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公开(公告)号：KR102099430B1
公开(公告)日：2020-04-09
申请号：KR1020190086127
申请日：2019-07-17
Applicant: 서울과학기술대학교 산학협력단
IPC: H01L23/00 , H01L23/532 , H01L21/02
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