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公开(公告)号：KR102165898B1
公开(公告)日：2020-10-14
申请号：KR1020190003272
申请日：2019-01-10
Applicant: 성균관대학교산학협력단
IPC: H01L31/032 , H01L31/0224 , H01L31/18 , H01L31/0256
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