公开(公告)号：KR101058880B1

公开(公告)日：2011-08-25

申请号：KR1020100042869

申请日：2010-05-07

Applicant: 서울대학교산학협력단

Inventor： 박병국 ,  서창수 ,  유병두 ,  홍근기 ,  지상엽 ,  정재민

IPC: H01L27/15 ,  H01L33/02 ,  G09F9/33

CPC classification number: H01L25/167 ,  H01L24/95 ,  H01L27/1214 ,  H01L27/1255 ,  H01L33/20 ,  H01L33/40 ,  H01L2224/95085 ,  H01L2924/01322 ,  H01L2924/12036 ,  H01L2924/12041 ,  H01L2924/12044 ,  H01L2924/00

Abstract: PURPOSE: An LED display device with an active element and a manufacturing method thereof are provided to efficiently manufacture AM-LED display device in a high temperature for a short time by forming a LED block receiving part and a transistor receiving part and coupling the transistor block of a single crystal silicon with an LED block by a FSA(Fluidic Self Assembly) method. CONSTITUTION: A buffer layer is formed on a substrate(3). A source and a drain are respectively formed in the both sides of active layers on a transistor for switching(7) and a transistor for driving(8) by being separated on a buffer layer in a pigment unit. A first insulating layer is formed on the substrate while covering the active layer of the transistor for driving. A scan line is formed crossing the source and the drain of the transistor for switching on a first insulating layer. The bottom electrode of a storage capacitor is electrically connected with the drain of the transistor for switching. A second insulating layer is formed on the first insulating layer while covering the scan line, the bottom electrode of the storage capacitor and a cathode line. A source supply line is electrically connected with the source of the transistor for driving on the second insulating layer. An anode interconnection layer is formed between a data line and the source supply line. An LED block receiving part is formed into a pigment unit on the second insulating layer while at least covering a part with a third insulating layer.

Abstract translation: 目的：提供一种具有有源元件的LED显示装置及其制造方法，用于通过形成LED块接收部和晶体管接收部来高效地制造高温下的AM-LED显示装置，并将晶体管块 的具有LED块的单晶硅通过FSA（流体自组装）方法。 构成：在基板（3）上形成缓冲层。 源极和漏极分别在用于开关（7）的晶体管和用于驱动（8）的晶体管的有源层的两侧分别形成在颜料单元中的缓冲层上。 在覆盖用于驱动的​​晶体管的有源层的同时，在衬底上形成第一绝缘层。 形成与晶体管的源极和漏极交叉的第一绝缘层的扫描线。 存储电容器的底部电极与用于切换的晶体管的漏极电连接。 在第一绝缘层上形成第二绝缘层，同时覆盖扫描线，存储电容器的底部电极和阴极线。 源极电源线与晶体管的源极电连接，用于在第二绝缘层上驱动。 在数据线和源电源线之间形成阳极互连层。 LED块接收部分形成为第二绝缘层上的颜料单元，同时至少用第三绝缘层覆盖一部分。