公开(公告)号：KR101306481B1

公开(公告)日：2013-09-09

申请号：KR1020120078968

申请日：2012-07-19

Applicant: 서울대학교산학협력단

Inventor： 하준근 ,  김용권 ,  유승현 ,  진주영

IPC: G02B3/00 ,  B81B1/00 ,  B81C1/00

CPC classification number: G02B3/00 ,  B81B1/00 ,  G02B1/00 ,  G02B5/1876 ,  G02B26/001

Abstract: PURPOSE: A micro-optical component which is built in a substrate and a method for manufacturing thereof, and a micro-optical component array and a method for manufacturing thereof are provided to reduce a time and a trouble required for a post-processing through an etching process of a main substrate and a glass heat reflow process. CONSTITUTION: A micro-optical component which is built in a substrate and a method for manufacturing thereof, and a micro-optical component array and a method for manufacturing thereof comprise the following steps: a micro-optical component etches built-in main substrates (10, 20, 30, 50) according to an etch mask pattern, and forms more than one cavity (11, 21, 31, 51); glass substrates (12, 22, 32, 35, 52) are welded to an upper part of the main substrate in which the cavity is formed; a primary glass heat reflow process is performed so that a glass of the glass substrate fills up more than one cavity; an upper part and a lower part of the main substrate in which the glass is filled are etched, and more than one micro-optical component which is built in the main substrate is manufactured; and when the micro-optical component is micro glass lenses (14, 34), the more than one cavity forming step aims to etch the main substrate perpendicularity in order to form a cavity of a concave pillar type. [Reference numerals] (a) Vertically edge a main substrate; (b) Make the heat of glass flow again; (c) Manufacture a glass pole; (d) Manufacture a glass lens

Abstract translation: 目的：提供内置于基板的微型光学部件及其制造方法，微型光学部件阵列及其制造方法，以减少后处理所需的时间和麻烦， 主衬底的蚀刻工艺和玻璃热回流工艺。 构成：内置于基板的微型光学部件及其制造方法以及微型光学部件阵列及其制造方法包括以下步骤：微光部件蚀刻内置的主基板（ 10,20,30,50），并且形成多于一个的空腔（11,21,31,51）; 将玻璃基板（12,22,32,35,52）焊接到形成有空腔的主基板的上部; 执行主玻璃热回流工艺，使得玻璃基板的玻璃填充多于一个空腔; 蚀刻玻璃被填充的主基板的上部和下部，制造内置于主基板的多个微型光学部件; 并且当微光学部件是微玻璃透镜（14,34）时，多于一个的腔形成步骤旨在蚀刻主衬底的垂直度，以便形成凹柱型腔。 （附图标记）（a）垂直边缘主基板; （b）使玻璃的热量再次流出; （c）制造玻璃杆; （d）制造玻璃镜片

公开(公告)号：KR101380497B1

公开(公告)日：2014-04-01

申请号：KR1020130036210

申请日：2013-04-03

Applicant: 서울대학교산학협력단

Inventor： 유승현 ,  김용권 ,  진주영 ,  하준근

IPC: B81C1/00 ,  B81B7/02 ,  G02B3/00 ,  G02B7/00

Abstract: According to an embodiment of the present invention, in a method for fabricating an optical device having a micro lens, an optical device fabricating method comprises a step of bonding a first glass substrate to a main substrate formed with a first cavity; a step of filling the cavity with glass by a first thermal reflow process; a step of forming a glass column from the glass filled in the cavity; a step of forming a micro lens from the glass column by a second thermal reflow process; and a step of forming a driving apparatus of an optical device on the main substrate. [Reference numerals] (AA) Start; (BB) End; (S110) Etch a silicon substrate; (S120) Bond glass to the silicon substrate; (S130) First thermal reflow; (S140) Form a glass column; (S150) Form a lens by a second thermal reflow process; (S160) Wet etch the glass; (S170) Anodic bonding; (S180) Polish the silicon substrate and deposit a mask; (S190) Etch the silicon substrate; (S200) Package

Abstract translation: 根据本发明的实施例，在一种具有微透镜的光学器件的制造方法中，光学器件制造方法包括将第一玻璃衬底接合到形成有第一腔的主衬底的步骤; 通过第一热回流工艺用玻璃填充空腔的步骤; 从填充在空腔中的玻璃形成玻璃柱的步骤; 通过第二热回流工艺从玻璃柱形成微透镜的步骤; 以及在主基板上形成光学装置的驱动装置的步骤。 （附图标记）（AA）开始; （BB）结束; （S110）蚀刻硅衬底; （S120）将玻璃贴到硅衬底上; （S130）第一热回流; （S140）形成玻璃柱; （S150）通过第二热回流工艺形成透镜; （S160）湿法蚀刻玻璃; （S170）阳极接合; （S180）抛光硅衬底并沉积掩模; （S190）蚀刻硅衬底; （S200）包装