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公开(公告)号：KR101353055B1
公开(公告)日：2014-01-17
申请号：KR1020110081813
申请日：2011-08-17
Applicant: 서울대학교산학협력단
IPC: G01N27/447 , G01N27/30
Abstract: 절연성 지지 부재 상의 나노 포어 구조를 이용한 이온 소자가 제공된다. 본 발명의 일 실시예에 따른 나노 포어 구조를 이용한 이온 소자는, 제1 영역 및 제2 영역을 포함하는 챔버; 제1 영역에 위치하는 제1 전극; 제1 전극에 대향하여 상기 제2 영역에 위치하는 제2 전극; 제1 전극 및 제2 전극의 사이에 위치하고, 중심에 위치하는 나노 포어를 포함하는 나노 포어 막; 및 나노 포어 막을 지지하도록 나노 포어의 주변에 위치하는 절연성 지지 부재를 포함하고, 제1 전극 및 제2 전극에 인가되는 전기적 신호에 의해 나노 포어를 통과하는 이온 이동을 발시키는 것을 특징으로 한다.
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公开(公告)号：KR1020120000520A
公开(公告)日：2012-01-02
申请号：KR1020110061325
申请日：2011-06-23
Applicant: 서울대학교산학협력단
Abstract: PURPOSE: A DNA analysis device using a nanopore structure is provided to easily control electric charge of the surface of the nanopores. CONSTITUTION: A DNA analysis device using a nanopore structure comprises: a chamber(10) which contains a solution and comprises first(12) and second(14) areas; a first electrode(30) placed at the first area; a second electrode(40) which is placed at the second area to face the first electrode; and an electric signal unit(50) which is placed between the first and second electrodes and is electrically linked to a conductive layer, and the first and second electrodes.
Abstract translation: 目的：提供使用纳米孔结构的DNA分析装置，以容易地控制纳米孔表面的电荷。 构成：使用纳米孔结构的DNA分析装置包括：容纳溶液并包含第一（12）和第二（14）区域的腔室（10） 放置在第一区域的第一电极（30） 第二电极（40），其位于所述第二区域以面对所述第一电极; 以及电信号单元（50），其被放置在第一和第二电极之间并且电连接到导电层，以及第一和第二电极。
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公开(公告)号：KR1020110015120A
公开(公告)日：2011-02-15
申请号：KR1020090072674
申请日：2009-08-07
Applicant: 서울대학교산학협력단
CPC classification number: G03F7/70625 , G03F1/76 , G03F7/063 , G03F7/162 , G03F7/2059 , G03F7/70408 , H01L29/0669
Abstract: PURPOSE: A method for forming a pattern is provided to easily form a pattern of nano-size and grid form. CONSTITUTION: A method for forming a pattern comprises: a step of placing an object having a crystalline structure and grid image on a chamber; a step of irradiating a first electron beam to the object; a step of exposing a substrate having the electron resist to a first electron beam; a step of rotating grid image; a step of irradiating a second electron beam to the object; a step of exposing the substrate to a second electron beam; a step of developing the electron beam resist to form an electron beam resist pattern; a step of etching electron beam resist pattern; and a step of forming a pattern from grid image.
Abstract translation: 目的：提供一种用于形成图案的方法，以容易地形成纳米尺寸和格子形式的图案。 构成：形成图案的方法包括：将具有晶体结构和栅格图像的物体放置在室上的步骤; 向所述物体照射第一电子束的步骤; 将具有电子抗蚀剂的基板暴露于第一电子束的步骤; 旋转网格图像的一步; 向所述物体照射第二电子束的步骤; 将衬底暴露于第二电子束的步骤; 显影电子束抗蚀剂以形成电子束抗蚀图案的步骤; 蚀刻电子束抗蚀图案的步骤; 以及从网格图像形成图案的步骤。
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公开(公告)号：KR1020130019699A
公开(公告)日：2013-02-27
申请号：KR1020110081813
申请日：2011-08-17
Applicant: 서울대학교산학협력단
IPC: G01N27/447 , G01N27/30
Abstract: PURPOSE: An ion device using a nanopore structure on an insulative supporting member is provided to arrange a nanopore film on the insulative supporting member, thereby decreasing a noise level of electrical signals generated by an ion passing through the inside of a nanopore. CONSTITUTION: An ion device using a nanopore structure comprises a chamber(10), a first electrode(30), a second electrode(40), a nanopore film(20), and insulative supporting member(50). The chamber includes first and second areas. The first electrode is arranged on the first area. The second electrode is arranged on the second area facing to the first electrode. The nanopore film is arranged between the first and second electrodes and includes a nanopore placed in the center. The insulative supporting member is arranged around the nanopore in order to support the nanopore film. An ion passes through the nanopore, and the movement of the ion is generated by electrical signals applied to the first and second electrodes.
Abstract translation: 目的：提供在绝缘支撑构件上使用纳米孔结构的离子装置，以在绝缘支撑构件上布置纳米孔膜，从而降低由通过纳米孔内部的离子产生的电信号的噪声水平。 构成：使用纳米孔结构的离子装置包括室（10），第一电极（30），第二电极（40），纳米孔膜（20）和绝缘支撑构件（50）。 该房间包括第一和第二区域。 第一电极布置在第一区域上。 第二电极布置在面向第一电极的第二区域上。 纳米孔膜布置在第一和第二电极之间，并且包括放置在中心的纳米孔。 绝缘支撑构件布置在纳米孔周围以便支撑纳米孔膜。 离子通过纳米孔，并且通过施加到第一和第二电极的电信号产生离子的移动。
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公开(公告)号：KR101209000B1
公开(公告)日：2012-12-06
申请号：KR1020100060665
申请日：2010-06-25
Applicant: 서울대학교산학협력단
IPC: G01N27/414 , C12Q1/68
Abstract: 그래핀나노포어구조를이용한이온소자및 DNA 분석용장치가제공된다. 본발명의일 실시예에따른그래핀나노포어구조를이용한이온소자는, 제1 영역및 제2 영역을포함하는챔버; 제1 영역에위치하는제1 전극; 제1 전극에대향하여제2 영역에위치하는제2 전극; 및제1 전극및 제2 전극의사이에위치하고, 그래핀층으로구성되며, 그래핀층을관통하는나노포어를포함하는나노포어막;을포함하고, 나노포어막, 제1 전극및 제2 전극에인가되는전기적신호에의해나노포어를통과하는이온전류가발생되는것을특징으로한다.
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Patent Agency Ranking
公开(公告)号：KR101226100B1
公开(公告)日：2013-01-25
申请号：KR1020100096910
申请日：2010-10-05
Applicant: 서울대학교산학협력단
IPC: G01N33/48 , G01N35/00 , C23C16/455 , C23C16/00
CPC classification number: B81C1/00087
Abstract: 원자층 증착법에 의해 제한된 크기를 갖는 나노 포어의 제조 방법이 제공된다. 본 발명의 일 실시예에 따른 나노 포어의 제조 방법은, 멤브레인에 개구부를 형성하는 단계; 및 상기 개구부의 측벽에 원자층 증착법(ALD)을 이용하여 전구체로부터 커버막을 형성함으로써 나노 포어를 형성하는 단계;를 포함하고, 상기 나노 포어의 크기는 상기 전구체의 크기에 의해 제어되는 것을 특징으로 한다.
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公开(公告)号：KR101174482B1
公开(公告)日：2012-08-16
申请号：KR1020100060663
申请日：2010-06-25
Applicant: 서울대학교산학협력단
IPC: H01L51/05
Abstract: 나노포어구조를이용한스위칭소자, 그를포함하는스위칭장치및 그의제조방법이제공된다. 본발명의일 실시예에따른나노포어구조를이용한스위칭소자는, 제1 영역및 제2 영역을포함하는챔버; 제1 영역에위치하는제1 전극; 제1 전극에대향하여제2 영역에위치하는제2 전극; 및제1 전극및 제2 전극의사이에위치하고, 도전층, 상기도전층을관통하는나노포어및 도전층의표면에부착되어나노포어내에위치하는유기화합물을포함하는나노포어막;을포함하고, 유기화합물은도전층에인가되는전압에따라나노포어의채널크기를변화시키는것을특징으로한다.
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公开(公告)号：KR1020120000342A
公开(公告)日：2012-01-02
申请号：KR1020100060663
申请日：2010-06-25
Applicant: 서울대학교산학협력단
IPC: H01L51/05
CPC classification number: H01L51/0558 , H01L51/0093
Abstract: PURPOSE: A switching device, a switching apparatus including the same, a method for manufacturing thereof are provided to actively control the size of a nanopore by attaching an organic compound to the surface of the nanopore. CONSTITUTION: A chamber(10) includes a first area(12) and a second part(14). A first electrode(30) is placed in the first area. A second electrode(40) is placed in the second part facing the first electrode. A nanopore film(20) is placed between the first electrode and the second electrode. The nanopore film includes a conductive layer(21), nanopore(25), and the organic compound(23) attached to the surface of the conductive layer.
Abstract translation: 目的：提供一种开关装置，包括该开关装置的开关装置及其制造方法，以通过将有机化合物附着到纳米孔的表面来主动地控制纳米孔的尺寸。 构成：腔室（10）包括第一区域（12）和第二部分（14）。 第一电极（30）被放置在第一区域中。 第二电极（40）被放置在面向第一电极的第二部分中。 纳米孔膜（20）被放置在第一电极和第二电极之间。 纳米孔膜包括导电层（21），纳米孔（25）和附着到导电层表面的有机化合物（23）。
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公开(公告)号：KR1020130143429A
公开(公告)日：2013-12-31
申请号：KR1020120066985
申请日：2012-06-21
Applicant: 서울대학교산학협력단
Abstract: An ion element with a vertical nanochannel and a nanopore is provided. The ion element according to an embodiment of the present invention includes: an insulating substrate that has a cavity formed on the center; a first membrane that is located on the substrate and has a vertical nanochannel located in the upper portion of the cavity and penetrating the first membrane while having a first mean diameter; and a second membrane that is located on the first membrane and has a nanopore located in the upper portion of the vertical nanochannel and penetrating the second membrane while having a second mean diameter smaller than the first mean diameter.
Abstract translation: 提供了具有垂直纳米通道和纳米孔的离子元件。 根据本发明的实施方式的离子元件包括：绝缘基板，其具有形成在中心的空腔; 第一膜，其位于所述基底上并且具有位于所述空腔的上部中并穿透所述第一膜同时具有第一平均直径的垂直纳米通道; 以及第二膜，其位于所述第一膜上并且具有位于所述垂直纳米通道的上部中并且穿透所述第二膜的纳米孔，同时具有小于所述第一平均直径的第二平均直径。
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公开(公告)号：KR1020120035416A
公开(公告)日：2012-04-16
申请号：KR1020100096910
申请日：2010-10-05
Applicant: 서울대학교산학협력단
IPC: G01N33/48 , G01N35/00 , C23C16/455 , C23C16/00
CPC classification number: B81C1/00087
Abstract: PURPOSE: A method for preparing nanopore with limited size by atom layer deposition is provided to produce a large amount of nanopores with uniform size. CONSTITUTION: A method for preparing nanopores(25) comprises: a step of forming an opening part at a membrane(23); and a step of forming the nanopores by forming a cover film(24) from a precursor using ALD(atom layer deposition) at one side of the opening part. The membrane further comprises a conductive layer and insulation layer placed at upper side, lower side, and both sides of the conductive layer.
Abstract translation: 目的：提供通过原子层沉积制备具有有限尺寸的纳米孔的方法，以产生大量均匀的纳米孔。 构成：制备纳米孔（25）的方法包括：在膜（23）上形成开口部分的步骤; 以及通过在开口部的一侧使用ALD（原子层沉积）从前体形成覆盖膜（24）来形成纳米孔的步骤。 膜还包括导电层和放置在导电层的上侧，下侧和两侧的绝缘层。
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