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公开(公告)号：KR101077011B1
公开(公告)日：2011-10-26
申请号：KR1020090050955
申请日：2009-06-09
Applicant: 서울대학교산학협력단
CPC classification number: H01P11/008 , H01L2924/381 , H01P1/208 , H01P1/2088 , H01P11/002
Abstract: 본발명은미세가공공동공진기와그 제조방법및 이를이용한대역통과필터와발진기에관한것으로서, 특히미세가공공동공진기구조제작시에동시에형성되는전류프로브와패키지기판내의외부회로와전류프로브의연결시에간섭효과를없애기위한홈 구조를구비한미세가공공동공진기및 이를이용한밀리미터파대역통과필터와밀리미터파발진기에관한것이다. 본발명에따른미세가공공동공진기는, 가공공정을통해동시에형성된전류프로브와홈 구조를구비한공동구조; 및상기공동구조가집적된패키지기판을포함한다..
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公开(公告)号：KR1020100132237A
公开(公告)日：2010-12-17
申请号：KR1020090050955
申请日：2009-06-09
Applicant: 서울대학교산학협력단
CPC classification number: H01P11/008 , H01L2924/381 , H01P1/208 , H01P1/2088 , H01P11/002
Abstract: PURPOSE: A precision-machining air cavity resonator, a manufacturing method thereof, a bandpass filter, and an oscillator thereof are provided to remove an interference effect when the outer circuit of a package substrate is connected to a current probe by using a groove structure. CONSTITUTION: An air cavity structure(100) comprises a current probe(120) and a groove structure(110) which are simultaneously formed through a processing process. The air cavity structure is integrated to a package substrate(200). The groove structure removes an interference effect when the outer circuit is connected to the current probe. The current probe is formed into at least one pole or wall shape. The inner surface of the air cavity structure, which includes the current probe and the groove structure, is coated into a metal. A thin film microstrip or a CPW(Coplanar Waveguide) is operated as an input/output port between the air cavity structure and the outer circuit.
Abstract translation: 目的：提供精密加工空气腔谐振器，其制造方法，带通滤波器及其振荡器，以通过使用沟槽结构将封装衬底的外部电路连接到电流探针时消除干扰效应。 构成：空气腔结构（100）包括通过处理过程同时形成的电流探针（120）和凹槽结构（110）。 空气腔结构集成到封装衬底（200）。 当外部电路连接到电流探头时，凹槽结构消除了干扰效应。 电流探针形成至少一个极或壁形。 包括电流探针和凹槽结构的空气腔结构的内表面被涂覆成金属。 薄膜微带或CPW（共面波导）作为空气腔结构和外部电路之间的输入/输出端口进行操作。
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公开(公告)号：KR100964984B1
公开(公告)日：2010-06-21
申请号：KR1020090004048
申请日：2009-01-19
Applicant: 서울대학교산학협력단
CPC classification number: H01P7/06 , H01P1/207 , H01P1/2088
Abstract: PURPOSE: A cavity resonator and a filter are provided to reduce the coupling loss when a signal between a resonator and a CPW(Coplanar Waveguide) is transmitted by forming a groove part on a first substrate. CONSTITUTION: A cavity resonator(100) comprises a first substrate(300) and a second substrate(200). A metal layer pattern is formed in one side of the first substrate. The metal layer pattern comprises a CPW ground, a feed line, a coupling stage, and a resonant part. A groove part is formed in the other side of the first substrate in order to correspond with the coupling stage. A recess and a metal layer are formed in one side of the second substrate. The second substrate is combined with the first substrate with the flip-chip bonding.
Abstract translation: 目的：提供空腔谐振器和滤波器，以通过在第一基板上形成沟槽部分来传输谐振器和CPW（共平面波导）之间的信号时减小耦合损耗。 构造：空腔谐振器（100）包括第一衬底（300）和第二衬底（200）。 金属层图案形成在第一基板的一侧。 金属层图案包括CPW接地，馈电线，耦合级和谐振部分。 在第一基板的另一侧形成槽部，以便与耦合台相对应。 在第二基板的一侧形成凹部和金属层。 第二衬底与第一衬底与倒装芯片结合。
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