor is adapted to sense a temperature of the heater and generate a corresponding sensed heater temperature, and the heater temperature controller is adapted to generate an interlock control signal when at least one of the sensed heater temperatures respectively sensed by the plurality of temperature sensors exceeds a heater reference temperature. In addition, the power supply unit is adapted to stop supplying power to a power supply controller, thereby stopping power from being supplied to the heater, when the heater temperature controller provides the interlock control signal to the power supply unit.

公开(公告)号：KR1020090092947A

公开(公告)日：2009-09-02

申请号：KR1020080018215

申请日：2008-02-28

Applicant: 삼성전자주식회사

Inventor： 라상일 ,  김영길 ,  김창수 ,  박홍진 ,  유재우 ,  한형규

IPC: H01L21/02

Abstract: A system for wetting wiper used clean room and wetting method used the same are provided to improve the work environment of the operator in the line manufacturing semiconductor. The wiper(100) for the clean room is mounted on the drawer(20) accepted within the cabinet(10). The wiper for the clean room is horizontally mounted in the drawer. The nozzle(41) is formed in the upper end center of the cabinet faced to the drawer. The presser(30) draws up the isopropyl alcohol(40) by compressing the wiper for the clean room. A plurality of springs pushes the cylinder up while supporting the neighboring of cylinder.

Abstract translation: 提供用于润湿刮水器的系统，其使用洁净室和使用其的润湿方法来改善操作者在线路制造半导体中的工作环境。 用于洁净室的刮水器（100）安装在机柜（10）中接纳的抽屉​​（20）上。 洁净室的刮水器水平安装在抽屉中。 喷嘴（41）形成在柜体的面向抽屉的上端中央。 按压器（30）通过压缩清洁室的擦拭器来吸收异丙醇（40）。 多个弹簧在支撑气缸的相邻部分的同时向上推动气缸。

公开(公告)号：KR1020070091407A

公开(公告)日：2007-09-11

申请号：KR1020060020835

申请日：2006-03-06

Applicant: 삼성전자주식회사

Inventor： 한형규 ,  김창수 ,  김영민

IPC: H01L21/02

Abstract: A scrubber for semiconductor manufacturing equipment is provided to prevent operation error by manipulating first and second manual valves while verifying whether the first and second manual valves are opened or closed. A pump(14) pumps out a gas from a process chamber(10) via an exhaust line(12). A chemical container(20) eliminates the gas exhausted from the exhaust line by using chemical reaction of the gas and a chemical. A manual valve(18) is installed at a front end of the chemical tank to interrupt flow of the gas when the chemical is replaced. An automatic valve(22) is to bypass the process gas exhausted from the process chamber. Opening and closing of the manual valve are detected by a sensor(24). A controller(26) outputs signals of opening and closing the automatic valve.

Abstract translation: 提供用于半导体制造设备的洗涤器，用于通过在验证第一和第二手动阀是打开还是关闭的同时操纵第一和第二手动阀来防止操作错误。 泵（14）经由排气管（12）从处理室（10）泵出气体。 化学容器（20）通过使用气体和化学品的化学反应来消除从排气管排出的气体。 当化学品更换时，手动阀（18）安装在化学罐的前端，以阻止气体的流动。 自动阀（22）绕过处理室排出的工艺气体。 通过传感器（24）检测手动阀的打开和关闭。 控制器（26）输出打开和关闭自动阀的信号。