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公开(公告)号：KR1020090075069A
公开(公告)日：2009-07-08
申请号：KR1020080000834
申请日：2008-01-03
Applicant: 서강대학교산학협력단 , 연세대학교 산학협력단
CPC classification number: G01B9/02063 , G01B9/02002 , G01B9/02068
Abstract: A hybrid function microscope using an I / Q interferometer and scanning method is provided to perform the complex diagnosis of a desiring domain by scanning with the detection light. A hybrid function microscope using an I / Q interferometer comprises: a I / Q interferometer(110) converting reference light and detection light into an I and Q signal and outputting; a sample holder in which a sample is settled; an XY scanner(142) moving the sample holder vertically to the progressive direction of the detection light; a scanner drive unit(160) controlling the movement of the XY scanner; a vertical moving unit(140) moving the sample holder to the same direction as the progressive direction of the detection light; a minute distance mediation unit(170) controlling the movement of the vertical moving unit; a light collection/collimation unit(130) collecting the detection light on a surface of the sample or collimating the detection light transmitting or reflecting with the sample in order to supply to the I / Q interferometer; and a computer(150) transmitting a signal controlling the movement of the vertical moving unit.
Abstract translation: 提供使用I / Q干涉仪和扫描方法的混合功能显微镜，通过用检测光进行扫描来执行期望域的复杂诊断。 使用I / Q干涉仪的混合功能显微镜包括：将参考光和检测光转换成I和Q信号并输出的I / Q干涉仪（110） 其中样品沉降的样品架; XY扫描器（142）使样本架垂直移动到检测光的行进方向; 扫描器驱动单元（160），其控制所述XY扫描器的移动; 垂直移动单元（140）使样本保持器沿与检测光的行进方向相同的方向移动; 控制垂直移动单元的移动的微小距离中介单元（170）; 收集/准直单元（130），其收集样品表面上的检测光或准直与样品一起发射或反射的检测光，以便提供给I / Q干涉仪; 以及发送控制垂直移动单元的移动的信号的计算机（150）。
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公开(公告)号：KR100927865B1
公开(公告)日：2009-11-23
申请号：KR1020080000834
申请日：2008-01-03
Applicant: 서강대학교산학협력단 , 연세대학교 산학협력단
CPC classification number: G01B9/02063 , G01B9/02002 , G01B9/02068
Abstract: The present invention relates to a scanning microscope using an I/Q-interferometer. The scanning microscope includes an I/Q-interferometer which demodulates the phase change and amplitude change induced on the probe beam to provide the I- and Q-signals, an XY scanner, a scanner driver, a precision motion stage controlling the displacement of the sample along the direction parallel to the direction of the probe beam, a motion stage driver, a focusing/collimating device, and a computer. The computer transfers control commands to the scanner driver for scanning the XY scanner, receives I- and Q-signal provided from the I/Q-interferometer, processes the I- and Q-signal to obtain the corresponding phase and amplitude values at each scanning point, calculates error signal for maintaining constant phase during the scanning, and transfers commands to the motion stage driver for the precision motion stage to compensate for phase changes caused by surface morphology during the scanning. The scanning microscope performs a multilayer scanning or a constant phase scanning to extract information for the surface or inside of the sample.
Abstract translation: 本发明涉及使用I / Q干涉仪的扫描显微镜。 该扫描显微镜包括I / Q干涉仪，其解调在探测光束上感应的相位变化和振幅变化以提供I和Q信号，XY扫描仪，扫描仪驱动器，控制 沿着平行于探测光束方向的方向采样，运动台驱动器，聚焦/准直装置和计算机。 计算机将控制命令传输到扫描仪驱动程序以扫描XY扫描仪，接收I / Q干涉仪提供的I和Q信号，处理I和Q信号以获得每次扫描的对应相位和幅度值 计算用于在扫描期间保持恒定相位的误差信号，并且将命令传送到用于精确运动级的运动台驱动器以补偿在扫描期间由表面形态引起的相位变化。 扫描显微镜执行多层扫描或恒定相扫描以提取样品表面或内部的信息。
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公开(公告)号：KR100866038B1
公开(公告)日：2008-11-05
申请号：KR1020070077275
申请日：2007-08-01
Applicant: 서강대학교산학협력단 , 연세대학교 산학협력단
CPC classification number: G01B9/0207 , G01B9/02003 , G01B9/02081 , G01B2290/70
Abstract: A scanning electron microscope utilizing the heterodyne interferometer is provided to measure the phase and the amplitude swing induced from the penetration or the reflected signal light at the same time. The scanning electron microscope(10) utilizing the heterodyne interferometer includes the heterodyne interferometer(100) which converts and outputs the signal light and the reference light into the quadrature-phase signal and I-signal outputted the light concentration; the XY scanner(130) moving the sample holding stage to the dual type weaving by hands about the progressive direction of the signal light; the scanner drive unit(140) for controlling the movement of the XY scanner; the focusing apparatus(110) for condensing the signal light provided from the heterodyne interferometer with the surface of sample; the A/D converter(160) converting the quadrature-phase signal and the I-signal into the digital signal; the computer(150) transmitting the movement control signal controlling the movement of the XY scanner as the scanner drive unit.
Abstract translation: 提供利用外差干涉仪的扫描电子显微镜，以同时测量从穿透或反射信号光引起的相位和振幅摆动。 使用外差干涉仪的扫描电子显微镜（10）包括将信号光和参考光转换并输出到正交相位信号中的外差干涉仪（100），输出光浓度的I信号; XY扫描器（130）通过手围绕信号光的逐行方向将样品保持台移动到双重编织; 扫描器驱动单元（140），用于控制XY扫描器的移动; 聚焦装置（110），用于将从外差干涉仪提供的信号光与样品表面聚焦; 所述A / D转换器将所述正交相位信号和所述I信号转换为所述数字信号; 所述计算机（150）发送控制所述XY扫描器作为所述扫描仪驱动单元的移动的移动控制信号。
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公开(公告)号：KR100754695B1
公开(公告)日：2007-09-03
申请号：KR1020060055542
申请日：2006-06-20
Applicant: 삼성전자주식회사 , 서강대학교산학협력단
CPC classification number: H04B10/116 , H04B10/1149
Abstract: An optical transmitter and an optical wireless network using the same are provided to minimize ISI(Inter Symbol Interference) and to perform stable operation by low output power. An optical transmitter comprises an optical source(430a) and a scatterer(440a). The optical source(430a) outputs optical signals modulated from data. The scatterer(440a) has a concave inner surface facing an output surface of the optical source(430a), and projects scattered and retroreflected optical signals to a cell by scattering and retroreflecting the optical signals outputted from the optical source(430a). The scatterer(440a) includes a body and a sleeve unit. The body includes a concave inner face and the sleeve unit has a hollow shape extended from an end of the body.
Abstract translation: 提供了一种光发射机和使用该发射机的光无线网络，以最小化ISI（符号间干扰），并通过低输出功率进行稳定的操作。 光发射机包括光源（430a）和散射体（440a）。 光源（430a）输出从数据调制的光信号。 散射体（440a）具有面向光源（430a）的输出面的凹面内表面，并且通过散射和回射从光源（430a）输出的光信号而将散射和回射的光信号投射到单元。 散射体（440a）包括主体和套筒单元。 主体包括凹的内表面，并且套筒单元具有从主体的端部延伸的中空形状。
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