公开(公告)号：KR1020120068617A

公开(公告)日：2012-06-27

申请号：KR1020100130313

申请日：2010-12-17

Applicant: 서울대학교산학협력단

Inventor： 장정식 ,  장용진 ,  조준혁 ,  신경환

IPC: H01L21/027

CPC classification number: H01L21/0274 ,  G03F7/167 ,  G03F7/2018 ,  G03F7/70033

Abstract: PURPOSE: A method for forming a micro pattern of a conductive polymer using a plasma process, an inkjet printing, and a vapor deposition polymerization is provided to form a pattern with high quality by reforming the surface of a supporter through the plasma process. CONSTITUTION: A surface of a supporter is reformed by processing a flexible supporter with plasma. Polymerization initiator solutions for an inkjet printing are made by dissolving polymerization initiator in water. The polymerization initiator solutions are injected into a printer head and a desirable size and a desirable shape are printed on the supporter with the reformed surface with an inkjet printer using a computer program. The supporter printed with the polymerization initiator solutions is located in a vapor deposition polymerization reactor. A conductive polymer pattern is formed by vaporizing chemical materials in reaction to a monomer of a conductive polymer.

Abstract translation: 目的：提供使用等离子体处理，喷墨印刷和气相沉积聚合形成导电聚合物的微图案的方法，以通过等离子体处理重整载体的表面以形成高质量的图案。 构成：通过用等离子体处理柔性支架来改造支撑体的表面。 通过将聚合引发剂溶解在水中制成用于喷墨印刷的聚合引发剂溶液。 将聚合引发剂溶液注入到打印机头中，并且使用计算机程序使用具有喷墨打印机的改质表面将所需尺寸和期望的形状印刷在支撑体上。 用聚合引发剂溶液印刷的载体位于气相沉积聚合反应器中。 通过与导电聚合物的单体反应来蒸发化学材料形成导电聚合物图案。