반도체 제조용 스테퍼
    2.
    发明公开
    반도체 제조용 스테퍼 无效
    制造半导体器件的步进器

    公开(公告)号:KR1020020096262A

    公开(公告)日:2002-12-31

    申请号:KR1020010034615

    申请日:2001-06-19

    Inventor: 홍순환

    Abstract: PURPOSE: A stepper for manufacturing semiconductors is provided to reduce a loading time and a generation of error when loading a reticle by forming a PPD box on an upper part of a reticle box. CONSTITUTION: The stepper comprises a reticle box(10), a reticle loader(12) for loading a reticle, a PPD box(14), and a bar code leader(18). The PPD box(14) is located on the upper part of the reticle box(10) for inspecting particles of the reticle loaded by the reticle loader(12). The bar code leader(18) is fixed to a fork(16) of the reticle loader(12) for checking bar code of the reticle loaded by the reticle loader(12).

    Abstract translation: 目的:提供制造半导体的步进器,以通过在标线盒的上部形成PPD盒来加载掩模版来减少加载时间和产生误差。 构成:步进器包括标线盒(10),用于加载掩模版的掩模版加载器(12),PPD盒(14)和条形码引导件(18)。 PPD盒(14)位于标线盒(10)的上部,用于检查由标线装载器(12)装载的掩模版的颗粒。 条形码引导件(18)固定到光罩加载器(12)的叉子(16)上,用于检查由光罩加载器(12)加载的掩模版的条形码。

    투영렌즈 오염측정장치가 구비된 노광설비
    3.
    发明公开
    투영렌즈 오염측정장치가 구비된 노광설비 无效
    具有变压器镜片污染测量装置的曝光设备

    公开(公告)号:KR1020040008435A

    公开(公告)日:2004-01-31

    申请号:KR1020020042072

    申请日:2002-07-18

    Inventor: 홍순환

    Abstract: PURPOSE: An exposure equipment having a contamination measuring apparatus of a zoom lens is provided to be capable of reducing the generation of product failure by automatically and regularly measuring the extent of contamination of the zoom lens. CONSTITUTION: An exposure equipment is provided with a light source(11) for emitting predetermined wavelength light, a reticle(12) installed at the lower portion of the light source for forming a predetermined pattern, and a stepper located at the lower portion of the reticle. At this time, the stepper includes a zoom lens(13). The exposure equipment further includes a stage(21) located at the lower portion of the zoom lens for loading a wafer(W), a contamination detecting part(30) installed at one side of the stage for checking the contamination state of the zoom lens, and a controller(37) for generating an interlock signal according to the output signal of the contamination detecting part.

    Abstract translation: 目的:提供具有变焦透镜的污染测量装置的曝光设备,以能够通过自动定期测量变焦透镜的污染程度来减少产品故障的产生。 构成:曝光设备设置有用于发射预定波长光的光源(11),安装在光源下部以形成预定图案的掩模版(12),以及位于 十字线。 此时,步进器包括变焦透镜(13)。 所述曝光设备还包括位于所述变焦透镜的下部的用于装载晶片(W)的台(21),安装在所述台的一侧的污染物检测部(30),用于检查所述变焦透镜的污染状态 以及根据污染物检测部的输出信号生成互锁信号的控制器(37)。

    에스엔에스 위젯 제공 방법 및 그 장치
    4.
    发明公开
    에스엔에스 위젯 제공 방법 및 그 장치 有权
    提供SNS WIDGET的方法和装置

    公开(公告)号:KR1020110093528A

    公开(公告)日:2011-08-18

    申请号:KR1020100013648

    申请日:2010-02-12

    CPC classification number: G06F3/0481 G06Q10/107

    Abstract: PURPOSE: A method and device for providing a SNS widget are provided to easily approach to the useful information by providing a widget which integrally manages SNS. CONSTITUTION: A display unit(113) displays a SNS(Social Network Service) Widget. A communication unit(111) receives SNS service information from external SNS servers(121-12n). A controller(112) incorporates the SNS service information into the widget. The controller receives SNS service information from an external SNS server which a user selects. The controller provides an update button about the SNS service information to Widget. If the update button is selected, the controller newly receives the SNS service information from the external SNS server.

    Abstract translation: 目的:提供一种用于提供SNS小部件的方法和设备,以便通过提供一体化地管理SNS的小部件来容易地接近有用的信息。 构成:显示单元(113)显示SNS(社交网络服务)小部件。 通信单元(111)从外部SNS服务器(121-12n)接收SNS服务信息。 控制器(112)将SNS服务信息合并到小部件中。 控制器从用户选择的外部SNS服务器接收SNS服务信息。 控制器向Widget提供有关SNS服务信息的更新按钮。 如果选择了更新按钮,则控制器从外部SNS服务器新收到SNS服务信息。

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