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公开(公告)号:KR101949504B1
公开(公告)日:2019-02-18
申请号:KR1020170073360
申请日:2017-06-12
Applicant: 성균관대학교산학협력단
Inventor: 박진홍 , 심재우 , 강동호
IPC: H01L29/76 , H01L29/66 , H01L29/43 , H01L29/16